| SCHEDULE 13G/A |
Open Document
|
Open Filing |
|
Nov 14, 2025 |
|
005-60443 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Nov 6, 2025 |
Sep 30, 2025 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Nov 4, 2025 |
Nov 4, 2025 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
Oct 17, 2025 |
Oct 16, 2025 |
|
| 425 |
Open Document
|
Open Filing |
425 |
Oct 1, 2025 |
|
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Oct 1, 2025 |
Oct 1, 2025 |
000-30941 |
| 425 |
Open Document
|
Open Filing |
425 |
Oct 1, 2025 |
|
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Oct 1, 2025 |
Oct 1, 2025 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
Sep 17, 2025 |
Sep 15, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
Sep 17, 2025 |
Sep 15, 2025 |
|
| SCHEDULE 13G |
Open Document
|
Open Filing |
|
Aug 14, 2025 |
|
005-60443 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Aug 5, 2025 |
Jun 30, 2025 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Aug 5, 2025 |
Aug 5, 2025 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
Jun 17, 2025 |
Jun 16, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
Jun 17, 2025 |
Jun 16, 2025 |
|
| S-8 |
Open Document
| Data
|
Open Filing |
FORM S-8 |
May 29, 2025 |
|
333-287655 |
| 4 |
Open Document
|
Open Filing |
|
May 21, 2025 |
May 20, 2025 |
|
| 144 |
Open Document
|
Open Filing |
|
May 20, 2025 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
May 20, 2025 |
May 16, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
May 20, 2025 |
May 16, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
May 19, 2025 |
May 15, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
May 19, 2025 |
May 15, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
May 19, 2025 |
May 15, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
May 19, 2025 |
May 15, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
May 19, 2025 |
May 15, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2025 |
May 15, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2025 |
May 15, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2025 |
May 15, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2025 |
May 15, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2025 |
May 15, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2025 |
May 15, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2025 |
May 15, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2025 |
May 15, 2025 |
|
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
May 8, 2025 |
May 7, 2025 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
May 6, 2025 |
Mar 31, 2025 |
000-30941 |
| SD |
Open Document
|
Open Filing |
FORM SD |
May 6, 2025 |
|
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
May 6, 2025 |
May 6, 2025 |
000-30941 |
| SCHEDULE 13G/A |
Open Document
|
Open Filing |
|
Apr 29, 2025 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
|
Apr 22, 2025 |
Apr 21, 2025 |
|
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Apr 21, 2025 |
Apr 21, 2025 |
000-30941 |
| ARS |
Open Document
|
Open Filing |
ARS |
Mar 31, 2025 |
Dec 31, 2024 |
000-30941 |
| DEF 14A |
Open Document
| Data
|
Open Filing |
DEF 14A |
Mar 31, 2025 |
May 7, 2025 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Mar 12, 2025 |
Mar 12, 2025 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
Mar 4, 2025 |
Feb 28, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
Mar 4, 2025 |
Feb 28, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
Mar 4, 2025 |
Feb 28, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
Mar 4, 2025 |
Feb 28, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
Mar 4, 2025 |
Feb 28, 2025 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
Feb 28, 2025 |
Dec 31, 2024 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Feb 10, 2025 |
Feb 10, 2025 |
000-30941 |
| SCHEDULE 13G/A |
Open Document
|
Open Filing |
|
Jan 30, 2025 |
|
005-60443 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Jan 10, 2025 |
Jan 10, 2025 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
Jan 7, 2025 |
Jan 3, 2025 |
|
| 4 |
Open Document
|
Open Filing |
|
Dec 16, 2024 |
Dec 16, 2024 |
|
| 3 |
Open Document
|
Open Filing |
|
Dec 12, 2024 |
Dec 12, 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
Nov 19, 2024 |
Sep 16, 2024 |
|
| SC 13G/A |
Open Document
|
Open Filing |
|
Nov 8, 2024 |
|
005-60443 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Nov 7, 2024 |
Sep 30, 2024 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Nov 6, 2024 |
Nov 6, 2024 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
Oct 18, 2024 |
|
005-60443 |
| 4/A |
Open Document
|
Open Filing |
|
Oct 17, 2024 |
Oct 16, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
Oct 17, 2024 |
Oct 16, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
Sep 17, 2024 |
Sep 16, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
Sep 17, 2024 |
Sep 16, 2024 |
|
| 144 |
Open Document
|
Open Filing |
|
Aug 29, 2024 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
Aug 6, 2024 |
Aug 6, 2024 |
|
| 144 |
Open Document
|
Open Filing |
|
Aug 6, 2024 |
|
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Aug 1, 2024 |
Jun 30, 2024 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8K |
Jul 31, 2024 |
Jul 31, 2024 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Jul 9, 2024 |
Jul 9, 2024 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
Jun 24, 2024 |
Jun 20, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
Jun 18, 2024 |
Jun 17, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
Jun 18, 2024 |
Jun 17, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
Jun 5, 2024 |
Jun 5, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
Jun 5, 2024 |
Jun 5, 2024 |
|
| 144 |
Open Document
|
Open Filing |
|
May 30, 2024 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
May 20, 2024 |
May 20, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 20, 2024 |
May 17, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 20, 2024 |
May 17, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 20, 2024 |
May 17, 2024 |
|
| 144 |
Open Document
|
Open Filing |
|
May 20, 2024 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
May 17, 2024 |
May 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 17, 2024 |
May 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 17, 2024 |
May 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 17, 2024 |
May 15, 2024 |
|
| SD |
Open Document
|
Open Filing |
FORM SD |
May 17, 2024 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
