SEC ownership of AXCELIS TECHNOLOGIES INC

Top holders, 13D/G large-stake signals, insider positions, and transaction flow tied to CIK 0001113232.

Comparable stake leader

BlackRock, Inc.

Disclosed value leader

BlackRock, Inc.

Comparable rows

50/50

Latest evidence

16 Jun 2026

Ownership snapshot CIK-linked ownership evidence from parsed SEC filings. 3 signals
Comparable ownership rows
50 of 50
Meaning: Rows with safely comparable ownership %
Latest 13D/G holder
BlackRock, Inc.
Source: Latest parsed Schedule 13D/G stake
Latest parsed ownership date
16 Jun 2026
Freshness: Most recent filing date in this holder set
Issuer Names, identifiers, and filing context for this profile. 2 identity fields
Issuer CIK
0001113232
Issuer location
Beverly, MA

Ownership snapshot

Top shareholders of AXCELIS TECHNOLOGIES INC (13F + 13D/G + 3/4/5)

Grouped by holder across the latest SEC ownership disclosures. Start with comparable ownership when available, then verify the linked 13F, 13D/G, or 3/4/5 evidence.

Comparable stake leader
BlackRock, Inc.
Disclosed value leader
BlackRock, Inc.
Comparable rows
50/50
Latest evidence
16 Jun 2026
13F 13D/G 3/4/5 Lead comparable stake: 15% 13D/G row: BlackRock, Inc. Showing 1-8 of 50 holder rows.

Quick read

BlackRock, Inc. leads the comparable SEC ownership view at 15%.

50 of 50 rows have a safely comparable ownership percentage. Use this as a filing-backed starting point, then open the detailed table for source links, reporting role, position value, share count, and filing date.

Open SEC evidence Opens BlackRock, Inc.'s linked filing trail.
Comparable ownership Top 5
BlackRock, Inc. 15%
FMR LLC 11%
VANGUARD PORTFOLIO MANAGEMENT LLC 8.1%
VANGUARD CAPITAL MANAGEMENT LLC 5.3%
REINHART PARTNERS, LLC. 5.2%

Ownership % is shown only when SEC disclosures are safely comparable across share classes.

Detailed SEC evidence table Showing 1-8 of 50 holder rows
Holder Evidence Ownership % Position 12M Net Δ As of
BlackRock, Inc.
13F 13D/G
Company
15%
from 13D/G
$459,514,886
4,936,774 shares
31 Mar 2026
FMR LLC
13D/G 13F
Company
11%
$385,292,777
3,479,256 shares
+$116,070,470 30 Apr 2026
VANGUARD PORTFOLIO MANAGEMENT LLC
13D/G 13F
Vanguard Portfolio Management · Company
8.1%
$232,826,496
2,501,359 shares
$0 31 Mar 2026
VANGUARD CAPITAL MANAGEMENT LLC
13D/G 13F
Vanguard Capital Management · Company
5.3%
$150,540,239
1,617,321 shares
$0 31 Mar 2026
REINHART PARTNERS, LLC.
13F 13D/G
Company
5.2%
from 13D/G
$154,304,296
1,657,745 shares
31 Mar 2026
AMERICAN CENTURY INVESTMENT MANAGEMENT INC
13D/G
4.3%
$131,400,104
1,345,761 shares
-$30,629,863 30 Sep 2025
Russell Low
3/4/5
PRESIDENT AND CEO, Director
0.5%
$14,418,092
154,900 shares
-$1,572,321 18 May 2026
James G. Coogan
3/4/5
EVP AND CFO
0.12%
$3,215,927
37,144 shares
02 Mar 2026
How to read this table

Rows are grouped by holder and ranked first by SEC-reported ownership % when it is safely comparable, then by disclosed holdings value. indicates unavailable or non-comparable values; "mixed-class rows" means the latest filing spans non-comparable classes.

Forms 3/4/5 flow

Insider trading overview

Net insider flow leans to selling over the last 12 months. Net value: -$6,416,037.

Buys
$0
Insiders: 0
Sells
$6,416,037
Insiders: 13
Net
-$6,416,037
Shares: -45,372
Window
Last 12 months
4 rolling buckets
Buy value Sell value
Shares: 0 Shares: 45,372
Window (months) Buy shares Sell shares Buy value Sell value Net value
0-3 0 39,338 $0 $5,892,516 -$5,892,516
3-6 0 1,000 $0 $80,000 -$80,000
6-9 0 5,034 $0 $443,522 -$443,522
9-12 0 0 $0 $0 $0

Reporting owners

Insider holders from Forms 3/4/5

Showing 1-20 of 25 reporting-owner rows connected to AXCELIS TECHNOLOGIES INC. Open a relationship link for the CIK-to-CIK filing trail.

