| 3 |
Open Document
|
Open Filing |
|
22 Dec 2025 |
19 Dec 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
18 Dec 2025 |
17 Dec 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
18 Dec 2025 |
16 Dec 2025 |
|
| 144 |
Open Document
|
Open Filing |
|
17 Dec 2025 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
12 Dec 2025 |
11 Dec 2025 |
|
| 144 |
Open Document
|
Open Filing |
|
11 Dec 2025 |
|
000-30941 |
| S-4 |
Open Document
| Data
|
Open Filing |
S-4 |
08 Dec 2025 |
|
333-292008 |
| SCHEDULE 13G/A |
Open Document
|
Open Filing |
|
14 Nov 2025 |
|
005-60443 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
06 Nov 2025 |
30 Sep 2025 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
04 Nov 2025 |
04 Nov 2025 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
17 Oct 2025 |
16 Oct 2025 |
|
| 425 |
Open Document
|
Open Filing |
425 |
01 Oct 2025 |
|
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
01 Oct 2025 |
01 Oct 2025 |
000-30941 |
| 425 |
Open Document
|
Open Filing |
425 |
01 Oct 2025 |
|
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
01 Oct 2025 |
01 Oct 2025 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
17 Sep 2025 |
15 Sep 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
17 Sep 2025 |
15 Sep 2025 |
|
| SCHEDULE 13G |
Open Document
|
Open Filing |
|
14 Aug 2025 |
|
005-60443 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
05 Aug 2025 |
30 Jun 2025 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
05 Aug 2025 |
05 Aug 2025 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
17 Jun 2025 |
16 Jun 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
17 Jun 2025 |
16 Jun 2025 |
|
| S-8 |
Open Document
| Data
|
Open Filing |
FORM S-8 |
29 May 2025 |
|
333-287655 |
| 4 |
Open Document
|
Open Filing |
|
21 May 2025 |
20 May 2025 |
|
| 144 |
Open Document
|
Open Filing |
|
20 May 2025 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
20 May 2025 |
16 May 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
20 May 2025 |
16 May 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
19 May 2025 |
15 May 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
19 May 2025 |
15 May 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
19 May 2025 |
15 May 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
19 May 2025 |
15 May 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
19 May 2025 |
15 May 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2025 |
15 May 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2025 |
15 May 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2025 |
15 May 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2025 |
15 May 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2025 |
15 May 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2025 |
15 May 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2025 |
15 May 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2025 |
15 May 2025 |
|
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
08 May 2025 |
07 May 2025 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
06 May 2025 |
31 Mar 2025 |
000-30941 |
| SD |
Open Document
|
Open Filing |
FORM SD |
06 May 2025 |
|
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
06 May 2025 |
06 May 2025 |
000-30941 |
| SCHEDULE 13G/A |
Open Document
|
Open Filing |
|
29 Apr 2025 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
|
22 Apr 2025 |
21 Apr 2025 |
|
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
21 Apr 2025 |
21 Apr 2025 |
000-30941 |
| ARS |
Open Document
|
Open Filing |
ARS |
31 Mar 2025 |
31 Dec 2024 |
000-30941 |
| DEF 14A |
Open Document
| Data
|
Open Filing |
DEF 14A |
31 Mar 2025 |
07 May 2025 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
12 Mar 2025 |
12 Mar 2025 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
04 Mar 2025 |
28 Feb 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
04 Mar 2025 |
28 Feb 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
04 Mar 2025 |
28 Feb 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
04 Mar 2025 |
28 Feb 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
04 Mar 2025 |
28 Feb 2025 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
28 Feb 2025 |
31 Dec 2024 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
10 Feb 2025 |
10 Feb 2025 |
000-30941 |
| SCHEDULE 13G/A |
Open Document
|
Open Filing |
|
30 Jan 2025 |
|
005-60443 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
10 Jan 2025 |
10 Jan 2025 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
07 Jan 2025 |
03 Jan 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
16 Dec 2024 |
16 Dec 2024 |
|
| 3 |
Open Document
|
Open Filing |
|
12 Dec 2024 |
12 Dec 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
19 Nov 2024 |
16 Sep 2024 |
|
| SC 13G/A |
Open Document
|
Open Filing |
|
08 Nov 2024 |
|
005-60443 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
07 Nov 2024 |
30 Sep 2024 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
06 Nov 2024 |
06 Nov 2024 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
18 Oct 2024 |
|
005-60443 |
| 4/A |
Open Document
|
Open Filing |
|
17 Oct 2024 |
16 Oct 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
17 Oct 2024 |
16 Oct 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
17 Sep 2024 |
16 Sep 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
17 Sep 2024 |
16 Sep 2024 |
|
| 144 |
Open Document
|
Open Filing |
|
29 Aug 2024 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
06 Aug 2024 |
06 Aug 2024 |
|
| 144 |
Open Document
|
Open Filing |
|
06 Aug 2024 |
|
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
01 Aug 2024 |
30 Jun 2024 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8K |
31 Jul 2024 |
31 Jul 2024 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
09 Jul 2024 |
09 Jul 2024 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
24 Jun 2024 |
20 Jun 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
18 Jun 2024 |
17 Jun 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
18 Jun 2024 |
17 Jun 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
05 Jun 2024 |
05 Jun 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
05 Jun 2024 |
05 Jun 2024 |
|
| 144 |
Open Document
|
Open Filing |
|
30 May 2024 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
20 May 2024 |
20 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
20 May 2024 |
17 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
20 May 2024 |
17 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
20 May 2024 |
17 May 2024 |
|
| 144 |
Open Document
|
Open Filing |
|
20 May 2024 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
17 May 2024 |
15 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
17 May 2024 |
15 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
17 May 2024 |
15 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
17 May 2024 |
15 May 2024 |
|
| SD |
Open Document
|
Open Filing |
FORM SD |
17 May 2024 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
16 May 2024 |
15 May 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
16 May 2024 |
15 May 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
16 May 2024 |
15 May 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
16 May 2024 |
15 May 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
16 May 2024 |
15 May 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
16 May 2024 |
15 May 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
16 May 2024 |
15 May 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
16 May 2024 |
15 May 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
16 May 2024 |
15 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2024 |
