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AXCELIS TECHNOLOGIES INC SEC EDGAR Filings
SEC filings, ownership reports, and insider transactions for CIK 0001113232.
Total Filings
1,548
Latest Filing
02 Apr 2026
Industry
Special Industry Machinery, Nec
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- Symbol
- ACLS on Nasdaq
- Business address
- 108 Cherry Hill Drive, Beverly, MA, 01915
- State of incorporation
- DE
- Fiscal year end
- 31 December
Quick Takeaways
- AXCELIS TECHNOLOGIES INC is an SEC filer tracked under CIK 0001113232.
- 1,548 filings are listed on this profile.
- Common form coverage includes 4, 144, ARS and more.
What Changed
- Latest filing: 4 filed on 02 Apr 2026.
- Report period: 01 Apr 2026.
Why This Matters
- You can quote filing dates and form types directly from the SEC record on this page.
- Use this profile before deeper ownership or insider analysis to confirm filing history context.
Official SEC Source
Filer Overview
AXCELIS TECHNOLOGIES INC has filed 1,548 SEC EDGAR filings since 05 May 2000. Common forms include 4, 144, ARS, DEF 14A and more.
Latest Filings
Recent SEC filings for AXCELIS TECHNOLOGIES INC with direct links to document and filing folders.
| Form type | Document | Filing | Description | Filing date | Reporting date | File number(s) |
|---|---|---|---|---|---|---|
| 4 | Open 4 document | View SEC filing for 4 | 02 Apr 2026 | 01 Apr 2026 | ||
| 144 | Open 144 document | View SEC filing for 144 | 01 Apr 2026 | 000-30941 | ||
| ARS | Open ARS document | View SEC filing for ARS | ARS | 31 Mar 2026 | 31 Dec 2025 | 000-30941 |
| DEF 14A | Open DEF 14A document | Open XBRL data | View SEC filing for DEF 14A | FORM- DEF 14A | 31 Mar 2026 | 05 May 2026 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 26 Mar 2026 | 24 Mar 2026 | ||
| SCHEDULE 13G/A | Open SCHEDULE 13G/A document | View SEC filing for SCHEDULE 13G/A | 26 Mar 2026 | 005-60443 | ||
| 3 | Open 3 document | View SEC filing for 3 | 25 Mar 2026 | 12 Mar 2026 | ||
| 3 | Open 3 document | View SEC filing for 3 | 24 Mar 2026 | 12 Mar 2026 | ||
| 144 | Open 144 document | View SEC filing for 144 | 24 Mar 2026 | 000-30941 | ||
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 12 Mar 2026 | 10 Mar 2026 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 03 Mar 2026 | 02 Mar 2026 | ||
| 4 | Open 4 document | View SEC filing for 4 | 03 Mar 2026 | 02 Mar 2026 | ||
| 4 | Open 4 document | View SEC filing for 4 | 03 Mar 2026 | 02 Mar 2026 | ||
| 4 | Open 4 document | View SEC filing for 4 | 03 Mar 2026 | 02 Mar 2026 | ||
| 4 | Open 4 document | View SEC filing for 4 | 03 Mar 2026 | 02 Mar 2026 | ||
| 4 | Open 4 document | View SEC filing for 4 | 03 Mar 2026 | 02 Mar 2026 | ||
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 26 Feb 2026 | 31 Dec 2025 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 23 Feb 2026 | 20 Feb 2026 | ||
| 144 | Open 144 document | View SEC filing for 144 | 20 Feb 2026 | 000-30941 | ||
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 17 Feb 2026 | 17 Feb 2026 | 000-30941 |
| 425 | Open 425 document | View SEC filing for 425 | 425 | 12 Feb 2026 | ||
| SCHEDULE 13G | Open SCHEDULE 13G document | View SEC filing for SCHEDULE 13G | 12 Feb 2026 | 005-60443 | ||
| 425 | Open 425 document | View SEC filing for 425 | 425 | 06 Feb 2026 | 000-30941 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 06 Feb 2026 | 06 Feb 2026 | 000-30941 |
| 425 | Open 425 document | View SEC filing for 425 | 425 | 02 Feb 2026 | 000-30941 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 02 Feb 2026 | 22 Jan 2026 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 28 Jan 2026 | 28 Jan 2026 | 000-30941 |
| 425 | Open 425 document | View SEC filing for 425 | 425 | 28 Jan 2026 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | 16 Jan 2026 | 15 Jan 2026 | ||
| EFFECT | Open EFFECT document | View SEC filing for EFFECT | 31 Dec 2025 | 333-292008 | ||
| 424B3 | Open 424B3 document | View SEC filing for 424B3 | 424B3 | 31 Dec 2025 | 333-292008 | |
| S-4/A | Open S-4/A document | View SEC filing for S-4/A | S-4/A | 29 Dec 2025 | 333-292008 | |
| 3 | Open 3 document | View SEC filing for 3 | 22 Dec 2025 | 19 Dec 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 18 Dec 2025 | 17 Dec 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 18 Dec 2025 | 16 Dec 2025 | ||
| 144 | Open 144 document | View SEC filing for 144 | 17 Dec 2025 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | 12 Dec 2025 | 11 Dec 2025 | ||
| 144 | Open 144 document | View SEC filing for 144 | 11 Dec 2025 | 000-30941 | ||
| S-4 | Open S-4 document | Open XBRL data | View SEC filing for S-4 | S-4 | 08 Dec 2025 | 333-292008 | |
| SCHEDULE 13G/A | Open SCHEDULE 13G/A document | View SEC filing for SCHEDULE 13G/A | 14 Nov 2025 | 005-60443 | ||
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 Nov 2025 | 30 Sep 2025 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 04 Nov 2025 | 04 Nov 2025 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 17 Oct 2025 | 16 Oct 2025 | ||
| 425 | Open 425 document | View SEC filing for 425 | 425 | 01 Oct 2025 | 000-30941 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 01 Oct 2025 | 01 Oct 2025 | 000-30941 |
| 425 | Open 425 document | View SEC filing for 425 | 425 | 01 Oct 2025 | 000-30941 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 01 Oct 2025 | 01 Oct 2025 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 17 Sep 2025 | 15 Sep 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 Sep 2025 | 15 Sep 2025 | ||
| SCHEDULE 13G | Open SCHEDULE 13G document | View SEC filing for SCHEDULE 13G | 14 Aug 2025 | 005-60443 | ||
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 Aug 2025 | 30 Jun 2025 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 05 Aug 2025 | 05 Aug 2025 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 17 Jun 2025 | 16 Jun 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 Jun 2025 | 16 Jun 2025 | ||
| S-8 | Open S-8 document | Open XBRL data | View SEC filing for S-8 | FORM S-8 | 29 May 2025 | 333-287655 | |
| 4 | Open 4 document | View SEC filing for 4 | 21 May 2025 | 20 May 2025 | ||
| 144 | Open 144 document | View SEC filing for 144 | 20 May 2025 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | 20 May 2025 | 16 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 20 May 2025 | 16 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 19 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 19 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 19 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 19 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 19 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 08 May 2025 | 07 May 2025 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 May 2025 | 31 Mar 2025 | 000-30941 |
| SD | Open SD document | View SEC filing for SD | FORM SD | 06 May 2025 | 000-30941 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 06 May 2025 | 06 May 2025 | 000-30941 |
| SCHEDULE 13G/A | Open SCHEDULE 13G/A document | View SEC filing for SCHEDULE 13G/A | 29 Apr 2025 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | 22 Apr 2025 | 21 Apr 2025 | ||
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 21 Apr 2025 | 21 Apr 2025 | 000-30941 |
| ARS | Open ARS document | View SEC filing for ARS | ARS | 31 Mar 2025 | 31 Dec 2024 | 000-30941 |
| DEF 14A | Open DEF 14A document | Open XBRL data | View SEC filing for DEF 14A | DEF 14A | 31 Mar 2025 | 07 May 2025 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 12 Mar 2025 | 12 Mar 2025 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 04 Mar 2025 | 28 Feb 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 04 Mar 2025 | 28 Feb 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 04 Mar 2025 | 28 Feb 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 04 Mar 2025 | 28 Feb 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 04 Mar 2025 | 28 Feb 2025 | ||
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 28 Feb 2025 | 31 Dec 2024 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 10 Feb 2025 | 10 Feb 2025 | 000-30941 |
| SCHEDULE 13G/A | Open SCHEDULE 13G/A document | View SEC filing for SCHEDULE 13G/A | 30 Jan 2025 | 005-60443 | ||
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 10 Jan 2025 | 10 Jan 2025 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 07 Jan 2025 | 03 Jan 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 16 Dec 2024 | 16 Dec 2024 | ||
| 3 | Open 3 document | View SEC filing for 3 | 12 Dec 2024 | 12 Dec 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 19 Nov 2024 | 16 Sep 2024 | ||
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 08 Nov 2024 | 005-60443 | ||