May 16, 2024 |
May 15, 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
May 16, 2024 |
May 15, 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
May 16, 2024 |
May 15, 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
May 16, 2024 |
May 15, 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
May 16, 2024 |
May 15, 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
May 16, 2024 |
May 15, 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
May 16, 2024 |
May 15, 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
May 16, 2024 |
May 15, 2024 |
|
| 4/A |
Open Document
|
Open Filing |
|
May 16, 2024 |
May 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2024 |
May 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2024 |
May 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2024 |
May 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2024 |
May 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2024 |
May 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2024 |
May 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2024 |
May 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2024 |
May 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2024 |
May 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 15, 2024 |
May 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
May 13, 2024 |
May 9, 2024 |
|
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
May 9, 2024 |
May 9, 2024 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
May 2, 2024 |
Mar 31, 2024 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
May 1, 2024 |
May 1, 2024 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
Apr 19, 2024 |
Apr 18, 2024 |
|
| ARS |
Open Document
|
Open Filing |
ARS |
Mar 29, 2024 |
Dec 31, 2023 |
000-30941 |
| DEF 14A |
Open Document
| Data
|
Open Filing |
FORM DEF 14A |
Mar 29, 2024 |
May 9, 2024 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
Mar 15, 2024 |
Mar 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
Mar 15, 2024 |
Mar 15, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
Mar 11, 2024 |
Mar 11, 2024 |
|
| PRE 14A |
Open Document
| Data
|
Open Filing |
PRE 14A |
Mar 8, 2024 |
May 9, 2024 |
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
Mar 7, 2024 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
Mar 1, 2024 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
Mar 1, 2024 |
Feb 28, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
Mar 1, 2024 |
Feb 28, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
Mar 1, 2024 |
Feb 28, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
Mar 1, 2024 |
Feb 28, 2024 |
|
| 4 |
Open Document
|
Open Filing |
|
Mar 1, 2024 |
Feb 28, 2024 |
|
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Feb 29, 2024 |
Feb 28, 2024 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
Feb 29, 2024 |
Feb 29, 2024 |
|
| 3 |
Open Document
|
Open Filing |
|
Feb 28, 2024 |
Feb 28, 2024 |
|
| 3 |
Open Document
|
Open Filing |
|
Feb 28, 2024 |
Feb 28, 2024 |
|
| 10-K/A |
Open Document
| Data
|
Open Filing |
10-K/A |
Feb 28, 2024 |
Dec 31, 2023 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
|
Feb 26, 2024 |
Feb 23, 2024 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
Feb 23, 2024 |
Dec 31, 2023 |
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
Feb 23, 2024 |
|
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
Feb 13, 2024 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
Feb 9, 2024 |
|
005-60443 |
| 8-K |
Open Document
| Data
|
Open Filing |
|
Feb 7, 2024 |
Feb 7, 2024 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
Jan 19, 2024 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jan 2, 2024 |
Dec 6, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 15, 2023 |
Dec 14, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 14, 2023 |
Dec 14, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 13, 2023 |
Nov 10, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
Nov 6, 2023 |
|
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Nov 2, 2023 |
Sep 30, 2023 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Nov 1, 2023 |
Nov 1, 2023 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Oct 16, 2023 |
Oct 16, 2023 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
Sep 29, 2023 |
Sep 29, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Sep 18, 2023 |
Sep 15, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Sep 15, 2023 |
Sep 15, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
Sep 14, 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Sep 14, 2023 |
Sep 14, 2023 |
|
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
Sep 8, 2023 |
Jun 12, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Sep 7, 2023 |
Sep 7, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Sep 7, 2023 |
Sep 7, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Sep 7, 2023 |
Sep 7, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
Sep 7, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
Sep 7, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
Sep 7, 2023 |
|
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Sep 5, 2023 |
Sep 5, 2023 |
000-30941 |
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
Sep 1, 2023 |
Sep 1, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 7, 2023 |
Aug 7, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
Aug 7, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
Aug 7, 2023 |
|
000-30941 |
| S-3ASR |
Open Document
|
Open Filing |
S-3ASR |
Aug 3, 2023 |
|
333-273639 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Aug 3, 2023 |
Jun 30, 2023 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Aug 2, 2023 |
Aug 2, 2023 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jun 16, 2023 |
Jun 15, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jun 15, 2023 |
Jun 15, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jun 14, 2023 |
Jun 12, 2023 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
Jun 12, 2023 |
Jun 12, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jun 12, 2023 |
Jun 12, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jun 12, 2023 |
Jun 12, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
Jun 12, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
Jun 12, 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jun 12, 2023 |
Jun 9, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
Jun 9, 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jun 8, 2023 |
Jun 8, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
