Latest Period
Q1 2026
Security Snapshot
AXCELIS TECHNOLOGIES INC - COMMON STOCK (ACLS) Institutional Ownership
CUSIP: 054540208
13F Institutional Holders and Ownership History from Q3 2015 to Q1 2026
Institutions Reporting
369
Shares (Excl. Options)
32,545,211
Price
$93.08
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- Type / Class
- Equity / COMMON STOCK
- Symbol
- ACLS on Nasdaq
- Shares outstanding
- 30,789,874
- Price per share
- $131.02
- All holders as of 31 Mar 2026
- Q1 2026
- Total 13F shares
- 32,545,211
- Total reported value
- $3,028,722,119
- % of total 13F portfolios
- 0%
- Share change
- +1,252,103
- Value change
- +$132,386,912
- Number of holders
- 369
- Price from insider filings
- $131.02
Reported Shares, Excluding Options vs Price
Reported Value, Excluding Options
Total Investors
Key facts
- ACLS - AXCELIS TECHNOLOGIES INC - COMMON STOCK is tracked under CUSIP 054540208.
- 369 institutions reported positions in Q1 2026.
- 6 significant owners is listed from Schedule 13D/13G reporting.
Change
- Holder count moved from 368 to 369 between Q4 2025 and Q1 2026.
- Reported value moved from $2,518,012,969 to $3,028,722,119.
Research use
- You can quickly see who holds this security, then open quarter and manager detail pages for full evidence.
- 13F and Schedule 13D/13G sections are kept together so you can cross-check institutional and beneficial ownership context.
Evidence
Source: SEC Form 13F
Open SEC Evidence
Latest holder context comes from 369 institutions filings for Q1 2026.
Security key
054540208
Latest holder period
Q1 2026
13F holders
369
13D/G owners
6
CIK / CUSIP context first
Open Q1 2026 holders
ACLS full holder history
AXCELIS TECHNOLOGIES INC SEC filings
AXCELIS TECHNOLOGIES INC company facts
AXCELIS TECHNOLOGIES INC insider transactions
Broader feeds
Recent Quarterly Holder Reports
Open recent reporting periods for CUSIP 054540208:
Significant Owners of AXCELIS TECHNOLOGIES INC - COMMON STOCK (ACLS) based on Schedule 13D/G filings
| Filer | Ownership | Change % | Holdings Value | Net Change | Nb Shares | Change % | Reporting Name | Report Period |
|---|---|---|---|---|---|---|---|---|
| BlackRock, Inc. | 15% | $238,676,641 | 4,911,042 | BlackRock, Inc. | 31 Mar 2025 | |||
| FMR LLC | 11% | +42% | $385,292,777 | +$116,070,470 | 3,479,256 | +43% | FMR LLC | 30 Apr 2026 |
| VANGUARD PORTFOLIO MANAGEMENT LLC | 8.1% | $232,826,496 | 2,501,359 | Vanguard Portfolio Management | 31 Mar 2026 | |||
| VANGUARD CAPITAL MANAGEMENT LLC | 5.3% | $150,540,239 | 1,617,321 | Vanguard Capital Management | 31 Mar 2026 | |||
| REINHART PARTNERS, LLC. | 5.2% | $154,283,702 | 1,589,898 | REINHART PARTNERS, LLC. | 31 Dec 2025 | |||
| AMERICAN CENTURY INVESTMENT MANAGEMENT INC | 4.3% | -18% | $131,400,104 | -$30,629,863 | 1,345,761 | -19% | American Century Investment Management, Inc. | 30 Sep 2025 |
As of 31 Mar 2026, 369 institutional investors reported holding 32,545,211 shares of AXCELIS TECHNOLOGIES INC - COMMON STOCK (ACLS). This represents 106% of the company’s total 30,789,874 outstanding shares.