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 07 Nov 2024 | 30 Sep 2024 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 06 Nov 2024 | 06 Nov 2024 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 18 Oct 2024 | 005-60443 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 17 Oct 2024 | 16 Oct 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 Oct 2024 | 16 Oct 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 Sep 2024 | 16 Sep 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 Sep 2024 | 16 Sep 2024 | ||
| 144 | Open 144 document | View SEC filing for 144 | 29 Aug 2024 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | 06 Aug 2024 | 06 Aug 2024 | ||
| 144 | Open 144 document | View SEC filing for 144 | 06 Aug 2024 | 000-30941 | ||
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 01 Aug 2024 | 30 Jun 2024 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8K | 31 Jul 2024 | 31 Jul 2024 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 09 Jul 2024 | 09 Jul 2024 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 24 Jun 2024 | 20 Jun 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 18 Jun 2024 | 17 Jun 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 18 Jun 2024 | 17 Jun 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 05 Jun 2024 | 05 Jun 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 05 Jun 2024 | 05 Jun 2024 | ||
| 144 | Open 144 document | View SEC filing for 144 | 30 May 2024 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | 20 May 2024 | 20 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 20 May 2024 | 17 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 20 May 2024 | 17 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 20 May 2024 | 17 May 2024 | ||
| 144 | Open 144 document | View SEC filing for 144 | 20 May 2024 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 May 2024 | 15 May 2024 | ||
| SD | Open SD document | View SEC filing for SD | FORM SD | 17 May 2024 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 13 May 2024 | 09 May 2024 | ||
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 09 May 2024 | 09 May 2024 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 02 May 2024 | 31 Mar 2024 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 01 May 2024 | 01 May 2024 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 19 Apr 2024 | 18 Apr 2024 | ||
| ARS | Open ARS document | View SEC filing for ARS | ARS | 29 Mar 2024 | 31 Dec 2023 | 000-30941 |
| DEF 14A | Open DEF 14A document | Open XBRL data | View SEC filing for DEF 14A | FORM DEF 14A | 29 Mar 2024 | 09 May 2024 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 15 Mar 2024 | 15 Mar 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 Mar 2024 | 15 Mar 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 11 Mar 2024 | 11 Mar 2024 | ||
| PRE 14A | Open PRE 14A document | Open XBRL data | View SEC filing for PRE 14A | PRE 14A | 08 Mar 2024 | 09 May 2024 | 000-30941 |
| 144 | Open 144 document | View SEC filing for 144 | 07 Mar 2024 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 01 Mar 2024 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | 01 Mar 2024 | 28 Feb 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 01 Mar 2024 | 28 Feb 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 01 Mar 2024 | 28 Feb 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 01 Mar 2024 | 28 Feb 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 01 Mar 2024 | 28 Feb 2024 | ||
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 29 Feb 2024 | 28 Feb 2024 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 29 Feb 2024 | 29 Feb 2024 | ||
| 3 | Open 3 document | View SEC filing for 3 | 28 Feb 2024 | 28 Feb 2024 | ||
| 3 | Open 3 document | View SEC filing for 3 | 28 Feb 2024 | 28 Feb 2024 | ||
| 10-K/A | Open 10-K/A document | Open XBRL data | View SEC filing for 10-K/A | 10-K/A | 28 Feb 2024 | 31 Dec 2023 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 26 Feb 2024 | 23 Feb 2024 | ||
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 23 Feb 2024 | 31 Dec 2023 | 000-30941 |
| 144 | Open 144 document | View SEC filing for 144 | 23 Feb 2024 | 000-30941 | ||
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 13 Feb 2024 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 09 Feb 2024 | 005-60443 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | 07 Feb 2024 | 07 Feb 2024 | 000-30941 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 19 Jan 2024 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Jan 2024 | 06 Dec 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Dec 2023 | 14 Dec 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Dec 2023 | 14 Dec 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Nov 2023 | 10 Nov 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 06 Nov 2023 | 000-30941 | ||
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 02 Nov 2023 | 30 Sep 2023 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 01 Nov 2023 | 01 Nov 2023 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Oct 2023 | 16 Oct 2023 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 29 Sep 2023 | 29 Sep 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 Sep 2023 | 15 Sep 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Sep 2023 | 15 Sep 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 14 Sep 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Sep 2023 | 14 Sep 2023 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 08 Sep 2023 | 12 Jun 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 07 Sep 2023 | 07 Sep 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 07 Sep 2023 | 07 Sep 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 07 Sep 2023 | 07 Sep 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 07 Sep 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 07 Sep 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 07 Sep 2023 | 000-30941 | ||
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 05 Sep 2023 | 05 Sep 2023 | 000-30941 |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 01 Sep 2023 | 01 Sep 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 07 Aug 2023 | 07 Aug 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 07 Aug 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 07 Aug 2023 | 000-30941 | ||
| S-3ASR | Open S-3ASR document | View SEC filing for S-3ASR | S-3ASR | 03 Aug 2023 | 333-273639 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 03 Aug 2023 | 30 Jun 2023 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 02 Aug 2023 | 02 Aug 2023 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jun 2023 | 15 Jun 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Jun 2023 | 15 Jun 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Jun 2023 | 12 Jun 2023 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 12 Jun 2023 | 12 Jun 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Jun 2023 | 12 Jun 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Jun 2023 | 12 Jun 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 12 Jun 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 12 Jun 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Jun 2023 | 09 Jun 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 09 Jun 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Jun 2023 | 08 Jun 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 08 Jun 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 07 Jun 2023 | 07 Jun 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 07 Jun 2023 | 07 Jun 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 07 Jun 2023 | 07 Jun 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 07 Jun 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 07 Jun 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 06 Jun 2023 | 06 Jun 2023 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 06 Jun 2023 | 25 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 30 May 2023 | 26 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 26 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 May 2023 | 25 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 25 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 25 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 25 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 25 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 May 2023 | 25 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 May 2023 | 25 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 May 2023 | 25 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 May 2023 | 25 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 22 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2023 | 19 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2023 | 17 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 19 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 18 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 18 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 18 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 18 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2023 | 16 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2023 | 16 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2023 | 16 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2023 | 16 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2023 | 18 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2023 | 16 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2023 | 16 May 2023 | |