15 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2024 |
15 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2024 |
15 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2024 |
15 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2024 |
15 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2024 |
15 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2024 |
15 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2024 |
15 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2024 |
15 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
15 May 2024 |
15 May 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
13 May 2024 |
09 May 2024 |
|
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
09 May 2024 |
09 May 2024 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
02 May 2024 |
31 Mar 2024 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
01 May 2024 |
01 May 2024 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
19 Apr 2024 |
18 Apr 2024 |
|
| ARS |
Open Document
|
Open Filing |
ARS |
29 Mar 2024 |
31 Dec 2023 |
000-30941 |
| DEF 14A |
Open Document
| Data
|
Open Filing |
FORM DEF 14A |
29 Mar 2024 |
09 May 2024 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
15 Mar 2024 |
15 Mar 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
15 Mar 2024 |
15 Mar 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
11 Mar 2024 |
11 Mar 2024 |
|
| PRE 14A |
Open Document
| Data
|
Open Filing |
PRE 14A |
08 Mar 2024 |
09 May 2024 |
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
07 Mar 2024 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
01 Mar 2024 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
01 Mar 2024 |
28 Feb 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
01 Mar 2024 |
28 Feb 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
01 Mar 2024 |
28 Feb 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
01 Mar 2024 |
28 Feb 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
01 Mar 2024 |
28 Feb 2024 |
|
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
29 Feb 2024 |
28 Feb 2024 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
29 Feb 2024 |
29 Feb 2024 |
|
| 3 |
Open Document
|
Open Filing |
|
28 Feb 2024 |
28 Feb 2024 |
|
| 3 |
Open Document
|
Open Filing |
|
28 Feb 2024 |
28 Feb 2024 |
|
| 10-K/A |
Open Document
| Data
|
Open Filing |
10-K/A |
28 Feb 2024 |
31 Dec 2023 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
26 Feb 2024 |
23 Feb 2024 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
23 Feb 2024 |
31 Dec 2023 |
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
23 Feb 2024 |
|
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
13 Feb 2024 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
09 Feb 2024 |
|
005-60443 |
| 8-K |
Open Document
| Data
|
Open Filing |
|
07 Feb 2024 |
07 Feb 2024 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
19 Jan 2024 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Jan 2024 |
06 Dec 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Dec 2023 |
14 Dec 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
14 Dec 2023 |
14 Dec 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
13 Nov 2023 |
10 Nov 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
06 Nov 2023 |
|
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
02 Nov 2023 |
30 Sep 2023 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
01 Nov 2023 |
01 Nov 2023 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Oct 2023 |
16 Oct 2023 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
29 Sep 2023 |
29 Sep 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 Sep 2023 |
15 Sep 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Sep 2023 |
15 Sep 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
14 Sep 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
14 Sep 2023 |
14 Sep 2023 |
|
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
08 Sep 2023 |
12 Jun 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
07 Sep 2023 |
07 Sep 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
07 Sep 2023 |
07 Sep 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
07 Sep 2023 |
07 Sep 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
07 Sep 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
07 Sep 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
07 Sep 2023 |
|
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
05 Sep 2023 |
05 Sep 2023 |
000-30941 |
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
01 Sep 2023 |
01 Sep 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
07 Aug 2023 |
07 Aug 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
07 Aug 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
07 Aug 2023 |
|
000-30941 |
| S-3ASR |
Open Document
|
Open Filing |
S-3ASR |
03 Aug 2023 |
|
333-273639 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
03 Aug 2023 |
30 Jun 2023 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
02 Aug 2023 |
02 Aug 2023 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Jun 2023 |
15 Jun 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Jun 2023 |
15 Jun 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
14 Jun 2023 |
12 Jun 2023 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
12 Jun 2023 |
12 Jun 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Jun 2023 |
12 Jun 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Jun 2023 |
12 Jun 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
12 Jun 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
12 Jun 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Jun 2023 |
09 Jun 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
09 Jun 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
08 Jun 2023 |
08 Jun 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
08 Jun 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
07 Jun 2023 |
07 Jun 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
07 Jun 2023 |
07 Jun 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
07 Jun 2023 |
07 Jun 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
07 Jun 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
07 Jun 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
06 Jun 2023 |
06 Jun 2023 |
|
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
06 Jun 2023 |
25 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
30 May 2023 |
26 May 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
26 May 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
25 May 2023 |
25 May 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
25 May 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
25 May 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
25 May 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
25 May 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
25 May 2023 |
25 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
25 May 2023 |
25 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
25 May 2023 |
25 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
25 May 2023 |
25 May 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
22 May 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
19 May 2023 |
19 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
19 May 2023 |
17 May 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
19 May 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
18 May 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
18 May 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
18 May 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
18 May 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2023 |
16 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2023 |
16 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2023 |
