AXCELIS TECHNOLOGIES INC reports

Company Names, identifiers, and filing context for this profile. 1 identity field
Company location
Beverly, MA
SEC filing record 1 source field available
Fiscal year end
31 December
AXCELIS TECHNOLOGIES INC has filed 1,611 SEC EDGAR filings since 05 May 2000

SEC filing history

Showing 126-150 of 1,000 matching filings.

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25
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6
4

4 filing

Filing date
19 May 2025
Reporting date
15 May 2025
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4

4 filing

Filing date
19 May 2025
Reporting date
15 May 2025
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4

4 filing

Filing date
15 May 2025
Reporting date
15 May 2025
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4

4 filing

Filing date
15 May 2025
Reporting date
15 May 2025
SEC evidence
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4

4 filing

Filing date
15 May 2025
Reporting date
15 May 2025
SEC evidence
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4

4 filing

Filing date
15 May 2025
Reporting date
15 May 2025
SEC evidence
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4

4 filing

Filing date
15 May 2025
Reporting date
15 May 2025
SEC evidence
Open document Open filing
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4

4 filing

Filing date
15 May 2025
Reporting date
15 May 2025
SEC evidence
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4

4 filing

Filing date
15 May 2025
Reporting date
15 May 2025
SEC evidence
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4

4 filing

Filing date
15 May 2025
Reporting date
15 May 2025
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SD File 000-30941

FORM SD

Filing date
06 May 2025
Reporting date
Not listed
SEC evidence
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SCHEDULE 13G/A File 005-60443

SCHEDULE 13G/A filing

Filing date
29 Apr 2025
Reporting date
Not listed
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4

4 filing

Filing date
22 Apr 2025
Reporting date
21 Apr 2025
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ARS File 000-30941

ARS

Filing date
31 Mar 2025
Reporting date
31 Dec 2024
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DEF 14A File 000-30941

DEF 14A

Filing date
31 Mar 2025
Reporting date
07 May 2025
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4

4 filing

Filing date
04 Mar 2025
Reporting date
28 Feb 2025
SEC evidence
Open document Open filing
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4

4 filing

Filing date
04 Mar 2025
Reporting date
28 Feb 2025
SEC evidence
Open document Open filing
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4

4 filing

Filing date
04 Mar 2025
Reporting date
28 Feb 2025
SEC evidence
Open document Open filing
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4

4 filing

Filing date
04 Mar 2025
Reporting date
28 Feb 2025
SEC evidence
Open document Open filing
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4

4 filing

Filing date
04 Mar 2025
Reporting date
28 Feb 2025
SEC evidence
Open document Open filing
Next action
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