Jun 8, 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jun 7, 2023 |
Jun 7, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jun 7, 2023 |
Jun 7, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jun 7, 2023 |
Jun 7, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
Jun 7, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
Jun 7, 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jun 6, 2023 |
Jun 6, 2023 |
|
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
Jun 6, 2023 |
May 25, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 30, 2023 |
May 26, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
May 26, 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 25, 2023 |
May 25, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
May 25, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
May 25, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
May 25, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
May 25, 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 25, 2023 |
May 25, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 25, 2023 |
May 25, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 25, 2023 |
May 25, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 25, 2023 |
May 25, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
May 22, 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 19, 2023 |
May 19, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 19, 2023 |
May 17, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
May 19, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
May 18, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
May 18, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
May 18, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
May 18, 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2023 |
May 16, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2023 |
May 16, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2023 |
May 16, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2023 |
May 16, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2023 |
May 18, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2023 |
May 16, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2023 |
May 16, 2023 |
|
| SD |
Open Document
|
Open Filing |
FORM SD |
May 18, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
May 17, 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2023 |
May 15, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2023 |
May 15, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2023 |
May 15, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2023 |
May 15, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2023 |
May 15, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2023 |
May 16, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
May 16, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
May 16, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
May 16, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
May 16, 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2023 |
May 15, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2023 |
May 16, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2023 |
May 15, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2023 |
May 15, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2023 |
May 15, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2023 |
May 15, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2023 |
May 15, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2023 |
May 15, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2023 |
May 15, 2023 |
|
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
May 12, 2023 |
May 11, 2023 |
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
May 11, 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 11, 2023 |
May 11, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 11, 2023 |
May 11, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
May 11, 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 10, 2023 |
May 10, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
May 10, 2023 |
|
000-30941 |
| 144 |
Open Document
|
Open Filing |
|
May 9, 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 9, 2023 |
May 9, 2023 |
|
| 144 |
Open Document
|
Open Filing |
|
May 9, 2023 |
|
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
May 5, 2023 |
Mar 31, 2023 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
May 3, 2023 |
May 3, 2023 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Apr 18, 2023 |
Feb 24, 2023 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
Apr 10, 2023 |
|
005-60443 |
| ARS |
Open Document
|
Open Filing |
ARS |
Mar 31, 2023 |
Dec 31, 2022 |
000-30941 |
| DEF 14A |
Open Document
| Data
|
Open Filing |
FORM DEF 14A |
Mar 31, 2023 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 1, 2023 |
Feb 28, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 1, 2023 |
Feb 28, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 1, 2023 |
Feb 28, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 1, 2023 |
Feb 28, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 1, 2023 |
Feb 28, 2023 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
Feb 24, 2023 |
Dec 31, 2022 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 14, 2023 |
Feb 14, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 13, 2023 |
Feb 13, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 13, 2023 |
Feb 13, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 13, 2023 |
Feb 13, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 13, 2023 |
Feb 13, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 13, 2023 |
Feb 13, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 13, 2023 |
Feb 13, 2023 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 13, 2023 |
Feb 13, 2023 |
|
| SC 13G/A |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
Feb 10, 2023 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
Feb 9, 2023 |
|
005-60443 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Feb 8, 2023 |
Feb 8, 2023 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
Jan 26, 2023 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
|
Jan 20, 2023 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 15, 2022 |
Dec 14, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 14, 2022 |
Dec 14, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 9, 2022 |
Dec 8, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 8, 2022 |
Dec 8, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 5, 2022 |