| SD | Open SD document | View SEC filing for SD | FORM SD | 18 May 2023 | 000-30941 | |
| 144 | Open 144 document | View SEC filing for 144 | 17 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 16 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 16 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 16 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 16 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 16 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 16 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2023 | 15 May 2023 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 12 May 2023 | 11 May 2023 | 000-30941 |
| 144 | Open 144 document | View SEC filing for 144 | 11 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 11 May 2023 | 11 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 11 May 2023 | 11 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 11 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 May 2023 | 10 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 10 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 09 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 May 2023 | 09 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 09 May 2023 | 000-30941 | ||
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 May 2023 | 31 Mar 2023 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 03 May 2023 | 03 May 2023 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 18 Apr 2023 | 24 Feb 2023 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 10 Apr 2023 | 005-60443 | |
| ARS | Open ARS document | View SEC filing for ARS | ARS | 31 Mar 2023 | 31 Dec 2022 | 000-30941 |
| DEF 14A | Open DEF 14A document | Open XBRL data | View SEC filing for DEF 14A | FORM DEF 14A | 31 Mar 2023 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2023 | 28 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2023 | 28 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2023 | 28 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2023 | 28 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2023 | 28 Feb 2023 | |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 24 Feb 2023 | 31 Dec 2022 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Feb 2023 | 14 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2023 | 13 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2023 | 13 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2023 | 13 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2023 | 13 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2023 | 13 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2023 | 13 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2023 | 13 Feb 2023 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 10 Feb 2023 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 09 Feb 2023 | 005-60443 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 08 Feb 2023 | 08 Feb 2023 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 26 Jan 2023 | 005-60443 | ||
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 20 Jan 2023 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Dec 2022 | 14 Dec 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Dec 2022 | 14 Dec 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Dec 2022 | 08 Dec 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Dec 2022 | 08 Dec 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 05 Dec 2022 | 01 Dec 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 30 Nov 2022 | 30 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 28 Nov 2022 | 28 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 28 Nov 2022 | 23 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 23 Nov 2022 | 23 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 21 Nov 2022 | 18 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 Nov 2022 | 18 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Nov 2022 | 15 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Nov 2022 | 15 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Nov 2022 | 10 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Nov 2022 | 10 Nov 2022 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 03 Nov 2022 | 30 Sep 2022 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 02 Nov 2022 | 02 Nov 2022 | 000-30941 |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | AXCELIS TECHNOLOGIES, INC. | 27 Oct 2022 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | PRIMECAP MANAGEMENT CO/CA/ | 07 Oct 2022 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Sep 2022 | 15 Sep 2022 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 06 Sep 2022 | 06 Sep 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 Aug 2022 | 25 Aug 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Aug 2022 | 15 Aug 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Aug 2022 | 12 Aug 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Aug 2022 | 12 Aug 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Aug 2022 | 12 Aug 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Aug 2022 | 11 Aug 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Aug 2022 | 08 Aug 2022 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 04 Aug 2022 | 30 Jun 2022 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 03 Aug 2022 | 03 Aug 2022 | 000-30941 |
| SD | Open SD document | View SEC filing for SD | SD | 20 May 2022 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2022 | 15 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2022 | 15 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2022 | 15 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2022 | 15 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2022 | 15 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2022 | 15 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 11 May 2022 | 10 May 2022 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 May 2022 | 31 Mar 2022 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 04 May 2022 | 04 May 2022 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 30 Mar 2022 | 10 May 2022 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Mar 2022 | 17 Mar 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Mar 2022 | 16 Mar 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Mar 2022 | 15 Mar 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Mar 2022 | 15 Mar 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 03 Mar 2022 | 02 Mar 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2022 | 28 Feb 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2022 | 28 Feb 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2022 | 28 Feb 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2022 | 28 Feb 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2022 | 28 Feb 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2022 | 28 Feb 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 28 Feb 2022 | 25 Feb 2022 | |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 25 Feb 2022 | 31 Dec 2021 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 24 Feb 2022 | 23 Feb 2022 | 000-30941 |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 23 Feb 2022 | 23 Feb 2022 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 23 Feb 2022 | 23 Feb 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Feb 2022 | 10 Feb 2022 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | PRIMECAP MANAGEMENT CO/CA/ | 10 Feb 2022 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 09 Feb 2022 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 09 Feb 2022 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SEC SCHEDULE 13G | 08 Feb 2022 | 005-60443 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 07 Feb 2022 | 07 Feb 2022 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 28 Jan 2022 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Dec 2021 | 08 Dec 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 22 Nov 2021 | 22 Nov 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Nov 