Top 25 Institutional Shareholders
The largest institutional shareholders of AXCELIS TECHNOLOGIES INC - COMMON STOCK (ACLS) together control 85% of the company’s outstanding shares — a level of ownership often associated with strong institutional conviction and long‑term capital commitment.
| Institution | Ownership % | Shares Held | Share Change % | Portfolio % | Holdings Value |
|---|---|---|---|---|---|
| BlackRock, Inc. | 16% | 4,936,774 | +2.3% | 0.01% | $459,514,886 |
| VANGUARD PORTFOLIO MANAGEMENT LLC | 8.1% | 2,488,293 | 0% | 0.01% | $231,610,312 |
| FMR LLC | 7.9% | 2,431,121 | +298% | 0.01% | $226,288,732 |
| REINHART PARTNERS, LLC. | 5.4% | 1,657,745 | +4.3% | 4.4% | $154,304,296 |
| VANGUARD CAPITAL MANAGEMENT LLC | 4.5% | 1,382,770 | 0% | 0% | $128,708,232 |
| Balyasny Asset Management L.P. | 4.4% | 1,364,540 | +460% | 0.25% | $127,011,383 |
| VICTORY CAPITAL MANAGEMENT INC | 4.2% | 1,279,005 | -29% | 0.08% | $119,049,785 |
| STATE STREET CORP | 3.9% | 1,189,045 | +0.24% | 0% | $110,676,309 |
| BNP PARIBAS ASSET MANAGEMENT Holding S.A. | 3.3% | 1,006,028 | -7.8% | 0.11% | $93,641,086 |
| AMERICAN CENTURY COMPANIES INC | 3.1% | 951,914 | -23% | 0.05% | $88,604,155 |
| DIMENSIONAL FUND ADVISORS LP | 2.7% | 844,097 | +0.36% | 0.02% | $78,565,010 |
| GEODE CAPITAL MANAGEMENT, LLC | 2.6% | 811,264 | -12% | 0% | $75,526,658 |
| PRIMECAP MANAGEMENT CO/CA/ | 2.1% | 658,652 | -0.95% | 0.05% | $61,307,328 |
| MORGAN STANLEY | 1.9% | 581,636 | +66% | 0% | $54,138,745 |
| D. E. Shaw & Co., Inc. | 1.8% | 544,421 | +16% | 0.04% | $50,674,707 |
| GOLDMAN SACHS GROUP INC | 1.6% | 497,624 | -21% | 0.01% | $46,318,842 |
| MANUFACTURERS LIFE INSURANCE COMPANY, THE | 1.6% | 491,745 | +3402% | 0.04% | $45,771,625 |
| CHARLES SCHWAB INVESTMENT MANAGEMENT INC | 1.4% | 445,769 | +3.4% | 0.01% | $41,492,179 |
| LSV ASSET MANAGEMENT | 1.4% | 429,500 | 0% | 0.09% | $39,978,000 |
| NORTHERN TRUST CORP | 1.4% | 416,703 | +2.9% | 0.01% | $38,786,715 |
| Boston Trust Walden Corp | 1.2% | 378,525 | -12% | 0.29% | $35,233,107 |
| UBS Group AG | 1.2% | 377,237 | +77% | 0.01% | $35,113,220 |
| PRICE T ROWE ASSOCIATES INC /MD/ | 1.2% | 362,202 | -5.4% | 0% | $33,715,000 |
| Boston Partners | 1.1% | 340,275 | -19% | 0.03% | $31,791,257 |
| Grantham, Mayo, Van Otterloo & Co. LLC | 1.1% | 334,786 | +3.7% | 0.08% | $31,161,881 |
Institutional Holders of AXCELIS TECHNOLOGIES INC - COMMON STOCK (ACLS) across Reporting Periods
| Period | Reported Shares, Excl. Options | Value, Excl. Options | Value Change | Price (Median) | Investors |
|---|---|---|---|---|---|
| 2026 Q1 | 32,545,211 | $3,028,722,119 | +$132,386,912 | $93.08 | 369 |
| 2025 Q4 | 31,302,857 | $2,518,012,969 | +$79,659,127 | $80.34 | 368 |
| 2025 Q3 | 30,365,084 | $2,956,146,323 | -$116,317,648 | $97.64 | 354 |