Dec 1, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 30, 2022 |
Nov 30, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 28, 2022 |
Nov 28, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 28, 2022 |
Nov 23, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 23, 2022 |
Nov 23, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 21, 2022 |
Nov 18, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 18, 2022 |
Nov 18, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 15, 2022 |
Nov 15, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 15, 2022 |
Nov 15, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 14, 2022 |
Nov 10, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 10, 2022 |
Nov 10, 2022 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Nov 3, 2022 |
Sep 30, 2022 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Nov 2, 2022 |
Nov 2, 2022 |
000-30941 |
| SC 13G |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
Oct 27, 2022 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
PRIMECAP MANAGEMENT CO/CA/ |
Oct 7, 2022 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Sep 15, 2022 |
Sep 15, 2022 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
Sep 6, 2022 |
Sep 6, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 25, 2022 |
Aug 25, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 15, 2022 |
Aug 15, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 12, 2022 |
Aug 12, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 12, 2022 |
Aug 12, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 12, 2022 |
Aug 12, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 12, 2022 |
Aug 11, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 8, 2022 |
Aug 8, 2022 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Aug 4, 2022 |
Jun 30, 2022 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Aug 3, 2022 |
Aug 3, 2022 |
000-30941 |
| SD |
Open Document
|
Open Filing |
SD |
May 20, 2022 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2022 |
May 15, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2022 |
May 15, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2022 |
May 15, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2022 |
May 15, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2022 |
May 15, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2022 |
May 15, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2022 |
May 16, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2022 |
May 16, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2022 |
May 16, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2022 |
May 16, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2022 |
May 16, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2022 |
May 16, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2022 |
May 16, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 16, 2022 |
May 16, 2022 |
|
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
May 11, 2022 |
May 10, 2022 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
May 5, 2022 |
Mar 31, 2022 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
May 4, 2022 |
May 4, 2022 |
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
Mar 30, 2022 |
May 10, 2022 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 17, 2022 |
Mar 17, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 16, 2022 |
Mar 16, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 15, 2022 |
Mar 15, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 15, 2022 |
Mar 15, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 3, 2022 |
Mar 2, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2022 |
Feb 28, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2022 |
Feb 28, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2022 |
Feb 28, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2022 |
Feb 28, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2022 |
Feb 28, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2022 |
Feb 28, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 28, 2022 |
Feb 25, 2022 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
Feb 25, 2022 |
Dec 31, 2021 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Feb 24, 2022 |
Feb 23, 2022 |
000-30941 |
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
Feb 23, 2022 |
Feb 23, 2022 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
Feb 23, 2022 |
Feb 23, 2022 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 10, 2022 |
Feb 10, 2022 |
|
| SC 13G/A |
Open Document
|
Open Filing |
PRIMECAP MANAGEMENT CO/CA/ |
Feb 10, 2022 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
Feb 9, 2022 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
Feb 9, 2022 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SEC SCHEDULE 13G |
Feb 8, 2022 |
|
005-60443 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Feb 7, 2022 |
Feb 7, 2022 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
Jan 28, 2022 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 9, 2021 |
Dec 8, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 22, 2021 |
Nov 22, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 12, 2021 |
Nov 11, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 8, 2021 |
Nov 8, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 8, 2021 |
Nov 8, 2021 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Nov 5, 2021 |
Sep 30, 2021 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Nov 3, 2021 |
Nov 3, 2021 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Sep 15, 2021 |
Sep 15, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 31, 2021 |
Aug 31, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 30, 2021 |
Aug 30, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 30, 2021 |
Aug 30, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 27, 2021 |
Aug 27, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 27, 2021 |
Aug 26, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 27, 2021 |
Aug 26, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 25, 2021 |
Aug 25, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 16, 2021 |
Aug 13, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 9, 2021 |
Aug 9, 2021 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Aug 6, 2021 |
Jun 30, 2021 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Aug 4, 2021 |
Aug 4, 2021 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 24, 2021 |
May 24, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 21, 2021 |
May 21, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2021 |