2021 | 11 Nov 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Nov 2021 | 08 Nov 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Nov 2021 | 08 Nov 2021 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 Nov 2021 | 30 Sep 2021 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 03 Nov 2021 | 03 Nov 2021 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Sep 2021 | 15 Sep 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 31 Aug 2021 | 31 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 30 Aug 2021 | 30 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 30 Aug 2021 | 30 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 27 Aug 2021 | 27 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 27 Aug 2021 | 26 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 27 Aug 2021 | 26 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 Aug 2021 | 25 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Aug 2021 | 13 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Aug 2021 | 09 Aug 2021 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 Aug 2021 | 30 Jun 2021 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 04 Aug 2021 | 04 Aug 2021 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 24 May 2021 | 24 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 21 May 2021 | 21 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2021 | 15 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2021 | 15 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2021 | 15 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2021 | 15 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2021 | 15 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2021 | 15 May 2021 | |
| SD | Open SD document | View SEC filing for SD | SD | 18 May 2021 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2021 | 17 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2021 | 17 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2021 | 17 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2021 | 17 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2021 | 17 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2021 | 17 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2021 | 17 May 2021 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 13 May 2021 | 12 May 2021 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 May 2021 | 31 Mar 2021 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 04 May 2021 | 04 May 2021 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 25 Mar 2021 | 12 May 2021 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Mar 2021 | 11 Mar 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Mar 2021 | 11 Mar 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 03 Mar 2021 | 28 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2021 | 28 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2021 | 28 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2021 | 28 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2021 | 28 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2021 | 28 Feb 2021 | |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 26 Feb 2021 | 31 Dec 2020 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 Feb 2021 | 25 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 Feb 2021 | 19 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 Feb 2021 | 17 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Feb 2021 | 17 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Feb 2021 | 16 Feb 2021 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 12 Feb 2021 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SEC SCHEDULE 13G | 12 Feb 2021 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 12 Feb 2021 | 005-60443 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 10 Feb 2021 | 10 Feb 2021 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 10 Feb 2021 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SEC SCHEDULE 13G | 04 Feb 2021 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 26 Jan 2021 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Dec 2020 | 01 Dec 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 24 Nov 2020 | 24 Nov 2020 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 18 Nov 2020 | 17 Nov 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Nov 2020 | 17 Nov 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Nov 2020 | 16 Nov 2020 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 Nov 2020 | 30 Sep 2020 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 05 Nov 2020 | 05 Nov 2020 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 Aug 2020 | 30 Jun 2020 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | FORM 8-K | 04 Aug 2020 | 31 Jul 2020 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 29 May 2020 | 28 May 2020 | |
| S-3ASR | Open S-3ASR document | View SEC filing for S-3ASR | S-3ASR | 29 May 2020 | 333-238772 | |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 29 May 2020 | 333-238770 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 28 May 2020 | 27 May 2020 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 28 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 26 May 2020 | 26 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 26 May 2020 | 26 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 22 May 2020 | 22 May 2020 | |
| SD | Open SD document | View SEC filing for SD | SD | 22 May 2020 | 000-30941 | |
| 8-K/A | Open 8-K/A document | View SEC filing for 8-K/A | 8-K/A | 21 May 2020 | 19 May 2020 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | FORM 8-K | 21 May 2020 | 19 May 2020 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 11 May 2020 | 11 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 May 2020 | 08 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 May 2020 | 08 May 2020 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 May 2020 | 31 Mar 2020 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | FROM 8-K | 05 May 2020 | 05 May 2020 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 30 Mar 2020 | 19 May 2020 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 04 Mar 2020 | 04 Mar 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 03 Mar 2020 | 28 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2020 | 28 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2020 | 28 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2020 | 28 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2020 | 28 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2020 | 28 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2020 | 28 Feb 2020 | |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 02 Mar 2020 | 31 Dec 2019 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 20 Feb 2020 | 19 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2020 | 12 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2020 | 13 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Feb 2020 | 11 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Feb 2020 | 11 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Feb 2020 | 11 Feb 2020 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 12 Feb 2020 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 12 Feb 2020 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 12 Feb 2020 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Feb 2020 | 10 Feb 2020 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 07 Feb 2020 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | FORM 8-K | 05 Feb 2020 | 05 Feb 2020 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 04 Feb 2020 | 005-60443 | ||
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SEC SCHEDULE 13G | 27 Jan 2020 | 005-60443 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 13 Dec 2019 | 10 Dec 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Dec 2019 | 13 Dec 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Dec 2019 | 12 Dec 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 11 Dec 2019 | 11 Dec 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Dec 2019 | 10 Dec 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Dec 2019 | 09 Dec 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 05 Dec 2019 | 05 Dec 2019 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | FORM 8-K | 03 Dec 2019 | 03 Dec 2019 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 22 Nov 2019 | 19 Nov 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 20 Nov 2019 | 18 Nov 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 20 Nov 2019 | 20 Nov 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 Nov 2019 | 19 Nov 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 Nov 2019 | 15 Nov 2019 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 07 Nov 2019 | 30 Sep 2019 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 31 Oct 2019 | 31 Oct 2019 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 24 Sep 2019 | 24 Sep 2019 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 21 Aug 2019 | 21 Aug 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Aug 2019 | 15 Aug 2019 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 15 Aug 2019 | 14 Aug 2019 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 15 Aug 2019 | 14 Aug 2019 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 07 Aug 2019 | 30 Jun 2019 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 Aug 2019 | 06 Aug 2019 | 000-30941 |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 23 May 2019 | 15 May 2019 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 23 May 2019 | 15 May 2019 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 23 May 2019 | 15 May 2019 | |