| 2025 Q2 | 31,565,555 | $2,202,316,189 | +$48,333,309 | $69.69 | 325 |
| 2025 Q1 | 31,029,593 | $1,538,370,514 | -$28,923,011 | $49.67 | 300 |
| 2024 Q4 | 30,908,235 | $2,161,421,332 | -$16,178,454 | $69.87 | 320 |
| 2024 Q3 | 30,091,124 | $3,151,601,748 | -$37,557,632 | $104.85 | 362 |
| 2024 Q2 | 30,607,626 | $4,350,568,984 | +$135,949,754 | $142.19 | 382 |
| 2024 Q1 | 29,995,266 | $3,344,516,488 | +$62,297,402 | $111.52 | 377 |
| 2023 Q4 | 29,357,827 | $3,807,055,461 | -$120,248,845 | $129.69 | 417 |
| 2023 Q3 | 29,741,040 | $4,849,220,159 | +$20,824,891 | $163.05 | 418 |
| 2023 Q2 | 29,465,009 | $5,401,368,114 | +$121,426,115 | $183.33 | 401 |
| 2023 Q1 | 29,000,298 | $3,863,375,127 | -$204,971 | $133.25 | 375 |
| 2022 Q4 | 29,119,503 | $2,310,940,929 | +$90,988,492 | $79.36 | 316 |
| 2022 Q3 | 28,398,688 | $1,719,886,261 | +$35,045,318 | $60.56 | 277 |
| 2022 Q2 | 27,743,217 | $1,521,703,980 | +$40,542,722 | $54.84 | 263 |
| 2022 Q1 | 27,062,266 | $2,044,421,467 | -$32,788,741 | $75.53 | 275 |
| 2021 Q4 | 27,540,475 | $2,052,001,785 | -$112,165,409 | $74.56 | 244 |
| 2021 Q3 | 29,085,136 | $1,368,242,181 | +$12,046,305 | $47.03 | 197 |
| 2021 Q2 | 28,851,236 | $1,166,308,282 | -$13,491,490 | $40.42 | 183 |
| 2021 Q1 | 29,166,371 | $1,198,535,654 | +$34,140,637 | $41.09 | 187 |
| 2020 Q4 | 28,479,814 | $829,334,781 | +$8,923,273 | $29.12 | 162 |
| 2020 Q3 | 28,312,135 | $622,926,760 | -$2,926,447 | $22.00 | 166 |
| 2020 Q2 | 28,283,390 | $787,682,223 | -$6,239,364 | $27.85 | 166 |
| 2020 Q1 | 28,687,843 | $525,368,516 | +$9,941,773 | $18.31 | 129 |
| 2019 Q4 | 28,119,574 | $677,705,946 | +$38,898,056 | $24.09 | 130 |
| 2019 Q3 | 26,628,481 | $455,135,544 | -$3,055,362 | $17.09 | 138 |
| 2019 Q2 | 26,890,418 | $404,695,686 | -$3,169,452 | $15.05 | 128 |
| 2019 Q1 | 27,113,742 | $545,543,169 | -$8,717,627 | $20.12 | 141 |
| 2018 Q4 | 27,673,106 | $492,597,108 | +$7,449,145 | $17.80 | 136 |
| 2018 Q3 | 27,096,740 | $532,381,177 | -$21,830,004 | $19.65 | 147 |
| 2018 Q2 | 28,222,214 | $558,847,836 | -$577,586 | $19.80 | 157 |
| 2018 Q1 | 28,073,992 | $690,550,204 | -$17,325,126 | $24.60 | 159 |
| 2017 Q4 | 28,700,108 | $823,659,496 | +$106,498,103 | $28.70 | 170 |
| 2017 Q3 | 25,026,149 | $684,283,569 | +$35,371,517 | $27.35 | 143 |
| 2017 Q2 | 23,956,754 | $501,886,367 | +$36,685,039 | $20.95 | 125 |
| 2017 Q1 | 22,560,447 | $423,876,506 | +$48,062,353 | $18.80 | 94 |
| 2016 Q4 | 21,994,136 | $320,013,702 | +$7,694,242 | $14.55 | 83 |
| 2016 Q3 | 20,462,146 | $271,735,066 | +$654,597 | $13.28 | 76 |
| 2016 Q2 | 20,437,732 | $54,978,752 | +$54,978,752 | $2.69 | 14 |
| 2015 Q4 | 0 | $0 | -$31,228,000 | $131.02 | 0 |
| 2015 Q3 | 11,695,785 | $31,228,000 | +$31,228,000 | $2.67 | 1 |