May 15, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2021 |
May 15, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2021 |
May 15, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2021 |
May 15, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2021 |
May 15, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2021 |
May 15, 2021 |
|
| SD |
Open Document
|
Open Filing |
SD |
May 18, 2021 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2021 |
May 17, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2021 |
May 17, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2021 |
May 17, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2021 |
May 17, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2021 |
May 17, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2021 |
May 17, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2021 |
May 17, 2021 |
|
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
May 13, 2021 |
May 12, 2021 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
May 6, 2021 |
Mar 31, 2021 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
May 4, 2021 |
May 4, 2021 |
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
Mar 25, 2021 |
May 12, 2021 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 12, 2021 |
Mar 11, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 12, 2021 |
Mar 11, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 3, 2021 |
Feb 28, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2021 |
Feb 28, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2021 |
Feb 28, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2021 |
Feb 28, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2021 |
Feb 28, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2021 |
Feb 28, 2021 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
Feb 26, 2021 |
Dec 31, 2020 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 25, 2021 |
Feb 25, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 19, 2021 |
Feb 19, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 18, 2021 |
Feb 17, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 17, 2021 |
Feb 17, 2021 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 17, 2021 |
Feb 16, 2021 |
|
| SC 13G/A |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
Feb 12, 2021 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SEC SCHEDULE 13G |
Feb 12, 2021 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
Feb 12, 2021 |
|
005-60443 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Feb 10, 2021 |
Feb 10, 2021 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
Feb 10, 2021 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SEC SCHEDULE 13G |
Feb 4, 2021 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
|
Jan 26, 2021 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 1, 2020 |
Dec 1, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 24, 2020 |
Nov 24, 2020 |
|
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
Nov 18, 2020 |
Nov 17, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 17, 2020 |
Nov 17, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 17, 2020 |
Nov 16, 2020 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Nov 6, 2020 |
Sep 30, 2020 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
FORM 8-K |
Nov 5, 2020 |
Nov 5, 2020 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Aug 5, 2020 |
Jun 30, 2020 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
FORM 8-K |
Aug 4, 2020 |
Jul 31, 2020 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 29, 2020 |
May 28, 2020 |
|
| S-3ASR |
Open Document
|
Open Filing |
S-3ASR |
May 29, 2020 |
|
333-238772 |
| S-8 |
Open Document
|
Open Filing |
S-8 |
May 29, 2020 |
|
333-238770 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 28, 2020 |
May 27, 2020 |
|
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
May 28, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 26, 2020 |
May 26, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 26, 2020 |
May 26, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 22, 2020 |
May 22, 2020 |
|
| SD |
Open Document
|
Open Filing |
SD |
May 22, 2020 |
|
000-30941 |
| 8-K/A |
Open Document
|
Open Filing |
8-K/A |
May 21, 2020 |
May 19, 2020 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
FORM 8-K |
May 21, 2020 |
May 19, 2020 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 19, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 19, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 19, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 19, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 19, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 19, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 19, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2020 |
May 15, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 11, 2020 |
May 11, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 8, 2020 |
May 8, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 8, 2020 |
May 8, 2020 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
May 6, 2020 |
Mar 31, 2020 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
FROM 8-K |
May 5, 2020 |
May 5, 2020 |
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
Mar 30, 2020 |
May 19, 2020 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 4, 2020 |
Mar 4, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 3, 2020 |
Feb 28, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2020 |
Feb 28, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2020 |
Feb 28, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2020 |
Feb 28, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2020 |
Feb 28, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2020 |
Feb 28, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2020 |
Feb 28, 2020 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
Mar 2, 2020 |
Dec 31, 2019 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 20, 2020 |
Feb 19, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 13, 2020 |
Feb 12, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 13, 2020 |
Feb 13, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 12, 2020 |
Feb 11, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 12, 2020 |
Feb 11, 2020 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 12, 2020 |
Feb 11, 2020 |
|
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
Feb 12, 2020 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
Feb 12, 2020 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