| SD | Open SD document | View SEC filing for SD | SD | 22 May 2019 | 000-30941 | |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 21 May 2019 | 333-231634 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 17 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2019 | 15 May 2019 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 15 May 2019 | 14 May 2019 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 08 May 2019 | 31 Mar 2019 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 07 May 2019 | 07 May 2019 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 27 Mar 2019 | 14 May 2019 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Mar 2019 | 13 Mar 2019 | |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 11 Mar 2019 | 31 Dec 2018 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2019 | 28 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2019 | 28 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2019 | 28 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2019 | 28 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2019 | 28 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2019 | 28 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2019 | 28 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 20 Feb 2019 | 20 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Feb 2019 | 15 Feb 2019 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 12 Feb 2019 | 01 Jun 2018 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SEC SCHEDULE 13G | 12 Feb 2019 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 11 Feb 2019 | 005-60443 | ||
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 08 Feb 2019 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 08 Feb 2019 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 08 Feb 2019 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 Feb 2019 | 06 Feb 2019 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 24 Jan 2019 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 21 Nov 2018 | 21 Nov 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Nov 2018 | 15 Nov 2018 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 02 Nov 2018 | 30 Sep 2018 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 01 Nov 2018 | 01 Nov 2018 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 03 Aug 2018 | 30 Jun 2018 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Aug 2018 | 02 Aug 2018 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SEC SCHEDULE 13G | 10 Jul 2018 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Jun 2018 | 01 Jun 2018 | |
| SD | Open SD document | View SEC filing for SD | SD | 24 May 2018 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 18 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 16 May 2018 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 18 May 2018 | 16 May 2018 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2018 | 16 May 2018 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 16 May 2018 | 16 May 2018 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 04 May 2018 | 31 Mar 2018 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 May 2018 | 02 May 2018 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 27 Mar 2018 | 16 May 2018 | 000-30941 |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 14 Mar 2018 | 31 Dec 2017 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Mar 2018 | 14 Mar 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Mar 2018 | 14 Mar 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2018 | 28 Feb 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2018 | 28 Feb 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2018 | 28 Feb 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2018 | 28 Feb 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2018 | 28 Feb 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2018 | 28 Feb 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2018 | 28 Feb 2018 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 2017 13-G FILING | 13 Feb 2018 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 12 Feb 2018 | 005-60443 | ||
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 09 Feb 2018 | 005-60443 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 08 Feb 2018 | 005-60443 | ||
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 Feb 2018 | 06 Feb 2018 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 23 Jan 2018 | 005-60443 | ||
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | SEC SCHEDULE 13G | 10 Jan 2018 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 04 Jan 2018 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Nov 2017 | 15 Nov 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Nov 2017 | 15 Nov 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Nov 2017 | 14 Nov 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Nov 2017 | 13 Nov 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Nov 2017 | 08 Nov 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Nov 2017 | 07 Nov 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Nov 2017 | 07 Nov 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Nov 2017 | 07 Nov 2017 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 09 Nov 2017 | 005-60443 | ||
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 03 Nov 2017 | 30 Sep 2017 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Nov 2017 | 02 Nov 2017 | 000-30941 |
| UPLOAD | Open UPLOAD document | View SEC filing for UPLOAD | 19 Sep 2017 | |||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Sep 2017 | 12 Sep 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Sep 2017 | 12 Sep 2017 | |
| CORRESP | Open CORRESP document | View SEC filing for CORRESP | 08 Sep 2017 | |||
| UPLOAD | Open UPLOAD document | View SEC filing for UPLOAD | 06 Sep 2017 | |||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 24 Aug 2017 | 22 Aug 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Aug 2017 | 15 Aug 2017 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 04 Aug 2017 | 30 Jun 2017 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | 8-K | 03 Aug 2017 | 03 Aug 2017 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Jun 2017 | 07 Jun 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Jun 2017 | 06 Jun 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Jun 2017 | 06 Jun 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 31 May 2017 | 31 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 26 May 2017 | 25 May 2017 | |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 25 May 2017 | 333-218225 | |
| SD | Open SD document | View SEC filing for SD | SD | 24 May 2017 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2017 | 18 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 16 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 17 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 16 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 16 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 16 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 16 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 16 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 17 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 17 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 16 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 17 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 17 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 17 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 17 May 2017 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 17 May 2017 | 16 May 2017 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2017 | 12 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 11 May 2017 | 09 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 11 May 2017 | 09 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 11 May 2017 | 10 May 2017 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 May 2017 | 31 Mar 2017 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 May 2017 | 04 May 2017 | 000-30941 |
