Company Names, identifiers, and filing context for this profile. 1 identity field
Company location
Beverly, MA
SEC filing record 1 source field available
Fiscal year end
31 December
AXCELIS TECHNOLOGIES INC has filed 1,611 SEC EDGAR filings since 05 May 2000

SEC filing history

Showing 76-100 of 1,000 matching filings.

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25
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4
4

4 filing

Filing date
03 Mar 2026
Reporting date
02 Mar 2026
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4

4 filing

Filing date
03 Mar 2026
Reporting date
02 Mar 2026
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4

4 filing

Filing date
03 Mar 2026
Reporting date
02 Mar 2026
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4

4 filing

Filing date
03 Mar 2026
Reporting date
02 Mar 2026
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4

4 filing

Filing date
23 Feb 2026
Reporting date
20 Feb 2026
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144 File 000-30941

144 filing

Filing date
20 Feb 2026
Reporting date
Not listed
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425

425

Filing date
12 Feb 2026
Reporting date
Not listed
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SCHEDULE 13G File 005-60443

SCHEDULE 13G filing

Filing date
12 Feb 2026
Reporting date
Not listed
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425 File 000-30941

425

Filing date
06 Feb 2026
Reporting date
Not listed
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425 File 000-30941

425

Filing date
02 Feb 2026
Reporting date
Not listed
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425 File 000-30941

425

Filing date
28 Jan 2026
Reporting date
Not listed
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4

4 filing

Filing date
16 Jan 2026
Reporting date
15 Jan 2026
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EFFECT File 333-292008

EFFECT filing

Filing date
31 Dec 2025
Reporting date
Not listed
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424B3 File 333-292008

424B3

Filing date
31 Dec 2025
Reporting date
Not listed
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S-4/A File 333-292008

S-4/A

Filing date
29 Dec 2025
Reporting date
Not listed
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3

3 filing

Filing date
22 Dec 2025
Reporting date
19 Dec 2025
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4

4 filing

Filing date
18 Dec 2025
Reporting date
17 Dec 2025
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4

4 filing

Filing date
18 Dec 2025
Reporting date
16 Dec 2025
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144 File 000-30941

144 filing

Filing date
17 Dec 2025
Reporting date
Not listed
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4

4 filing

Filing date
12 Dec 2025
Reporting date
11 Dec 2025
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