Feb 12, 2020 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 10, 2020 |
Feb 10, 2020 |
|
| SC 13G/A |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
Feb 7, 2020 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
FORM 8-K |
Feb 5, 2020 |
Feb 5, 2020 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
Feb 4, 2020 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SEC SCHEDULE 13G |
Jan 27, 2020 |
|
005-60443 |
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
Dec 13, 2019 |
Dec 10, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 13, 2019 |
Dec 13, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 12, 2019 |
Dec 12, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 11, 2019 |
Dec 11, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 10, 2019 |
Dec 10, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 9, 2019 |
Dec 9, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 5, 2019 |
Dec 5, 2019 |
|
| 8-K |
Open Document
|
Open Filing |
FORM 8-K |
Dec 3, 2019 |
Dec 3, 2019 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 22, 2019 |
Nov 19, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 20, 2019 |
Nov 18, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 20, 2019 |
Nov 20, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 19, 2019 |
Nov 19, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 18, 2019 |
Nov 15, 2019 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Nov 7, 2019 |
Sep 30, 2019 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Oct 31, 2019 |
Oct 31, 2019 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Sep 24, 2019 |
Sep 24, 2019 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 21, 2019 |
Aug 21, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 15, 2019 |
Aug 15, 2019 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
Aug 15, 2019 |
Aug 14, 2019 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
Aug 15, 2019 |
Aug 14, 2019 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Aug 7, 2019 |
Jun 30, 2019 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Aug 6, 2019 |
Aug 6, 2019 |
000-30941 |
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
May 23, 2019 |
May 15, 2019 |
|
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
May 23, 2019 |
May 15, 2019 |
|
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
May 23, 2019 |
May 15, 2019 |
|
| SD |
Open Document
|
Open Filing |
SD |
May 22, 2019 |
|
000-30941 |
| S-8 |
Open Document
|
Open Filing |
S-8 |
May 21, 2019 |
|
333-231634 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2019 |
May 15, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2019 |
May 15, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2019 |
May 15, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2019 |
May 15, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2019 |
May 15, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2019 |
May 15, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2019 |
May 15, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2019 |
May 17, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2019 |
May 15, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2019 |
May 15, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2019 |
May 15, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2019 |
May 15, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2019 |
May 15, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2019 |
May 15, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2019 |
May 15, 2019 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
May 15, 2019 |
May 14, 2019 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
May 8, 2019 |
Mar 31, 2019 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
May 7, 2019 |
May 7, 2019 |
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
Mar 27, 2019 |
May 14, 2019 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 13, 2019 |
Mar 13, 2019 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
Mar 11, 2019 |
Dec 31, 2018 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 1, 2019 |
Feb 28, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 1, 2019 |
Feb 28, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 1, 2019 |
Feb 28, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 1, 2019 |
Feb 28, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 1, 2019 |
Feb 28, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 1, 2019 |
Feb 28, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 1, 2019 |
Feb 28, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 20, 2019 |
Feb 20, 2019 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 15, 2019 |
Feb 15, 2019 |
|
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
Feb 12, 2019 |
Jun 1, 2018 |
|
| SC 13G/A |
Open Document
|
Open Filing |
SEC SCHEDULE 13G |
Feb 12, 2019 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
|
Feb 11, 2019 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
Feb 8, 2019 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
Feb 8, 2019 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
Feb 8, 2019 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Feb 6, 2019 |
Feb 6, 2019 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
Jan 24, 2019 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 21, 2018 |
Nov 21, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 16, 2018 |
Nov 15, 2018 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Nov 2, 2018 |
Sep 30, 2018 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Nov 1, 2018 |
Nov 1, 2018 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Aug 3, 2018 |
Jun 30, 2018 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Aug 2, 2018 |
Aug 2, 2018 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
SEC SCHEDULE 13G |
Jul 10, 2018 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jun 1, 2018 |
Jun 1, 2018 |
|
| SD |
Open Document
|
Open Filing |
SD |
May 24, 2018 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2018 |
May 18, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2018 |
May 16, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2018 |
May 16, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2018 |
May 16, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2018 |
May 16, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2018 |
May 16, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2018 |
May 16, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2018 |
May 16, 2018 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
May 18, 2018 |
