Security Snapshot

AXCELIS TECHNOLOGIES INC - COMMON STOCK (ACLS) Institutional Ownership

CUSIP: 054540208

13F Institutional Holders and Ownership History from Q3 2015 to Q1 2026

Latest Period

Q1 2026

Institutions Reporting

372

Shares (Excl. Options)

32,548,096

Price

$93.08

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Latest holder snapshot 5 signals
Portfolio coverage rank
0%
Share change
+1,249,920
Value change
+$132,150,131
Number of holders
372
Issuer context Names, identifiers, and filing context for this profile. 3 identity fields
Shares outstanding
30,789,874
SEC-reported price per share
$157.91
Insider filing price
$157.91
13F Shares, Excluding Options vs Price
13F Value, Excluding Options
Total Investors

Key facts

  • ACLS - AXCELIS TECHNOLOGIES INC - COMMON STOCK is tracked under CUSIP 054540208.
  • 372 institutions reported positions in Q1 2026.
  • 6 significant owners is listed from Schedule 13D/13G reporting.

Change

  • Holder count moved from 368 to 372 between Q4 2025 and Q1 2026.
  • SEC-reported value moved from $2,518,012,969 to $3,028,990,394.

Research use

  • You can quickly see who holds this security, then open quarter and manager detail pages for full evidence.
  • 13F and Schedule 13D/13G sections are kept together so you can cross-check institutional and beneficial ownership context.

Evidence

Source: SEC Form 13F

Latest holder context comes from 372 institutions filings for Q1 2026.

Open SEC evidence

Security key

054540208

Latest holder period

Q1 2026

13F holders

372

13D/G owners

6

CIK / CUSIP context first

13D/G owners

Significant owners

Large-stake holder rows connected to Schedule 13D/G evidence.

Rows
6
Security
ACLS
Filer Ownership Change % Holdings Value Net Change Nb Shares Change % Reporting Name Report Period
BlackRock, Inc. 15% $238,676,641 4,911,042 BlackRock, Inc. 31 Mar 2025
FMR LLC 11% +42% $385,292,777 +$116,070,470 3,479,256 +43% FMR LLC 30 Apr 2026
VANGUARD PORTFOLIO MANAGEMENT LLC 8.1% $232,826,496 2,501,359 Vanguard Portfolio Management 31 Mar 2026
VANGUARD CAPITAL MANAGEMENT LLC 5.3% $150,540,239 1,617,321 Vanguard Capital Management 31 Mar 2026
REINHART PARTNERS, LLC. 5.2% $154,283,702 1,589,898 REINHART PARTNERS, LLC. 31 Dec 2025
AMERICAN CENTURY INVESTMENT MANAGEMENT INC 4.3% -18% $131,400,104 -$30,629,863 1,345,761 -19% American Century Investment Management, Inc. 30 Sep 2025

As of 31 Mar 2026, 372 institutional investors reported holding 32,548,096 shares of AXCELIS TECHNOLOGIES INC - COMMON STOCK (ACLS). This represents 106% of the company’s total 30,789,874 outstanding shares.

13F concentration

Top 25 institutional shareholders

Largest 13F positions for this security by reported shares and value.