16 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2023 |
16 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2023 |
18 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2023 |
16 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2023 |
16 May 2023 |
|
| SD |
Open Document
|
Open Filing |
FORM SD |
18 May 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
17 May 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2023 |
15 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2023 |
15 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2023 |
15 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2023 |
15 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2023 |
15 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2023 |
16 May 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
16 May 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
16 May 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
16 May 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
16 May 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2023 |
15 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2023 |
16 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2023 |
15 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2023 |
15 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2023 |
15 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2023 |
15 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2023 |
15 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2023 |
15 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2023 |
15 May 2023 |
|
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
12 May 2023 |
11 May 2023 |
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
11 May 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
11 May 2023 |
11 May 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
11 May 2023 |
11 May 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
11 May 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
10 May 2023 |
10 May 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
10 May 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
09 May 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
09 May 2023 |
09 May 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
09 May 2023 |
|
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
05 May 2023 |
31 Mar 2023 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
03 May 2023 |
03 May 2023 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
18 Apr 2023 |
24 Feb 2023 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
10 Apr 2023 |
|
005-60443 |
| ARS |
Open Document
|
Open Filing |
ARS |
31 Mar 2023 |
31 Dec 2022 |
000-30941 |
| DEF 14A |
Open Document
| Data
|
Open Filing |
FORM DEF 14A |
31 Mar 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
01 Mar 2023 |
28 Feb 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
01 Mar 2023 |
28 Feb 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
01 Mar 2023 |
28 Feb 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
01 Mar 2023 |
28 Feb 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
01 Mar 2023 |
28 Feb 2023 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
24 Feb 2023 |
31 Dec 2022 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
14 Feb 2023 |
14 Feb 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
13 Feb 2023 |
13 Feb 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
13 Feb 2023 |
13 Feb 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
13 Feb 2023 |
13 Feb 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
13 Feb 2023 |
13 Feb 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
13 Feb 2023 |
13 Feb 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
13 Feb 2023 |
13 Feb 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
13 Feb 2023 |
13 Feb 2023 |
|
| SC 13G/A |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
10 Feb 2023 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
09 Feb 2023 |
|
005-60443 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
08 Feb 2023 |
08 Feb 2023 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
26 Jan 2023 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
|
20 Jan 2023 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Dec 2022 |
14 Dec 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
14 Dec 2022 |
14 Dec 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
09 Dec 2022 |
08 Dec 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
08 Dec 2022 |
08 Dec 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
05 Dec 2022 |
01 Dec 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
30 Nov 2022 |
30 Nov 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
28 Nov 2022 |
28 Nov 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
28 Nov 2022 |
23 Nov 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
23 Nov 2022 |
23 Nov 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
21 Nov 2022 |
18 Nov 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 Nov 2022 |
18 Nov 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Nov 2022 |
15 Nov 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Nov 2022 |
15 Nov 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
14 Nov 2022 |
10 Nov 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
10 Nov 2022 |
10 Nov 2022 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
03 Nov 2022 |
30 Sep 2022 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
02 Nov 2022 |
02 Nov 2022 |
000-30941 |
| SC 13G |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
27 Oct 2022 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
PRIMECAP MANAGEMENT CO/CA/ |
07 Oct 2022 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Sep 2022 |
15 Sep 2022 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
06 Sep 2022 |
06 Sep 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
25 Aug 2022 |
25 Aug 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Aug 2022 |
15 Aug 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Aug 2022 |
12 Aug 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Aug 2022 |
12 Aug 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Aug 2022 |
12 Aug 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Aug 2022 |
11 Aug 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
08 Aug 2022 |
08 Aug 2022 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
04 Aug 2022 |
30 Jun 2022 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
03 Aug 2022 |
03 Aug 2022 |
000-30941 |
| SD |
Open Document
|
Open Filing |
SD |
20 May 2022 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2022 |
15 May 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2022 |
15 May 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2022 |
15 May 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2022 |
15 May 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2022 |
15 May 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2022 |
15 May 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2022 |
16 May 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2022 |
16 May 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2022 |
16 May 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2022 |
16 May 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2022 |
16 May 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2022 |
16 May 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2022 |
16 May 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 May 2022 |
16 May 2022 |
|
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
11 May 2022 |
10 May 2022 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
05 May 2022 |
31 Mar 2022 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