May 16, 2018 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2018 |
May 16, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2018 |
May 16, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2018 |
May 16, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2018 |
May 16, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2018 |
May 16, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2018 |
May 16, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2018 |
May 16, 2018 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
May 16, 2018 |
May 16, 2018 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
May 4, 2018 |
Mar 31, 2018 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
May 2, 2018 |
May 2, 2018 |
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
Mar 27, 2018 |
May 16, 2018 |
000-30941 |
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
Mar 14, 2018 |
Dec 31, 2017 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 14, 2018 |
Mar 14, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 14, 2018 |
Mar 14, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2018 |
Feb 28, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2018 |
Feb 28, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2018 |
Feb 28, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2018 |
Feb 28, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2018 |
Feb 28, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2018 |
Feb 28, 2018 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Mar 2, 2018 |
Feb 28, 2018 |
|
| SC 13G |
Open Document
|
Open Filing |
2017 13-G FILING |
Feb 13, 2018 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
|
Feb 12, 2018 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SCHEDULE 13G/A |
Feb 9, 2018 |
|
005-60443 |
| SC 13G |
Open Document
|
Open Filing |
|
Feb 8, 2018 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Feb 6, 2018 |
Feb 6, 2018 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
Jan 23, 2018 |
|
005-60443 |
| SC 13G |
Open Document
|
Open Filing |
SEC SCHEDULE 13G |
Jan 10, 2018 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
Jan 4, 2018 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 16, 2017 |
Nov 15, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 15, 2017 |
Nov 15, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 15, 2017 |
Nov 14, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 15, 2017 |
Nov 13, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 9, 2017 |
Nov 8, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 9, 2017 |
Nov 7, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 9, 2017 |
Nov 7, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 9, 2017 |
Nov 7, 2017 |
|
| SC 13G/A |
Open Document
|
Open Filing |
|
Nov 9, 2017 |
|
005-60443 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Nov 3, 2017 |
Sep 30, 2017 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Nov 2, 2017 |
Nov 2, 2017 |
000-30941 |
| UPLOAD |
Open Document
|
Open Filing |
|
Sep 19, 2017 |
|
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Sep 13, 2017 |
Sep 12, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Sep 13, 2017 |
Sep 12, 2017 |
|
| CORRESP |
Open Document
|
Open Filing |
|
Sep 8, 2017 |
|
|
| UPLOAD |
Open Document
|
Open Filing |
|
Sep 6, 2017 |
|
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 24, 2017 |
Aug 22, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 15, 2017 |
Aug 15, 2017 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Aug 4, 2017 |
Jun 30, 2017 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
8-K |
Aug 3, 2017 |
Aug 3, 2017 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jun 8, 2017 |
Jun 7, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jun 8, 2017 |
Jun 6, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jun 8, 2017 |
Jun 6, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 31, 2017 |
May 31, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 26, 2017 |
May 25, 2017 |
|
| S-8 |
Open Document
|
Open Filing |
S-8 |
May 25, 2017 |
|
333-218225 |
| SD |
Open Document
|
Open Filing |
SD |
May 24, 2017 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2017 |
May 18, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2017 |
May 16, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2017 |
May 17, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2017 |
May 16, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2017 |
May 16, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2017 |
May 16, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2017 |
May 16, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2017 |
May 16, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2017 |
May 17, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2017 |
May 17, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2017 |
May 16, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2017 |
May 17, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2017 |
May 17, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2017 |
May 17, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2017 |
May 17, 2017 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
May 17, 2017 |
May 16, 2017 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2017 |
May 12, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 11, 2017 |
May 9, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 11, 2017 |
May 9, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 11, 2017 |
May 10, 2017 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
May 5, 2017 |
Mar 31, 2017 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
May 4, 2017 |
May 4, 2017 |
000-30941 |
| EFFECT |
Open Document
|
Open Filing |
|
Apr 14, 2017 |
|
333-217192 |
| CORRESP |
Open Document
|
Open Filing |
|
Apr 12, 2017 |
|
|
| UPLOAD |
Open Document
|
Open Filing |
|
Apr 12, 2017 |
|
|
| S-3 |
Open Document
|
Open Filing |
S-3 |
Apr 7, 2017 |
|
333-217192 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
Mar 29, 2017 |
May 16, 2017 |
000-30941 |
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
Mar 14, 2017 |
Dec 31, 2016 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Feb 21, 2017 |
Feb 15, 2017 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 17, 2017 |
Feb 15, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 17, 2017 |
Feb 15, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 17, 2017 |
Feb 15, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 17, 2017 |
Feb 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 17, 2017 |
