SC 13G/A |
Report
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Oct 18, 2024 |
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SC 13G/A |
Report
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SCHEDULE 13G/A |
Feb 13, 2024 |
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SC 13G/A |
Report
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AXCELIS TECHNOLOGIES, INC. |
Feb 9, 2024 |
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SC 13G/A |
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Jan 19, 2024 |
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SC 13G/A |
Report
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SCHEDULE 13G/A |
Apr 10, 2023 |
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SC 13G/A |
Report
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AXCELIS TECHNOLOGIES, INC. |
Feb 10, 2023 |
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SC 13G/A |
Report
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SCHEDULE 13G/A |
Feb 9, 2023 |
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SC 13G/A |
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Jan 26, 2023 |
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SC 13G/A |
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Jan 20, 2023 |
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SC 13G |
Report
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AXCELIS TECHNOLOGIES, INC. |
Oct 27, 2022 |
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SC 13G/A |
Report
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PRIMECAP MANAGEMENT CO/CA/ |
Oct 7, 2022 |
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SC 13G/A |
Report
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PRIMECAP MANAGEMENT CO/CA/ |
Feb 10, 2022 |
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SC 13G/A |
Report
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AXCELIS TECHNOLOGIES, INC. |
Feb 9, 2022 |
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SC 13G/A |
Report
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SCHEDULE 13G/A |
Feb 9, 2022 |
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SC 13G/A |
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SEC SCHEDULE 13G |
Feb 8, 2022 |
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SC 13G/A |
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Jan 28, 2022 |
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SC 13G/A |
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AXCELIS TECHNOLOGIES, INC. |
Feb 12, 2021 |
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SC 13G/A |
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SEC SCHEDULE 13G |
Feb 12, 2021 |
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SC 13G/A |
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SC 13G/A |
Feb 12, 2021 |
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SC 13G/A |
Report
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SCHEDULE 13G/A |
Feb 10, 2021 |
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SC 13G/A |
Report
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SEC SCHEDULE 13G |
Feb 4, 2021 |
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SC 13G/A |
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Jan 26, 2021 |
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SC 13G/A |
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SC 13G/A |
Feb 12, 2020 |
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SC 13G/A |
Report
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SCHEDULE 13G/A |
Feb 12, 2020 |
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SC 13G/A |
Report
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SCHEDULE 13G/A |
Feb 12, 2020 |
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SC 13G/A |
Report
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AXCELIS TECHNOLOGIES, INC. |
Feb 7, 2020 |
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SC 13G/A |
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Feb 4, 2020 |
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SC 13G/A |
Report
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SEC SCHEDULE 13G |
Jan 27, 2020 |
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SC 13G/A |
Report
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SEC SCHEDULE 13G |
Feb 12, 2019 |
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SC 13G/A |
Report
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Feb 11, 2019 |
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SC 13G/A |
Report
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AXCELIS TECHNOLOGIES, INC. |
Feb 8, 2019 |
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SC 13G/A |
Report
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SC 13G/A |
Feb 8, 2019 |
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SC 13G/A |
Report
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SCHEDULE 13G/A |
Feb 8, 2019 |
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SC 13G/A |
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Jan 24, 2019 |
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SC 13G/A |
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SEC SCHEDULE 13G |
Jul 10, 2018 |
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SC 13G |
Report
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2017 13-G FILING |
Feb 13, 2018 |
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SC 13G/A |
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Feb 12, 2018 |
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SC 13G/A |
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SCHEDULE 13G/A |
Feb 9, 2018 |
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SC 13G |
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Feb 8, 2018 |
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SC 13G/A |
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Jan 23, 2018 |
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SC 13G |
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SEC SCHEDULE 13G |
Jan 10, 2018 |
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SC 13G/A |
Report
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SC 13G/A |
Jan 4, 2018 |
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SC 13G/A |
Report
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Nov 9, 2017 |
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SC 13G/A |
Report
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AXCELIS TECHNOLOGIES, INC. |
Feb 13, 2017 |
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SC 13G |
Report
|
13-G FILING |
Feb 9, 2017 |
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SC 13G/A |
Report
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SC 13G/A |
Feb 9, 2017 |
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SC 13G |
Report
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SCHEDULE 13G |
Feb 9, 2017 |
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SC 13G/A |
Report
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Jan 19, 2017 |
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SC 13G/A |
Report
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13G / A FILING |
Nov 23, 2016 |
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SC 13G/A |
Report
|
13-G/A FILING |
Sep 30, 2016 |
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SC 13G/A |
Report
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SENVEST MANAGEMENT, LLC |
Feb 12, 2016 |
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SC 13G/A |
Report
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SC 13G/A |
Feb 12, 2016 |
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SC 13G |
Report
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2015 13-G FILING |
Feb 10, 2016 |
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SC 13G/A |
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Jan 25, 2016 |
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SC 13G |
Report
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AXCELIS TECHNOLOGIES, INC. |
Jun 30, 2015 |
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SC 13G/A |
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SC 13G/A |
Feb 13, 2015 |
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SC 13G |
Report
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DECEMBER 31, 2014 13-G FILING |
Feb 3, 2015 |
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SC 13G/A |
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Jan 30, 2015 |
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SC 13G/A |
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SC 13G/A |
Sep 4, 2014 |
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SC 13G |
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SC 13G |
May 7, 2014 |
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SC 13G |
Report
|
13-G FILING |
Feb 7, 2014 |
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SC 13G/A |
Report
|
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Jan 28, 2014 |
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SC 13G |
Report
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13-G FILING AS OF DECEMBER 31, 2012 |
Feb 13, 2013 |
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SC 13G/A |
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Feb 8, 2013 |
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SC 13G/A |
Report
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Feb 14, 2012 |
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SC 13G |
Report
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13-G FILING AS OF DECEMBER 31, 2011 |
Feb 13, 2012 |
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SC 13G/A |
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|
Feb 13, 2012 |
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SC 13G/A |
Report
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AXCELIS TECHNOLOGIES INC 13G-A 3 |
Feb 8, 2012 |
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SC 13G/A |
Report
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AXCELIS TECHNOLOGIES INC 13G-A 3 |
Feb 8, 2012 |
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SC 13G/A |
Report
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DOC ONE |
Feb 14, 2011 |
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SC 13G/A |
Report
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SCHNEIDER CAPITAL MANAGEMENT CORPORATION FORM 13G/A |
Feb 14, 2011 |
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SC 13G |
Report
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13G FILING DECEMBER 31, 2010 |
Feb 11, 2011 |
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SC 13G |
Report
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Feb 2, 2011 |
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SC 13G/A |
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AXCELIS TECHNOLOGIES, INC. 13G/A |
Jan 31, 2011 |
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SC 13G/A |
Report
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DOC ONE |
Aug 10, 2010 |
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SC 13G/A |
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DOC ONE |
Feb 16, 2010 |
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SC 13G |
Report
|
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Feb 12, 2010 |
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SC 13G/A |
Report
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Feb 12, 2010 |
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SC 13G |
Report
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13G FILING AS OF DECEMBER 31, 2009 |
Feb 11, 2010 |
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SC 13G/A |
Report
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SCHEDULE 13G |
Feb 8, 2010 |
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SC 13G/A |
Report
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2ND AMENDMENT OF 13G FILING |
Jan 5, 2010 |
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