| EFFECT | Open EFFECT document | View SEC filing for EFFECT | 14 Apr 2017 | 333-217192 | ||
| CORRESP | Open CORRESP document | View SEC filing for CORRESP | 12 Apr 2017 | |||
| UPLOAD | Open UPLOAD document | View SEC filing for UPLOAD | 12 Apr 2017 | |||
| S-3 | Open S-3 document | View SEC filing for S-3 | S-3 | 07 Apr 2017 | 333-217192 | |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 29 Mar 2017 | 16 May 2017 | 000-30941 |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 14 Mar 2017 | 31 Dec 2016 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 21 Feb 2017 | 15 Feb 2017 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Feb 2017 | 15 Feb 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Feb 2017 | 15 Feb 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Feb 2017 | 15 Feb 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Feb 2017 | 15 Feb 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Feb 2017 | 15 Feb 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Feb 2017 | 13 Feb 2017 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 13 Feb 2017 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Feb 2017 | 07 Feb 2017 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 13-G FILING | 09 Feb 2017 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 09 Feb 2017 | 005-60443 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | SCHEDULE 13G | 09 Feb 2017 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Feb 2017 | 06 Feb 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Feb 2017 | 06 Feb 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Feb 2017 | 06 Feb 2017 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 01 Feb 2017 | 01 Feb 2017 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 25 Jan 2017 | 21 Jan 2017 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 19 Jan 2017 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Dec 2016 | 12 Dec 2016 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 13G / A FILING | 23 Nov 2016 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Nov 2016 | 15 Nov 2016 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 15 Nov 2016 | 10 Nov 2016 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 03 Nov 2016 | 30 Sep 2016 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Nov 2016 | 02 Nov 2016 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 13-G/A FILING | 30 Sep 2016 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Aug 2016 | 08 Aug 2016 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 08 Aug 2016 | 30 Jun 2016 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Aug 2016 | 05 Aug 2016 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Aug 2016 | 02 Aug 2016 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 05 Jul 2016 | 30 Jun 2016 | 000-30941 |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 27 May 2016 | 333-211673 | |
| SD | Open SD document | View SEC filing for SD | SD | 27 May 2016 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 May 2016 | 09 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 06 May 2016 | 06 May 2016 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 05 May 2016 | 04 May 2016 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 May 2016 | 31 Mar 2016 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | 8-K | 02 May 2016 | 02 May 2016 | 000-30941 |
| DEFA14A | Open DEFA14A document | View SEC filing for DEFA14A | DEFA14A | 12 Apr 2016 | 000-30941 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 11 Apr 2016 | 11 Apr 2016 | 000-30941 |
| DEFA14A | Open DEFA14A document | View SEC filing for DEFA14A | DEFA14A | 11 Apr 2016 | 000-30941 | |
| DEFA14A | Open DEFA14A document | View SEC filing for DEFA14A | DEFA14A | 04 Apr 2016 | 000-30941 | |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 14 Mar 2016 | 04 Apr 2016 | 000-30941 |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 04 Mar 2016 | 31 Dec 2015 | 000-30941 |
| PRE 14A | Open PRE 14A document | View SEC filing for PRE 14A | PRE 14A | 29 Feb 2016 | 04 Apr 2016 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SENVEST MANAGEMENT, LLC | 12 Feb 2016 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 12 Feb 2016 | 005-60443 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 2015 13-G FILING | 10 Feb 2016 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Feb 2016 | 02 Feb 2016 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 25 Jan 2016 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Nov 2015 | 16 Nov 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Nov 2015 | 10 Nov 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Nov 2015 | 09 Nov 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Nov 2015 | 09 Nov 2015 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 Nov 2015 | 30 Sep 2015 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 Nov 2015 | 04 Nov 2015 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Aug 2015 | 17 Aug 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Aug 2015 | 10 Aug 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Aug 2015 | 10 Aug 2015 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 Aug 2015 | 30 Jun 2015 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 Aug 2015 | 04 Aug 2015 | 000-30941 |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | AXCELIS TECHNOLOGIES, INC. | 30 Jun 2015 | 005-60443 | |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 29 May 2015 | 333-204544 | |
| SD | Open SD document | View SEC filing for SD | SD | 22 May 2015 | 000-30941 | |
| SC 13D/A | Open SC 13D/A document | View SEC filing for SC 13D/A | AMENDMENT NO. 4 TO THE SCHEDULE 13D | 20 May 2015 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2015 | 15 May 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2015 | 15 May 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2015 | 15 May 2015 | |
| SC 13D/A | Open SC 13D/A document | View SEC filing for SC 13D/A | AMENDMENT NO. 3 TO THE SCHEDULE 13D | 15 May 2015 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2015 | 14 May 2015 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 14 May 2015 | 13 May 2015 | 000-30941 |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 13 May 2015 | 13 May 2015 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 13 May 2015 | 13 May 2015 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 13 May 2015 | 13 May 2015 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 May 2015 | 31 Mar 2015 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 05 May 2015 | 05 May 2015 | 000-30941 |
| ARS | Open ARS document | View SEC filing for ARS | AUTO-GENERATED PAPER DOCUMENT | 25 Mar 2015 | 31 Dec 2014 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 25 Mar 2015 | 13 May 2015 | 000-30941 |
| 10-K/A | Open 10-K/A document | Open XBRL data | View SEC filing for 10-K/A | 10-K/A | 12 Mar 2015 | 31 Dec 2014 | 000-30941 |
| 10-K | Open 10-K document | View SEC filing for 10-K | 10-K | 11 Mar 2015 | 31 Dec 2014 | 000-30941 |
| SC 13D/A | Open SC 13D/A document | View SEC filing for SC 13D/A | AMENDMENT NO. 2 TO THE SCHEDULE 13D | 06 Mar 2015 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 Mar 2015 | 05 Mar 2015 | 000-30941 |
| DEFA14A | Open DEFA14A document | View SEC filing for DEFA14A | 8-K | 06 Mar 2015 | 000-30941 | |
| DFAN14A | Open DFAN14A document | View SEC filing for DFAN14A | 03 Mar 2015 | 000-30941 | ||
| PRE 14A | Open PRE 14A document | View SEC filing for PRE 14A | PRE 14A | 03 Mar 2015 | 13 May 2015 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 20 Feb 2015 | 19 Feb 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ OPTION EXERCISE FEB 2015 | 19 Feb 2015 | 17 Feb 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | LAWSON FEB 2015 OPTION EXERCISE | 19 Feb 2015 | 17 Feb 2015 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 13 Feb 2015 | 005-60443 | |
| DEFA14A | Open DEFA14A document | View SEC filing for DEFA14A | DEFA14A | 13 Feb 2015 | 000-30941 | |
| SC 13D/A | Open SC 13D/A document | View SEC filing for SC 13D/A | AMENDMENT NO. 1 TO THE SCHEDULE 13D | 09 Feb 2015 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 05 Feb 2015 | 30 Jan 2015 | 000-30941 |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | DECEMBER 31, 2014 13-G FILING | 03 Feb 2015 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 30 Jan 2015 | 005-60443 | ||