04 May 2022 |
04 May 2022 |
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
30 Mar 2022 |
10 May 2022 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 Mar 2022 |
17 Mar 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Mar 2022 |
16 Mar 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Mar 2022 |
15 Mar 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Mar 2022 |
15 Mar 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
03 Mar 2022 |
02 Mar 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2022 |
28 Feb 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2022 |
28 Feb 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2022 |
28 Feb 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2022 |
28 Feb 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2022 |
28 Feb 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2022 |
28 Feb 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
28 Feb 2022 |
25 Feb 2022 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
25 Feb 2022 |
31 Dec 2021 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
24 Feb 2022 |
23 Feb 2022 |
000-30941 |
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
23 Feb 2022 |
23 Feb 2022 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
23 Feb 2022 |
23 Feb 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
10 Feb 2022 |
10 Feb 2022 |
|
| SC 13G/A |
Open Document
|
Open Filing |
PRIMECAP MANAGEMENT CO/CA/ |
10 Feb 2022 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
09 Feb 2022 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
09 Feb 2022 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SEC SCHEDULE 13G |
08 Feb 2022 |
|
005-60443 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
07 Feb 2022 |
07 Feb 2022 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
28 Jan 2022 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
09 Dec 2021 |
08 Dec 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
22 Nov 2021 |
22 Nov 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Nov 2021 |
11 Nov 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
08 Nov 2021 |
08 Nov 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
08 Nov 2021 |
08 Nov 2021 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
05 Nov 2021 |
30 Sep 2021 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
03 Nov 2021 |
03 Nov 2021 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Sep 2021 |
15 Sep 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
31 Aug 2021 |
31 Aug 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
30 Aug 2021 |
30 Aug 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
30 Aug 2021 |
30 Aug 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
27 Aug 2021 |
27 Aug 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
27 Aug 2021 |
26 Aug 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
27 Aug 2021 |
26 Aug 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
25 Aug 2021 |
25 Aug 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Aug 2021 |
13 Aug 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
09 Aug 2021 |
09 Aug 2021 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
06 Aug 2021 |
30 Jun 2021 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
04 Aug 2021 |
04 Aug 2021 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
24 May 2021 |
24 May 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
21 May 2021 |
21 May 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2021 |
15 May 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2021 |
15 May 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2021 |
15 May 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2021 |
15 May 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2021 |
15 May 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2021 |
15 May 2021 |
|
| SD |
Open Document
|
Open Filing |
SD |
18 May 2021 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2021 |
17 May 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2021 |
17 May 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2021 |
17 May 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2021 |
17 May 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2021 |
17 May 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2021 |
17 May 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2021 |
17 May 2021 |
|
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
13 May 2021 |
12 May 2021 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
06 May 2021 |
31 Mar 2021 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
04 May 2021 |
04 May 2021 |
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
25 Mar 2021 |
12 May 2021 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Mar 2021 |
11 Mar 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Mar 2021 |
11 Mar 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
03 Mar 2021 |
28 Feb 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2021 |
28 Feb 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2021 |
28 Feb 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2021 |
28 Feb 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2021 |
28 Feb 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2021 |
28 Feb 2021 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
26 Feb 2021 |
31 Dec 2020 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
25 Feb 2021 |
25 Feb 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
19 Feb 2021 |
19 Feb 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 Feb 2021 |
17 Feb 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 Feb 2021 |
17 Feb 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 Feb 2021 |
16 Feb 2021 |
|
| SC 13G/A |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
12 Feb 2021 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SEC SCHEDULE 13G |
12 Feb 2021 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
12 Feb 2021 |
|
005-60443 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
10 Feb 2021 |
10 Feb 2021 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
10 Feb 2021 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SEC SCHEDULE 13G |
04 Feb 2021 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
|
26 Jan 2021 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
01 Dec 2020 |
01 Dec 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
24 Nov 2020 |
24 Nov 2020 |
|
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
18 Nov 2020 |
17 Nov 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 Nov 2020 |
17 Nov 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 Nov 2020 |
16 Nov 2020 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
06 Nov 2020 |
30 Sep 2020 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
05 Nov 2020 |
05 Nov 2020 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
05 Aug 2020 |
30 Jun 2020 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
FORM 8-K |
04 Aug 2020 |
31 Jul 2020 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
29 May 2020 |
28 May 2020 |
|
| S-3ASR |
Open Document
|
Open Filing |
S-3ASR |
29 May 2020 |
|
333-238772 |
| S-8 |
Open Document
|
Open Filing |
S-8 |
29 May 2020 |
|
333-238770 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
28 May 2020 |
27 May 2020 |
|
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
28 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
26 May 2020 |
26 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
26 May 2020 |
26 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
22 May 2020 |
22 May 2020 |
|
| SD |
Open Document
|
Open Filing |
SD |
22 May 2020 |
|
000-30941 |
| 8-K/A |
Open Document
|
Open Filing |
8-K/A |
21 May 2020 |