Top holder share
85%
Institution Ownership % Shares Held Share Change % Portfolio % Holdings Value
BlackRock, Inc. 16% 4,936,774 +2.3% 0.01% $459,514,886
VANGUARD PORTFOLIO MANAGEMENT LLC 8.1% 2,488,293 0% 0.01% $231,610,312
FMR LLC 7.9% 2,431,121 +298% 0.01% $226,288,732
REINHART PARTNERS, LLC. 5.4% 1,657,745 +4.3% 4.4% $154,304,296
VANGUARD CAPITAL MANAGEMENT LLC 4.5% 1,382,770 0% 0% $128,708,232
Balyasny Asset Management L.P. 4.4% 1,364,540 +460% 0.25% $127,011,383
VICTORY CAPITAL MANAGEMENT INC 4.2% 1,279,005 -29% 0.08% $119,049,785
STATE STREET CORP 3.9% 1,189,045 +0.24% 0% $110,676,309
BNP PARIBAS ASSET MANAGEMENT Holding S.A. 3.3% 1,006,028 -7.8% 0.11% $93,641,086
AMERICAN CENTURY COMPANIES INC 3.1% 951,914 -23% 0.05% $88,604,155
DIMENSIONAL FUND ADVISORS LP 2.7% 844,097 +0.36% 0.02% $78,565,010
GEODE CAPITAL MANAGEMENT, LLC 2.6% 811,264 -12% 0% $75,526,658
PRIMECAP MANAGEMENT CO/CA/ 2.1% 658,652 -0.95% 0.05% $61,307,328
MORGAN STANLEY 1.9% 581,636 +66% 0% $54,138,745
D. E. Shaw & Co., Inc. 1.8% 544,421 +16% 0.04% $50,674,707
GOLDMAN SACHS GROUP INC 1.6% 497,624 -21% 0.01% $46,318,842
MANUFACTURERS LIFE INSURANCE COMPANY, THE 1.6% 491,745 +3402% 0.04% $45,771,625
CHARLES SCHWAB INVESTMENT MANAGEMENT INC 1.4% 445,769 +3.4% 0.01% $41,492,179
LSV ASSET MANAGEMENT 1.4% 429,500 0% 0.09% $39,978,000
NORTHERN TRUST CORP 1.4% 416,703 +2.9% 0.01% $38,786,715
Boston Trust Walden Corp 1.2% 378,525 -12% 0.29% $35,233,107
UBS Group AG 1.2% 377,237 +77% 0.01% $35,113,220
PRICE T ROWE ASSOCIATES INC /MD/ 1.2% 362,202 -5.4% 0% $33,715,000
Boston Partners 1.1% 340,275 -19% 0.03% $31,791,257
Grantham, Mayo, Van Otterloo & Co. LLC 1.1% 334,786 +3.7% 0.08% $31,161,881

Quarter history

Institutional holders across reporting periods

Holder count, reported shares/value, and median price by quarter.

Periods
42
Latest
Q1 2026
Rows shown
1-25 of 42
Period 13F Shares, Excl. Options Value, Excl. Options Value Change Price (Median) Investors
2026 Q1 32,548,096 $3,028,990,394 +$132,150,131 $93.08 372
2025 Q4 31,302,857 $2,518,012,969 +$79,659,127 $80.34 368
2025 Q3 30,365,084 $2,956,146,323 -$116,317,648 $97.64 354
2025 Q2 31,565,555 $2,202,316,189 +$48,333,309 $69.69 325
2025 Q1 31,029,593 $1,538,370,514 -$28,923,011 $49.67 300
2024 Q4 30,908,235 $2,161,421,332 -$16,178,454 $69.87 320
2024 Q3 30,091,124 $3,151,601,748 -$37,557,632 $104.85 362
2024 Q2 30,607,626 $4,350,568,984 +$135,949,754 $142.19 382
2024 Q1 29,995,266 $3,344,516,488 +$62,297,402 $111.52 377
2023 Q4 29,357,827 $3,807,055,461 -$120,248,845 $129.69 417
2023 Q3 29,741,040 $4,849,220,159 +$20,824,891 $163.05 418
2023 Q2 29,465,009 $5,401,368,114 +$121,426,115 $183.33 401
2023 Q1 29,000,298 $3,863,375,127 -$204,971 $133.25 375
2022 Q4 29,119,503 $2,310,940,929 +$90,988,492 $79.36 316
2022 Q3 28,398,688 $1,719,886,261 +$35,045,318 $60.56 277
2022 Q2 27,743,217 $1,521,703,980 +$40,542,722 $54.84 263
2022 Q1 27,062,266 $2,044,421,467 -$32,788,741 $75.53 275
2021 Q4 27,540,475 $2,052,001,785 -$112,165,409 $74.56 244
2021 Q3 29,085,136 $1,368,242,181 +$12,046,305 $47.03 197
2021 Q2 28,851,236 $1,166,308,282 -$13,491,490 $40.42 183
2021 Q1 29,166,371 $1,198,535,654 +$34,140,637 $41.09 187
2020 Q4 28,479,814 $829,334,781 +$8,923,273 $29.12 162
2020 Q3 28,312,135 $622,926,760 -$2,926,447 $22.00 166
2020 Q2 28,283,390 $787,682,223 -$6,239,364 $27.85 166
2020 Q1 28,687,843 $525,368,516 +$9,941,773 $18.31 129
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