Rows
25
Largest Forms 3/4/5 holder
Mary G. Puma
Net 12M change
-$6,416,038
Latest report
16 Jun 2026
Name Relationship Holdings Value Past Year Net Change Change % Valuation Report Date
Mary G. Puma EXECUTIVE CHAIRPERSON, Director $26,787,767 Mixed 09 May 2024
Russell Low PRESIDENT AND CEO, Director $14,418,092 -$1,572,321 -9.8% Median 18 May 2026
Arthur L. George Jr. Director $8,280,508 Mixed 17 May 2021
Eileen J. Evans EVP, General Counsel and Sec'y $4,866,538 -$143,998 -2.9% Filing P/S 22 May 2026
Richard J. Faubert Director $4,724,313 Mixed 12 Aug 2022
Kurtzweil John T. Director $4,578,738 -$485,771 -9.6% Filing P/S 19 May 2026
William J. Bintz EVP, Product Development $4,379,807 Mixed 23 Nov 2022
Christopher Tatnall EVP Global Customer Operations $4,137,143 -$174,609 -4% Filing P/S 20 May 2026
Greg Redinbo Evp Marketing And Applications $3,260,033 -$463,731 -12% Median 18 May 2026
James G. Coogan Evp And Cfo $3,215,927 Mixed 02 Mar 2026
Kevin J. Brewer EVP & Chief Financial Officer $2,753,379 Mixed 06 Dec 2023
Thomas St Dennis Director $2,749,272 -$139,833 -4.8% Filing P/S 22 May 2026
Robert John Mahoney EVP Global Operations $2,237,008 -$542,840 -20% Filing P/S 02 Jun 2026
Douglas A. Lawson Evp, Corporate Mktg & Strategy $2,150,204 Mixed 20 Jun 2024
Lynnette C. Fallon Executive Vp, Hr/Legal $1,966,163 Mixed 03 Jan 2025
Gerald M. Blumenstock EVP, Research, Dev. & Eng. $1,860,389 -$613,456 -25% Median 15 Jun 2026
Jeanne Quirk Director $1,598,508 -$250,854 -14% Filing P/S 19 May 2026
Necip Sayiner Director $1,119,728 -$249,703 -18% Filing P/S 03 Jun 2026
Tzu Yin Chiu Director $1,102,346 Median 15 May 2026
Dipti Vachani Director $1,024,482 Mixed 15 May 2024

Recent insider transactions for AXCELIS TECHNOLOGIES INC

Showing up to 300 recent insider transactions from the last 12 months.

