AXCELIS TECHNOLOGIES INC reports

Company Names, identifiers, and filing context for this profile. 1 identity field
Company location
Beverly, MA
SEC filing record 1 source field available
Fiscal year end
31 December
AXCELIS TECHNOLOGIES INC has filed 1,611 SEC EDGAR filings since 05 May 2000

SEC filing history

Showing 51-75 of 1,000 matching filings.

Per page
25
Current page
3
4

4 filing

Filing date
07 May 2026
Reporting date
06 May 2026
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SCHEDULE 13G/A File 005-60443

SCHEDULE 13G/A filing

Filing date
07 May 2026
Reporting date
Not listed
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144 File 000-30941

144 filing

Filing date
06 May 2026
Reporting date
Not listed
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SCHEDULE 13G File 005-60443

SCHEDULE 13G filing

Filing date
06 May 2026
Reporting date
Not listed
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4

4 filing

Filing date
04 May 2026
Reporting date
01 May 2026
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144 File 000-30941

144 filing

Filing date
01 May 2026
Reporting date
Not listed
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SCHEDULE 13G File 005-60443

SCHEDULE 13G filing

Filing date
29 Apr 2026
Reporting date
Not listed
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425

425

Filing date
29 Apr 2026
Reporting date
Not listed
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SCHEDULE 13G File 005-60443

SCHEDULE 13G filing

Filing date
28 Apr 2026
Reporting date
Not listed
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4

4 filing

Filing date
21 Apr 2026
Reporting date
20 Apr 2026
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4

4 filing

Filing date
02 Apr 2026
Reporting date
01 Apr 2026
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144 File 000-30941

144 filing

Filing date
01 Apr 2026
Reporting date
Not listed
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ARS File 000-30941

ARS

Filing date
31 Mar 2026
Reporting date
31 Dec 2025
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DEF 14A File 000-30941

FORM- DEF 14A

Filing date
31 Mar 2026
Reporting date
05 May 2026
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4

4 filing

Filing date
26 Mar 2026
Reporting date
24 Mar 2026
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SCHEDULE 13G/A File 005-60443

SCHEDULE 13G/A filing

Filing date
26 Mar 2026
Reporting date
Not listed
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3

3 filing

Filing date
25 Mar 2026
Reporting date
12 Mar 2026
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3

3 filing

Filing date
24 Mar 2026
Reporting date
12 Mar 2026
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144 File 000-30941

144 filing

Filing date
24 Mar 2026
Reporting date
Not listed
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4

4 filing

Filing date
03 Mar 2026
Reporting date
02 Mar 2026
SEC evidence
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4

4 filing

Filing date
03 Mar 2026
Reporting date
02 Mar 2026
SEC evidence
Open document Open filing
Next action
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