19 May 2020 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
FORM 8-K |
21 May 2020 |
19 May 2020 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
19 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
19 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
19 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
19 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
19 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
19 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
19 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2020 |
15 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
11 May 2020 |
11 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
08 May 2020 |
08 May 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
08 May 2020 |
08 May 2020 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
06 May 2020 |
31 Mar 2020 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
FROM 8-K |
05 May 2020 |
05 May 2020 |
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
30 Mar 2020 |
19 May 2020 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
04 Mar 2020 |
04 Mar 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
03 Mar 2020 |
28 Feb 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2020 |
28 Feb 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2020 |
28 Feb 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2020 |
28 Feb 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2020 |
28 Feb 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2020 |
28 Feb 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2020 |
28 Feb 2020 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
02 Mar 2020 |
31 Dec 2019 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
20 Feb 2020 |
19 Feb 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
13 Feb 2020 |
12 Feb 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
13 Feb 2020 |
13 Feb 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Feb 2020 |
11 Feb 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Feb 2020 |
11 Feb 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Feb 2020 |
11 Feb 2020 |
|
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
12 Feb 2020 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
12 Feb 2020 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
12 Feb 2020 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
10 Feb 2020 |
10 Feb 2020 |
|
| SC 13G/A |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
07 Feb 2020 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
FORM 8-K |
05 Feb 2020 |
05 Feb 2020 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
04 Feb 2020 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SEC SCHEDULE 13G |
27 Jan 2020 |
|
005-60443 |
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
13 Dec 2019 |
10 Dec 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
13 Dec 2019 |
13 Dec 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Dec 2019 |
12 Dec 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
11 Dec 2019 |
11 Dec 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
10 Dec 2019 |
10 Dec 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
09 Dec 2019 |
09 Dec 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
05 Dec 2019 |
05 Dec 2019 |
|
| 8-K |
Open Document
|
Open Filing |
FORM 8-K |
03 Dec 2019 |
03 Dec 2019 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
22 Nov 2019 |
19 Nov 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
20 Nov 2019 |
18 Nov 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
20 Nov 2019 |
20 Nov 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
19 Nov 2019 |
19 Nov 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 Nov 2019 |
15 Nov 2019 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
07 Nov 2019 |
30 Sep 2019 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
31 Oct 2019 |
31 Oct 2019 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
24 Sep 2019 |
24 Sep 2019 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
21 Aug 2019 |
21 Aug 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Aug 2019 |
15 Aug 2019 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
15 Aug 2019 |
14 Aug 2019 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
15 Aug 2019 |
14 Aug 2019 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
07 Aug 2019 |
30 Jun 2019 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
06 Aug 2019 |
06 Aug 2019 |
000-30941 |
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
23 May 2019 |
15 May 2019 |
|
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
23 May 2019 |
15 May 2019 |
|
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
23 May 2019 |
15 May 2019 |
|
| SD |
Open Document
|
Open Filing |
SD |
22 May 2019 |
|
000-30941 |
| S-8 |
Open Document
|
Open Filing |
S-8 |
21 May 2019 |
|
333-231634 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2019 |
15 May 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2019 |
15 May 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2019 |
15 May 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2019 |
15 May 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2019 |
15 May 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2019 |
15 May 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2019 |
15 May 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2019 |
17 May 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2019 |
15 May 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2019 |
15 May 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2019 |
15 May 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2019 |
15 May 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2019 |
15 May 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2019 |
15 May 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2019 |
15 May 2019 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
15 May 2019 |
14 May 2019 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
08 May 2019 |
31 Mar 2019 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
07 May 2019 |
07 May 2019 |
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
27 Mar 2019 |
14 May 2019 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
13 Mar 2019 |
13 Mar 2019 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
11 Mar 2019 |
31 Dec 2018 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
01 Mar 2019 |
28 Feb 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
01 Mar 2019 |
28 Feb 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
01 Mar 2019 |
28 Feb 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
01 Mar 2019 |
28 Feb 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
01 Mar 2019 |
28 Feb 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
01 Mar 2019 |
28 Feb 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
01 Mar 2019 |
28 Feb 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
20 Feb 2019 |
20 Feb 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Feb 2019 |
15 Feb 2019 |
|
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
12 Feb 2019 |
01 Jun 2018 |
|
| SC 13G/A |
Open Document
|
Open Filing |
SEC SCHEDULE 13G |
12 Feb 2019 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
|
11 Feb 2019 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
08 Feb 2019 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
08 Feb 2019 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
08 Feb 2019 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
06 Feb 2019 |
06 Feb 2019 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
24 Jan 2019 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
21 Nov 2018 |
21 Nov 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Nov 2018 |