Insider Symbol Class Transaction % SEC-reported value SEC-reported price Shares Shares owned Date Ownership
David Ryzhik ACLS Common Stock Tax liability -0.76% -76 9,955 16 Jun 2026 Direct
Gerald M. Blumenstock ACLS Common Stock Tax liability -2.47% -506 19,987 15 Jun 2026 Direct
Necip Sayiner ACLS Common Stock Sale -18.2% $249,703 $157.44 -1,586 7,112 03 Jun 2026 Direct
Robert John Mahoney ACLS Common Stock Sale -7.42% $179,302 $155.24 -1,155 14,410 02 Jun 2026 Direct
Todd Sutton ACLS Common Stock Sale -23.9% $319,980 $159.99 -2,000 6,360 27 May 2026 Direct
Thomas St Dennis ACLS Common Stock Sale -4.84% $139,833 $155.37 -900 17,695 22 May 2026 Direct
Eileen J. Evans ACLS Common Stock Sale -2.87% $143,998 $155.51 -926 31,295 22 May 2026 Direct
Gerald M. Blumenstock ACLS Common Stock Sale -5.36% $177,285 $152.70 -1,161 20,493 21 May 2026 Direct
Christopher Tatnall ACLS Common Stock Sale -4.05% $174,608 $149.75 -1,166 27,627 20 May 2026 Direct
Gregory B. Graves ACLS Common Stock Sale -37.1% $456,697 $141.61 -3,225 5,473 19 May 2026 Direct
Kurtzweil John T. ACLS Common Stock Sale -9.59% $485,771 $138.79 -3,500 32,990 19 May 2026 Direct
Jeanne Quirk ACLS Common Stock Sale -13.6% $250,854 $140.22 -1,789 11,400 19 May 2026 Direct
Todd Sutton ACLS Common Stock Tax liability -2.15% -184 8,360 18 May 2026 Direct
Robert John Mahoney ACLS Common Stock Tax liability -1.97% -312 15,565 18 May 2026 Direct
Greg Redinbo ACLS Common Stock Tax liability -0.54% -190 35,024 18 May 2026 Direct
Russell Low ACLS Common Stock Tax liability -0.46% -711 154,900 18 May 2026 Direct
Todd Sutton ACLS Common Stock Tax liability -4.91% -441 8,544 15 May 2026 Direct
Todd Sutton ACLS Common Stock Award 14.9% 1,168 8,985 15 May 2026 Direct
David Ryzhik ACLS Common Stock Tax liability -2.2% -226 10,031 15 May 2026 Direct
David Ryzhik ACLS Common Stock Award 43.6% 3,115 10,257 15 May 2026 Direct
Robert John Mahoney ACLS Common Stock Tax liability -4.66% -776 15,877 15 May 2026 Direct
Robert John Mahoney ACLS Common Stock Award 30.5% 3,894 16,653 15 May 2026 Direct
Gerald M. Blumenstock ACLS Common Stock Tax liability -4.79% -1,089 21,654 15 May 2026 Direct
Gerald M. Blumenstock ACLS Common Stock Award 31.5% 5,450 22,743 15 May 2026 Direct
Christopher Tatnall ACLS Common Stock Tax liability -4.19% -1,259 28,793 15 May 2026 Direct
Christopher Tatnall ACLS Common Stock Award 30.4% 7,008 30,052 15 May 2026 Direct
Greg Redinbo ACLS Common Stock Tax liability -2.33% -839 35,214 15 May 2026 Direct
Greg Redinbo ACLS Common Stock Award 20.9% 6,230 36,053 15 May 2026 Direct
Eileen J. Evans ACLS Common Stock Tax liability -2.62% -867 32,221 15 May 2026 Direct
Eileen J. Evans ACLS Common Stock Award 30.8% 7,786 33,088 15 May 2026 Direct
Russell Low ACLS Common Stock Tax liability -4.24% -6,891 155,611 15 May 2026 Direct
Russell Low ACLS Common Stock Award 31.5% 38,932 162,502 15 May 2026 Direct
Jorge Titinger ACLS Common Stock Award 32.2% 1,440 5,917 15 May 2026 Direct
Thomas St Dennis ACLS Common Stock Award 8.39% 1,440 18,595 15 May 2026 Direct
Necip Sayiner ACLS Common Stock Award 19.8% 1,440 8,698 15 May 2026 Direct
Jeanne Quirk ACLS Common Stock Award 12.3% 1,440 13,189 15 May 2026 Direct
Kurtzweil John T. ACLS Common Stock Award 4.11% 1,440 36,490 15 May 2026 Direct
Gregory B. Graves ACLS Common Stock Award 19.8% 1,440 8,698 15 May 2026 Direct
Tzu Yin Chiu ACLS Common Stock Award 13.8% 1,440 11,843 15 May 2026 Direct
Todd Sutton ACLS Common Stock Sale -24.8% $421,865 $163.89 -2,574 7,817 14 May 2026 Direct
Gerald M. Blumenstock ACLS Common Stock Sale -5.54% $164,750 $162.32 -1,015 17,293 14 May 2026 Direct
Jorge Titinger ACLS Common Stock Sale -30.9% $328,280 $164.14 -2,000 4,477 13 May 2026 Direct
Greg Redinbo ACLS Common Stock Sale -8.81% $463,731 $160.85 -2,883 29,823 13 May 2026 Direct
Robert John Mahoney ACLS Common Stock Sale -15% $363,538 $161.00 -2,258 12,759 12 May 2026 Direct
Russell Low ACLS Common Stock Sale -5.7% $1,170,609 $156.75 -7,468 123,570 06 May 2026 Direct
Russell Low ACLS Common Stock Sale -0.94% $172,742 $138.86 -1,244 131,038 01 May 2026 Direct
Christopher Tatnall ACLS Common Stock Tax liability -3.79% -907 23,044 20 Apr 2026 Direct
Russell Low ACLS Common Stock Sale -0.93% $117,011 $94.06 -1,244 132,282 01 Apr 2026 Direct
Russell Low ACLS Common Stock Sale -0.92% $111,960 $90.00 -1,244 133,526 24 Mar 2026 Direct
Robert John Mahoney ACLS Common Stock Tax liability -3.77% -573 14,633 02 Mar 2026 Direct
* marks a reported price that did not pass the local price check.
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