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 12 Jan 2015 | 07 Jan 2015 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | LAWSON NOVEMBER 2014 SALE | 19 Nov 2014 | 18 Nov 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | LUNDBERG RSU GRANT NOV 2014 | 17 Nov 2014 | 17 Nov 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | GEORGE RSU GRANT NOV 2014 | 17 Nov 2014 | 17 Nov 2014 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 14 Nov 2014 | 13 Nov 2014 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FALLON NOV 2014 SALE | 12 Nov 2014 | 10 Nov 2014 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 Nov 2014 | 30 Sep 2014 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 05 Nov 2014 | 05 Nov 2014 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 07 Oct 2014 | 03 Oct 2014 | 000-30941 |
| SC 13D | Open SC 13D document | View SEC filing for SC 13D | 16 Sep 2014 | 005-60443 | ||
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 04 Sep 2014 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 26 Aug 2014 | 22 Aug 2014 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 21 Aug 2014 | 20 Aug 2014 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 08 Aug 2014 | 30 Jun 2014 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 Aug 2014 | 01 Aug 2014 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | ALDEBORGH 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | LAWSON 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | THOMPSON 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | NETTLES 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | KEITHLEY 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | JENNINGS 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | HARDIS 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER 2014OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | GEORGE 2014 STOCK OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | LUNDBERG 2014 STOCK OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | GEORGE MKT PURCHASE (2) MAY 2014 | 02 Jun 2014 | 29 May 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | A GEORGE MARKET PURCHASE MAY 2014 | 29 May 2014 | 28 May 2014 | |
| SD | Open SD document | View SEC filing for SD | SD | 28 May 2014 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER MARKET PURCHASE MAY 2014 | 27 May 2014 | 22 May 2014 | |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 22 May 2014 | 333-196157 | |
| 4 | Open 4 document | View SEC filing for 4 | 20 May 2014 | 19 May 2014 | ||
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 19 May 2014 | 13 May 2014 | 000-30941 |
| 3 | Open 3 document | View SEC filing for 3 | 14 May 2014 | 13 May 2014 | ||
| 3 | Open 3 document | View SEC filing for 3 | 14 May 2014 | 13 May 2014 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | LAWSON STOCK PURCHASE MAY 2014 AMEND | 12 May 2014 | 09 May 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | LAWSON STOCK PURCHASE MAY 2014 | 12 May 2014 | 09 May 2014 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 08 May 2014 | 31 Mar 2014 | 000-30941 |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | SC 13G | 07 May 2014 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 May 2014 | 06 May 2014 | 000-30941 |
| ARS | Open ARS document | View SEC filing for ARS | AUTO-GENERATED PAPER DOCUMENT | 09 Apr 2014 | 31 Dec 2013 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 25 Mar 2014 | 13 May 2014 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | KEITHLEY 2013 MARKET PURCHASE | 03 Mar 2014 | 15 Aug 2013 | |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 03 Mar 2014 | 31 Dec 2013 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ SALE FEB 2014 | 18 Feb 2014 | 14 Feb 2014 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 13-G FILING | 07 Feb 2014 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 Feb 2014 | 04 Feb 2014 | 000-30941 |
| 4/A | Open 4/A document | View SEC filing for 4/A | PUMA RECORD ADJUSTMENT | 29 Jan 2014 | 17 Dec 2013 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | BREWER RECORD ADJUSTMENT | 29 Jan 2014 | 12 Feb 2013 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | BINTZ RECORD ADJUSTMENT | 29 Jan 2014 | 17 Dec 2013 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 28 Jan 2014 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | PUMA SALE TO COVER RSU VEST DEC 2013 | 17 Dec 2013 | 17 Dec 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ RSU SALE TO COVER DEC 2013 | 17 Dec 2013 | 17 Dec 2013 | |
| EFFECT | Open EFFECT document | View SEC filing for EFFECT | 04 Dec 2013 | 333-192533 | ||
| S-3 | Open S-3 document | View SEC filing for S-3 | S-3 | 25 Nov 2013 | 333-192533 | |
| UPLOAD | Open UPLOAD document | View SEC filing for UPLOAD | 25 Nov 2013 | |||
| CORRESP | Open CORRESP document | View SEC filing for CORRESP | 15 Nov 2013 | |||
| 3 | Open 3 document | View SEC filing for 3 | LAWSON FORM 3 | 14 Nov 2013 | 13 Nov 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON NOV 2013 SALE | 12 Nov 2013 | 11 Nov 2013 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 08 Nov 2013 | 30 Sep 2013 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 Nov 2013 | 31 Oct 2013 | 000-30941 |
| UPLOAD | Open UPLOAD document | View SEC filing for UPLOAD | 01 Nov 2013 | |||
| 4 | Open 4 document | View SEC filing for 4 | PUMA SALE TO COVER RSU VEST SEPT 2013 | 17 Sep 2013 | 17 Sep 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ RSU SALE TO COVER SEPT 2013 | 17 Sep 2013 | 17 Sep 2013 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 17 Sep 2013 | 16 Sep 2013 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | THOMPSON AUGUST 2013 MARKET PURCHASE | 13 Aug 2013 | 09 Aug 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | HARDIS 2013 MARKET PURCHASE | 13 Aug 2013 | 09 Aug 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER AUG 2013 MARKET PURCHASE | 12 Aug 2013 | 08 Aug 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | JENNINGS AUG 2013 MARKET PURCHASE | 08 Aug 2013 | 08 Aug 2013 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Aug 2013 | 30 Jul 2013 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 02 Aug 2013 | 30 Jun 2013 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 01 Aug 2013 | 01 Aug 2013 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | HARDIS 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | JENNINGS 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | KEITHLEY 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | NETTLES 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | THOMPSON 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | ALDEBORGH 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 09 Jul 2013 | 05 Jul 2013 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 20 Jun 2013 | 20 Jun 2013 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | PUMA SALE TO COVER RSU VEST JUNE 2013 | 19 Jun 2013 | 18 Jun 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | RSU SALE TO COVER JUNE 2013 | 19 Jun 2013 | 18 Jun 2013 | |
| S-8 POS | Open S-8 POS document | View SEC filing for S-8 POS | S-8 POS | 31 May 2013 | 333-120356 | |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 31 May 2013 | 333-188967 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 16 May 2013 | 14 May 2013 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 May 2013 | 31 Mar 2013 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 May 2013 | 06 May 2013 | 000-30941 |
| DEFA14A | Open DEFA14A document | View SEC filing for DEFA14A | DEFA14A | 06 May 2013 | 000-30941 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 May 2013 | 02 May 2013 | 000-30941 |
| ARS | Open ARS document | View SEC filing for ARS | AUTO-GENERATED PAPER DOCUMENT | 04 Apr 2013 | 31 Dec 2012 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 26 Mar 2013 | 14 May 2013 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | RSU SALE TO COVER MARCH 2013 | 19 Mar 2013 | 18 Mar 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA SALE TO COVER RSU VEST MARCH 2013 | 19 Mar 2013 | 18 Mar 2013 | |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 01 Mar 2013 | 31 Dec 2012 | 000-30941 |
| 3 | Open 3 document | View SEC filing for 3 | ALDEBORGH FORM 3 | 13 Feb 2013 | 13 Feb 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER SALE FEB 2013 | 13 Feb 2013 | 12 Feb 2013 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 13-G FILING AS OF DECEMBER 31, 2012 | 13 Feb 2013 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 08 Feb 2013 | 005-60443 | ||