15 Nov 2018 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
02 Nov 2018 |
30 Sep 2018 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
01 Nov 2018 |
01 Nov 2018 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
03 Aug 2018 |
30 Jun 2018 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
02 Aug 2018 |
02 Aug 2018 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
SEC SCHEDULE 13G |
10 Jul 2018 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
01 Jun 2018 |
01 Jun 2018 |
|
| SD |
Open Document
|
Open Filing |
SD |
24 May 2018 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2018 |
18 May 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2018 |
16 May 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2018 |
16 May 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2018 |
16 May 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2018 |
16 May 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2018 |
16 May 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2018 |
16 May 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2018 |
16 May 2018 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
18 May 2018 |
16 May 2018 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2018 |
16 May 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2018 |
16 May 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2018 |
16 May 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2018 |
16 May 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2018 |
16 May 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2018 |
16 May 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2018 |
16 May 2018 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
16 May 2018 |
16 May 2018 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
04 May 2018 |
31 Mar 2018 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
02 May 2018 |
02 May 2018 |
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
27 Mar 2018 |
16 May 2018 |
000-30941 |
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
14 Mar 2018 |
31 Dec 2017 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
14 Mar 2018 |
14 Mar 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
14 Mar 2018 |
14 Mar 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2018 |
28 Feb 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2018 |
28 Feb 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2018 |
28 Feb 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2018 |
28 Feb 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2018 |
28 Feb 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2018 |
28 Feb 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
02 Mar 2018 |
28 Feb 2018 |
|
| SC 13G |
Open Document
|
Open Filing |
2017 13-G FILING |
13 Feb 2018 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
|
12 Feb 2018 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
09 Feb 2018 |
|
005-60443 |
| SC 13G |
Open Document
|
Open Filing |
|
08 Feb 2018 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
06 Feb 2018 |
06 Feb 2018 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
23 Jan 2018 |
|
005-60443 |
| SC 13G |
Open Document
|
Open Filing |
SEC SCHEDULE 13G |
10 Jan 2018 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
04 Jan 2018 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Nov 2017 |
15 Nov 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Nov 2017 |
15 Nov 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Nov 2017 |
14 Nov 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Nov 2017 |
13 Nov 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
09 Nov 2017 |
08 Nov 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
09 Nov 2017 |
07 Nov 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
09 Nov 2017 |
07 Nov 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
09 Nov 2017 |
07 Nov 2017 |
|
| SC 13G/A |
Open Document
|
Open Filing |
|
09 Nov 2017 |
|
005-60443 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
03 Nov 2017 |
30 Sep 2017 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
02 Nov 2017 |
02 Nov 2017 |
000-30941 |
| UPLOAD |
Open Document
|
Open Filing |
|
19 Sep 2017 |
|
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
13 Sep 2017 |
12 Sep 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
13 Sep 2017 |
12 Sep 2017 |
|
| CORRESP |
Open Document
|
Open Filing |
|
08 Sep 2017 |
|
|
| UPLOAD |
Open Document
|
Open Filing |
|
06 Sep 2017 |
|
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
24 Aug 2017 |
22 Aug 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Aug 2017 |
15 Aug 2017 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
04 Aug 2017 |
30 Jun 2017 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
8-K |
03 Aug 2017 |
03 Aug 2017 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
08 Jun 2017 |
07 Jun 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
08 Jun 2017 |
06 Jun 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
08 Jun 2017 |
06 Jun 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
31 May 2017 |
31 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
26 May 2017 |
25 May 2017 |
|
| S-8 |
Open Document
|
Open Filing |
S-8 |
25 May 2017 |
|
333-218225 |
| SD |
Open Document
|
Open Filing |
SD |
24 May 2017 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2017 |
18 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2017 |
16 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2017 |
17 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2017 |
16 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2017 |
16 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2017 |
16 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2017 |
16 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2017 |
16 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2017 |
17 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2017 |
17 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2017 |
16 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2017 |
17 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2017 |
17 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2017 |
17 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2017 |
17 May 2017 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
17 May 2017 |
16 May 2017 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2017 |
12 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
11 May 2017 |
09 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
11 May 2017 |
09 May 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
11 May 2017 |
10 May 2017 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
05 May 2017 |
31 Mar 2017 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
04 May 2017 |
04 May 2017 |
000-30941 |
| EFFECT |
Open Document
|
Open Filing |
|
14 Apr 2017 |
|
333-217192 |
| CORRESP |
Open Document
|
Open Filing |
|
12 Apr 2017 |
|
|
| UPLOAD |
Open Document
|
Open Filing |
|
12 Apr 2017 |
|
|
| S-3 |
Open Document
|
Open Filing |
S-3 |
07 Apr 2017 |
|
333-217192 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
29 Mar 2017 |
16 May 2017 |
000-30941 |
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
14 Mar 2017 |
31 Dec 2016 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
21 Feb 2017 |
15 Feb 2017 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 Feb 2017 |
15 Feb 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 Feb 2017 |
15 Feb 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 Feb 2017 |
15 Feb 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 Feb 2017 |
15 Feb 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 Feb 2017 |
15 Feb 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 Feb 2017 |
