AXCELIS TECHNOLOGIES INC reports

Company Names, identifiers, and filing context for this profile. 1 identity field
Company location
Beverly, MA
SEC filing record 1 source field available
Fiscal year end
31 December
AXCELIS TECHNOLOGIES INC has filed 1,611 SEC EDGAR filings since 05 May 2000

SEC filing history

Showing 101-125 of 1,000 matching filings.

Per page
25
Current page
5
144 File 000-30941

144 filing

Filing date
11 Dec 2025
Reporting date
Not listed
SEC evidence
Open document Open filing
Next action
Verify source filing
SCHEDULE 13G/A File 005-60443

SCHEDULE 13G/A filing

Filing date
14 Nov 2025
Reporting date
Not listed
SEC evidence
Open document Open filing
Next action
Verify source filing
4

4 filing

Filing date
17 Oct 2025
Reporting date
16 Oct 2025
SEC evidence
Open document Open filing
Next action
Verify source filing
425 File 000-30941

425

Filing date
01 Oct 2025
Reporting date
Not listed
SEC evidence
Open document Open filing
Next action
Verify source filing
425 File 000-30941

425

Filing date
01 Oct 2025
Reporting date
Not listed
SEC evidence
Open document Open filing
Next action
Verify source filing
4

4 filing

Filing date
17 Sep 2025
Reporting date
15 Sep 2025
SEC evidence
Open document Open filing
Next action
Verify source filing
4

4 filing

Filing date
17 Sep 2025
Reporting date
15 Sep 2025
SEC evidence
Open document Open filing
Next action
Verify source filing
SCHEDULE 13G File 005-60443

SCHEDULE 13G filing

Filing date
14 Aug 2025
Reporting date
Not listed
SEC evidence
Open document Open filing
Next action
Verify source filing
4

4 filing

Filing date
17 Jun 2025
Reporting date
16 Jun 2025
SEC evidence
Open document Open filing
Next action
Verify source filing
4

4 filing

Filing date
17 Jun 2025
Reporting date
16 Jun 2025
SEC evidence
Open document Open filing
Next action
Verify source filing
4

4 filing

Filing date
21 May 2025
Reporting date
20 May 2025
SEC evidence
Open document Open filing
Next action
Verify source filing
144 File 000-30941

144 filing

Filing date
20 May 2025
Reporting date
Not listed
SEC evidence
Open document Open filing
Next action
Verify source filing
4

4 filing

Filing date
20 May 2025
Reporting date
16 May 2025
SEC evidence
Open document Open filing
Next action
Verify source filing
4

4 filing

Filing date
20 May 2025
Reporting date
16 May 2025
SEC evidence
Open document Open filing
Next action
Verify source filing
4

4 filing

Filing date
19 May 2025
Reporting date
15 May 2025
SEC evidence
Open document Open filing
Next action
Verify source filing
4

4 filing

Filing date
19 May 2025
Reporting date
15 May 2025
SEC evidence
Open document Open filing
Next action
Verify source filing
4

4 filing

Filing date
19 May 2025
Reporting date
15 May 2025
SEC evidence
Open document Open filing
Next action
Verify source filing
We use cookies and similar technologies to provide certain features, enhance the user experience and, if you allow them, measure engagement and deliver advertising. Analytics and marketing storage stay off until you grant consent. By clicking on "Agree and continue", you declare your consent to the use of the selected optional cookies. Manage preferences to update or revoke optional consent for future visits. For more information, see our Privacy Policy .