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 Feb 2013 | 04 Feb 2013 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | ZAGER RSU VEST JAN 2013 | 22 Jan 2013 | 18 Jan 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA BASE PAY RSU GRANT 2013 | 16 Jan 2013 | 15 Jan 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ BASE PAY RSU 2013 | 16 Jan 2013 | 15 Jan 2013 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 18 Dec 2012 | 18 Dec 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 Dec 2012 | 03 Dec 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 30 Nov 2012 | 26 Nov 2012 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 Nov 2012 | 30 Sep 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 01 Nov 2012 | 01 Nov 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 13 Sep 2012 | 10 Sep 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 07 Sep 2012 | 04 Sep 2012 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 07 Aug 2012 | 30 Jun 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Aug 2012 | 02 Aug 2012 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | HARDIS 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | JENNINGS 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | KEITHLEY 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | NETTLES 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | THOMPSON 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | BRAUN 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | ZAGER 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 30 May 2012 | 333-181750 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | THOMPSON PURCHASE AMEND MAY 2012 | 29 May 2012 | 24 May 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER PURCHASE MAY 2012 | 29 May 2012 | 25 May 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | JENNINGS PURCHASE MAY 2012 | 29 May 2012 | 25 May 2012 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 29 May 2012 | 29 May 2012 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | THOMPSON PURCHASE MAY 2012 | 25 May 2012 | 24 May 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON PURCHASE MAY 24 2012 | 25 May 2012 | 24 May 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ PURCHASE MAY 2012 | 24 May 2012 | 24 May 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | PURCHASE MAY 2012 | 24 May 2012 | 24 May 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | 23 May 2012 | 23 May 2012 | ||
| 4 | Open 4 document | View SEC filing for 4 | PUMA MAY 23 2012 PURCHASE | 23 May 2012 | 23 May 2012 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 04 May 2012 | 31 Mar 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 03 May 2012 | 27 Apr 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 17 Apr 2012 | 17 Apr 2012 | 000-30941 |
| DEFA14A | Open DEFA14A document | View SEC filing for DEFA14A | DEFA14A | 17 Apr 2012 | 000-30941 | |
| ARS | Open ARS document | View SEC filing for ARS | AUTO-GENERATED PAPER DOCUMENT | 26 Mar 2012 | 31 Dec 2011 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 23 Mar 2012 | 02 May 2012 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FALLON 2012 RSU GRANT | 16 Mar 2012 | 15 Mar 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER 2012 RSU GRANT | 16 Mar 2012 | 15 Mar 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ 2012 RSU GRANT | 16 Mar 2012 | 15 Mar 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | ZAGER 2012 RSU GRANT | 16 Mar 2012 | 15 Mar 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | MARCH 8 2012 PURCHASE | 08 Mar 2012 | 08 Mar 2012 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 Mar 2012 | 05 Mar 2012 | 000-30941 |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 29 Feb 2012 | 31 Dec 2011 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 24 Feb 2012 | 24 Feb 2012 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FLYNN FEB 2011 SALE | 14 Feb 2012 | 10 Feb 2012 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 14 Feb 2012 | 005-60443 | ||
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 13-G FILING AS OF DECEMBER 31, 2011 | 13 Feb 2012 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 13 Feb 2012 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | PURCHASE FEB 2012 | 13 Feb 2012 | 10 Feb 2012 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 08 Feb 2012 | 02 Feb 2012 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES INC 13G-A 3 | 08 Feb 2012 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES INC 13G-A 3 | 08 Feb 2012 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON FEB 7 2012 SALE | 07 Feb 2012 | 07 Feb 2012 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Feb 2012 | 02 Feb 2012 | 000-30941 |
| 4/A | Open 4/A document | View SEC filing for 4/A | AMDMT ZAGER RSU VEST JAN 2012 | 19 Jan 2012 | 18 Jan 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | ZAGER RSU VEST JAN 2012 | 18 Jan 2012 | 17 Jan 2012 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 03 Jan 2012 | 27 Dec 2011 | 000-30941 |
| 15-12G | Open 15-12G document | View SEC filing for 15-12G | 15-12G | 08 Nov 2011 | 000-30941 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 04 Nov 2011 | 30 Sep 2011 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 25 Oct 2011 | 25 Oct 2011 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ FORM 4 RSU VEST SEPT 2011 | 20 Sep 2011 | 17 Sep 2011 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 Aug 2011 | 30 Jun 2011 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 Aug 2011 | 03 Aug 2011 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | KEITHLEY INITIAL OPTION GRANT | 04 Aug 2011 | 03 Aug 2011 | |
| 3 | Open 3 document | View SEC filing for 3 | KEITHLEY FORM 3 | 04 Aug 2011 | 03 Aug 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ FORM 4 RSU VEST AND STOCK OPTION GRANT JULY 15 2011 | 19 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | FLYNN FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | ZAGER FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | HARDIS FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | JENNINGS FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | NETTLES FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | THOMPSON FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | BRAUN FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER FORM 4 RSU VEST JULY 2011 | 05 Jul 2011 | 01 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | FLYNN FORM 4 RSU VEST JULY 2011 | 05 Jul 2011 | 01 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON FORM 4 RSU VEST JULY 2011 | 05 Jul 2011 | 01 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA RSU VEST FORM 4 JULY 2011 | 05 Jul 2011 | 01 Jul 2011 | |
| 10-Q | Open 10-Q document | View SEC filing for 10-Q | 10-Q | 06 May 2011 | 31 Mar 2011 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 27 Apr 2011 | 25 Apr 2011 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 07 Apr 2011 | 03 Apr 2011 | 000-30941 |
| ARS | Open ARS document | View SEC filing for ARS | AUTO-GENERATED PAPER DOCUMENT | 30 Mar 2011 | 31 Dec 2010 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 24 Mar 2011 | 26 Apr 2011 | 000-30941 |
| 10-K | Open 10-K document | View SEC filing for 10-K | 10-K | 14 Mar 2011 | 31 Dec 2010 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER FEB 2011 PURCHASE | 18 Feb 2011 | 17 Feb 2011 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | DOC ONE | 14 Feb 2011 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHNEIDER CAPITAL MANAGEMENT CORPORATION FORM 13G/A | 14 Feb 2011 | 005-60443 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 13G FILING DECEMBER 31, 2010 | 11 Feb 2011 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FLYNN FEB 2011 FORM 4 | 09 Feb 2011 | 08 Feb 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | WILD PURCHASE FEB 2011 | 09 Feb 2011 | 08 Feb 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | JENNINGS PURCHASE FEB 4 2011 | 07 Feb 2011 | 04 Feb 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | HARDIS PURCHASE FEB 4 2011 | 04 Feb 2011 | 04 Feb 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | ZAGER PURCHASE FEB 4 2011 | 04 Feb 2011 | 04 Feb 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA FEB 4 PURCHASE | 04 Feb 2011 | 04 Feb 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | BRAUN INITIAL OPTION GRANT | 03 Feb 2011 | 02 Feb 2011 | |
| 3 | Open 3 document | View SEC filing for 3 | BRAUN FORM 3 | 03 Feb 2011 | 02 Feb 2011 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 02 Feb 2011 | 005-60443 |
About this filer
AXCELIS TECHNOLOGIES INC files with the SEC under CIK 0001113232. This page aggregates EDGAR filings and related ownership activity.
Industry: Special Industry Machinery, Nec.
FAQ
- What is a CIK?
- A Central Index Key (CIK) is a unique identifier assigned by the SEC to each filer.
- Why are some filings missing?
- New filings appear as the SEC updates EDGAR, and older records can vary by availability.
- How often is this page updated?
- Updates follow new EDGAR submissions and periodic data refreshes.