13 Feb 2017 |
|
| SC 13G/A |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
13 Feb 2017 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
09 Feb 2017 |
07 Feb 2017 |
|
| SC 13G |
Open Document
|
Open Filing |
13-G FILING |
09 Feb 2017 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
09 Feb 2017 |
|
005-60443 |
| SC 13G |
Open Document
|
Open Filing |
SCHEDULE 13G |
09 Feb 2017 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
08 Feb 2017 |
06 Feb 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
08 Feb 2017 |
06 Feb 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
08 Feb 2017 |
06 Feb 2017 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
01 Feb 2017 |
01 Feb 2017 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
25 Jan 2017 |
21 Jan 2017 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
19 Jan 2017 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
13 Dec 2016 |
12 Dec 2016 |
|
| SC 13G/A |
Open Document
|
Open Filing |
13G / A FILING |
23 Nov 2016 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Nov 2016 |
15 Nov 2016 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
15 Nov 2016 |
10 Nov 2016 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
03 Nov 2016 |
30 Sep 2016 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
02 Nov 2016 |
02 Nov 2016 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
13-G/A FILING |
30 Sep 2016 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
10 Aug 2016 |
08 Aug 2016 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
08 Aug 2016 |
30 Jun 2016 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
08 Aug 2016 |
05 Aug 2016 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
02 Aug 2016 |
02 Aug 2016 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
05 Jul 2016 |
30 Jun 2016 |
000-30941 |
| S-8 |
Open Document
|
Open Filing |
S-8 |
27 May 2016 |
|
333-211673 |
| SD |
Open Document
|
Open Filing |
SD |
27 May 2016 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2016 |
16 May 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2016 |
16 May 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2016 |
16 May 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2016 |
16 May 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2016 |
16 May 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2016 |
16 May 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2016 |
16 May 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2016 |
16 May 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2016 |
16 May 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2016 |
16 May 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2016 |
16 May 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2016 |
16 May 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2016 |
16 May 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 May 2016 |
16 May 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
09 May 2016 |
09 May 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
06 May 2016 |
06 May 2016 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
05 May 2016 |
04 May 2016 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
05 May 2016 |
31 Mar 2016 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
8-K |
02 May 2016 |
02 May 2016 |
000-30941 |
| DEFA14A |
Open Document
|
Open Filing |
DEFA14A |
12 Apr 2016 |
|
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
11 Apr 2016 |
11 Apr 2016 |
000-30941 |
| DEFA14A |
Open Document
|
Open Filing |
DEFA14A |
11 Apr 2016 |
|
000-30941 |
| DEFA14A |
Open Document
|
Open Filing |
DEFA14A |
04 Apr 2016 |
|
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
14 Mar 2016 |
04 Apr 2016 |
000-30941 |
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
04 Mar 2016 |
31 Dec 2015 |
000-30941 |
| PRE 14A |
Open Document
|
Open Filing |
PRE 14A |
29 Feb 2016 |
04 Apr 2016 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
SENVEST MANAGEMENT, LLC |
12 Feb 2016 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
12 Feb 2016 |
|
005-60443 |
| SC 13G |
Open Document
|
Open Filing |
2015 13-G FILING |
10 Feb 2016 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
02 Feb 2016 |
02 Feb 2016 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
25 Jan 2016 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Nov 2015 |
16 Nov 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
10 Nov 2015 |
10 Nov 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
10 Nov 2015 |
09 Nov 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
10 Nov 2015 |
09 Nov 2015 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
05 Nov 2015 |
30 Sep 2015 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
04 Nov 2015 |
04 Nov 2015 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
17 Aug 2015 |
17 Aug 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Aug 2015 |
10 Aug 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
12 Aug 2015 |
10 Aug 2015 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
05 Aug 2015 |
30 Jun 2015 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
04 Aug 2015 |
04 Aug 2015 |
000-30941 |
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
16 Jul 2015 |
15 Jul 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Jul 2015 |
15 Jul 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Jul 2015 |
15 Jul 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Jul 2015 |
15 Jul 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Jul 2015 |
15 Jul 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Jul 2015 |
15 Jul 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Jul 2015 |
15 Jul 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Jul 2015 |
15 Jul 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Jul 2015 |
15 Jul 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Jul 2015 |
15 Jul 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Jul 2015 |
15 Jul 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Jul 2015 |
15 Jul 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Jul 2015 |
15 Jul 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Jul 2015 |
15 Jul 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
16 Jul 2015 |
15 Jul 2015 |
|
| SC 13G |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
30 Jun 2015 |
|
005-60443 |
| S-8 |
Open Document
|
Open Filing |
S-8 |
29 May 2015 |
|
333-204544 |
| SD |
Open Document
|
Open Filing |
SD |
22 May 2015 |
|
000-30941 |
| SC 13D/A |
Open Document
|
Open Filing |
AMENDMENT NO. 4 TO THE SCHEDULE 13D |
20 May 2015 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2015 |
15 May 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2015 |
15 May 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
18 May 2015 |
15 May 2015 |
|
| SC 13D/A |
Open Document
|
Open Filing |
AMENDMENT NO. 3 TO THE SCHEDULE 13D |
15 May 2015 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
15 May 2015 |
14 May 2015 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
14 May 2015 |
13 May 2015 |
000-30941 |
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
13 May 2015 |
13 May 2015 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
13 May 2015 |
13 May 2015 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
13 May 2015 |
13 May 2015 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
06 May 2015 |
31 Mar 2015 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
05 May 2015 |
05 May 2015 |
000-30941 |
| ARS |
Open Document
|
Open Filing |
AUTO-GENERATED PAPER DOCUMENT |
25 Mar 2015 |
31 Dec 2014 |
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
25 Mar 2015 |
13 May 2015 |
000-30941 |
| 10-K/A |
Open Document
| Data
|
Open Filing |
10-K/A |
12 Mar 2015 |
31 Dec 2014 |
000-30941 |
| 10-K |
Open Document
|
Open Filing |
10-K |
11 Mar 2015 |
31 Dec 2014 |
000-30941 |
| SC 13D/A |
Open Document
|
Open Filing |
AMENDMENT NO. 2 TO THE SCHEDULE 13D |
06 Mar 2015 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
06 Mar 2015 |
05 Mar 2015 |
000-30941 |
| DEFA14A |
Open Document
|
Open Filing |
8-K |
06 Mar 2015 |
|
000-30941 |
| DFAN14A |
Open Document
|
Open Filing |
|
03 Mar 2015 |
|
000-30941 |
| PRE 14A |
Open Document
|
Open Filing |
PRE 14A |
03 Mar 2015 |
13 May 2015 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
20 Feb 2015 |
19 Feb 2015 |
|
| 4 |
Open Document
|
Open Filing |
BINTZ OPTION EXERCISE FEB 2015 |
19 Feb 2015 |
17 Feb 2015 |
|
| 4 |
Open Document
|
Open Filing |
LAWSON FEB 2015 OPTION EXERCISE |
19 Feb 2015 |
17 Feb 2015 |
|
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
13 Feb 2015 |
|
005-60443 |
| DEFA14A |
Open Document
|
Open Filing |
DEFA14A |
13 Feb 2015 |
|
000-30941 |
| SC 13D/A |
Open Document
|
Open Filing |
AMENDMENT NO. 1 TO THE SCHEDULE 13D |
09 Feb 2015 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
05 Feb 2015 |
30 Jan 2015 |
000-30941 |
| SC 13G |
Open Document
|
Open Filing |
DECEMBER 31, 2014 13-G FILING |
03 Feb 2015 |
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005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
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30 Jan 2015 |
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005-60443 |
| 8-K |
Open Document
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Open Filing |
8-K |
12 Jan 2015 |
07 Jan 2015 |
000-30941 |
| 4 |
Open Document
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Open Filing |
LAWSON NOVEMBER 2014 SALE |
19 Nov 2014 |
18 Nov 2014 |
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| 4 |
Open Document
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Open Filing |
LUNDBERG RSU GRANT NOV 2014 |
17 Nov 2014 |
17 Nov 2014 |
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| 4 |
Open Document
|
Open Filing |
GEORGE RSU GRANT NOV 2014 |
17 Nov 2014 |
17 Nov 2014 |
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| 8-K |
Open Document
|
Open Filing |
8-K |
14 Nov 2014 |
13 Nov 2014 |
000-30941 |
| 4 |
Open Document
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Open Filing |
FALLON NOV 2014 SALE |
12 Nov 2014 |
10 Nov 2014 |
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| 10-Q |
Open Document
| Data
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Open Filing |
10-Q |
06 Nov 2014 |
30 Sep 2014 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
05 Nov 2014 |
05 Nov 2014 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
07 Oct 2014 |
03 Oct 2014 |
000-30941 |
| SC 13D |
Open Document
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Open Filing |
|
16 Sep 2014 |
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005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
04 Sep 2014 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
26 Aug 2014 |
22 Aug 2014 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
21 Aug 2014 |
20 Aug 2014 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
08 Aug 2014 |
30 Jun 2014 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
04 Aug 2014 |
01 Aug 2014 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
BINTZ 2014 OPTION GRANT |
17 Jul 2014 |
15 Jul 2014 |
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| 4 |
Open Document
|
Open Filing |
BREWER 2014 OPTION GRANT |
17 Jul 2014 |
15 Jul 2014 |
|
| 4 |
Open Document
|
Open Filing |
FALLON 2014 OPTION GRANT |
17 Jul 2014 |
15 Jul 2014 |
|
| 4 |
Open Document
|
Open Filing |
PUMA 2014 OPTION GRANT |
17 Jul 2014 |
15 Jul 2014 |
|
| 4 |
Open Document
|
Open Filing |
ALDEBORGH 2014 OPTION GRANT |
17 Jul 2014 |
15 Jul 2014 |
|
| 4 |
Open Document
|
Open Filing |
LAWSON 2014 OPTION GRANT |
17 Jul 2014 |
15 Jul 2014 |
|
| 4 |
Open Document
|
Open Filing |
THOMPSON 2014 OPTION GRANT |
17 Jul 2014 |
15 Jul 2014 |
|
| 4 |
Open Document
|
Open Filing |
NETTLES 2014 OPTION GRANT |
17 Jul 2014 |
15 Jul 2014 |
|
| 4 |
Open Document
|
Open Filing |
KEITHLEY 2014 OPTION GRANT |
17 Jul 2014 |
15 Jul 2014 |
|
| 4 |
Open Document
|
Open Filing |
JENNINGS 2014 OPTION GRANT |
17 Jul 2014 |
15 Jul 2014 |
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| 4 |
Open Document
|
Open Filing |
HARDIS 2014 OPTION GRANT |
17 Jul 2014 |
15 Jul 2014 |
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| 4 |
Open Document
|
Open Filing |
FLETCHER 2014OPTION GRANT |
17 Jul 2014 |
15 Jul 2014 |
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| 4 |
Open Document
|
Open Filing |
GEORGE 2014 STOCK OPTION GRANT |
17 Jul 2014 |
15 Jul 2014 |
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| 4 |
Open Document
|
Open Filing |
LUNDBERG 2014 STOCK OPTION GRANT |
17 Jul 2014 |
15 Jul 2014 |
|
| 4 |
Open Document
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Open Filing |
GEORGE MKT PURCHASE (2) MAY 2014 |
02 Jun 2014 |
29 May 2014 |
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| 4 |
Open Document
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Open Filing |
A GEORGE MARKET PURCHASE MAY 2014 |
29 May 2014 |
28 May 2014 |
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| SD |
Open Document
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Open Filing |
SD |
28 May 2014 |
|
000-30941 |
| 4 |
Open Document
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Open Filing |
FLETCHER MARKET PURCHASE MAY 2014 |
27 May 2014 |
22 May 2014 |
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| S-8 |
Open Document
|
Open Filing |
S-8 |
22 May 2014 |
|
333-196157 |
| 4 |
Open Document
|
Open Filing |
|
20 May 2014 |
19 May 2014 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
19 May 2014 |
13 May 2014 |
000-30941 |
| 3 |
Open Document
|
Open Filing |
|
14 May 2014 |
13 May 2014 |
|
| 3 |
Open Document
|
Open Filing |
|
14 May 2014 |
13 May 2014 |
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| 4/A |
Open Document
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Open Filing |
LAWSON STOCK PURCHASE MAY 2014 AMEND |
12 May 2014 |
09 May 2014 |
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| 4 |
Open Document
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Open Filing |
LAWSON STOCK PURCHASE MAY 2014 |
12 May 2014 |
09 May 2014 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
08 May 2014 |
31 Mar 2014 |
000-30941 |
| SC 13G |
Open Document
|
Open Filing |
SC 13G |
07 May 2014 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
06 May 2014 |
06 May 2014 |
000-30941 |
| ARS |
Open Document
|
Open Filing |
AUTO-GENERATED PAPER DOCUMENT |
09 Apr 2014 |
31 Dec 2013 |
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
25 Mar 2014 |
13 May 2014 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
KEITHLEY 2013 MARKET PURCHASE |
03 Mar 2014 |
15 Aug 2013 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
03 Mar 2014 |
31 Dec 2013 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
BINTZ SALE FEB 2014 |
18 Feb 2014 |
14 Feb 2014 |
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| SC 13G |
Open Document
|
Open Filing |
13-G FILING |
07 Feb 2014 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
04 Feb 2014 |
04 Feb 2014 |
000-30941 |
| 4/A |
Open Document
|
Open Filing |
PUMA RECORD ADJUSTMENT |
29 Jan 2014 |
17 Dec 2013 |
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| 4/A |
Open Document
|
Open Filing |
BREWER RECORD ADJUSTMENT |
29 Jan 2014 |
12 Feb 2013 |
|
| 4/A |
Open Document
|
Open Filing |
BINTZ RECORD ADJUSTMENT |
29 Jan 2014 |
17 Dec 2013 |
|
| SC 13G/A |
Open Document
|
Open Filing |
|
28 Jan 2014 |
|
005-60443 |