Feb 15, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 15, 2017 |
Feb 13, 2017 |
|
| SC 13G/A |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
Feb 13, 2017 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 9, 2017 |
Feb 7, 2017 |
|
| SC 13G |
Open Document
|
Open Filing |
13-G FILING |
Feb 9, 2017 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
Feb 9, 2017 |
|
005-60443 |
| SC 13G |
Open Document
|
Open Filing |
SCHEDULE 13G |
Feb 9, 2017 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 8, 2017 |
Feb 6, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 8, 2017 |
Feb 6, 2017 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 8, 2017 |
Feb 6, 2017 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
Feb 1, 2017 |
Feb 1, 2017 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Jan 25, 2017 |
Jan 21, 2017 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
Jan 19, 2017 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Dec 13, 2016 |
Dec 12, 2016 |
|
| SC 13G/A |
Open Document
|
Open Filing |
13G / A FILING |
Nov 23, 2016 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 16, 2016 |
Nov 15, 2016 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
Nov 15, 2016 |
Nov 10, 2016 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Nov 3, 2016 |
Sep 30, 2016 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Nov 2, 2016 |
Nov 2, 2016 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
13-G/A FILING |
Sep 30, 2016 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 10, 2016 |
Aug 8, 2016 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Aug 8, 2016 |
Jun 30, 2016 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 8, 2016 |
Aug 5, 2016 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
Aug 2, 2016 |
Aug 2, 2016 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Jul 5, 2016 |
Jun 30, 2016 |
000-30941 |
| S-8 |
Open Document
|
Open Filing |
S-8 |
May 27, 2016 |
|
333-211673 |
| SD |
Open Document
|
Open Filing |
SD |
May 27, 2016 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2016 |
May 16, 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2016 |
May 16, 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2016 |
May 16, 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2016 |
May 16, 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2016 |
May 16, 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2016 |
May 16, 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2016 |
May 16, 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2016 |
May 16, 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2016 |
May 16, 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2016 |
May 16, 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2016 |
May 16, 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2016 |
May 16, 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2016 |
May 16, 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 17, 2016 |
May 16, 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 9, 2016 |
May 9, 2016 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 6, 2016 |
May 6, 2016 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
May 5, 2016 |
May 4, 2016 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
May 5, 2016 |
Mar 31, 2016 |
000-30941 |
| 8-K |
Open Document
| Data
|
Open Filing |
8-K |
May 2, 2016 |
May 2, 2016 |
000-30941 |
| DEFA14A |
Open Document
|
Open Filing |
DEFA14A |
Apr 12, 2016 |
|
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Apr 11, 2016 |
Apr 11, 2016 |
000-30941 |
| DEFA14A |
Open Document
|
Open Filing |
DEFA14A |
Apr 11, 2016 |
|
000-30941 |
| DEFA14A |
Open Document
|
Open Filing |
DEFA14A |
Apr 4, 2016 |
|
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
Mar 14, 2016 |
Apr 4, 2016 |
000-30941 |
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
Mar 4, 2016 |
Dec 31, 2015 |
000-30941 |
| PRE 14A |
Open Document
|
Open Filing |
PRE 14A |
Feb 29, 2016 |
Apr 4, 2016 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
SENVEST MANAGEMENT, LLC |
Feb 12, 2016 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
Feb 12, 2016 |
|
005-60443 |
| SC 13G |
Open Document
|
Open Filing |
2015 13-G FILING |
Feb 10, 2016 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Feb 2, 2016 |
Feb 2, 2016 |
000-30941 |
| SC 13G/A |
Open Document
|
Open Filing |
|
Jan 25, 2016 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 16, 2015 |
Nov 16, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 10, 2015 |
Nov 10, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 10, 2015 |
Nov 9, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Nov 10, 2015 |
Nov 9, 2015 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Nov 5, 2015 |
Sep 30, 2015 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Nov 4, 2015 |
Nov 4, 2015 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 17, 2015 |
Aug 17, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 12, 2015 |
Aug 10, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Aug 12, 2015 |
Aug 10, 2015 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Aug 5, 2015 |
Jun 30, 2015 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Aug 4, 2015 |
Aug 4, 2015 |
000-30941 |
| 4/A |
Open Document
|
Open Filing |
FORM 4/A SUBMISSION |
Jul 16, 2015 |
Jul 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jul 16, 2015 |
Jul 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jul 16, 2015 |
Jul 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jul 16, 2015 |
Jul 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jul 16, 2015 |
Jul 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jul 16, 2015 |
Jul 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jul 16, 2015 |
Jul 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jul 16, 2015 |
Jul 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jul 16, 2015 |
Jul 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jul 16, 2015 |
Jul 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jul 16, 2015 |
Jul 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jul 16, 2015 |
Jul 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jul 16, 2015 |
Jul 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jul 16, 2015 |
Jul 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Jul 16, 2015 |
Jul 15, 2015 |
|
| SC 13G |
Open Document
|
Open Filing |
AXCELIS TECHNOLOGIES, INC. |
Jun 30, 2015 |
|
005-60443 |
| S-8 |
Open Document
|
Open Filing |
S-8 |
May 29, 2015 |
|
333-204544 |
| SD |
Open Document
|
Open Filing |
SD |
May 22, 2015 |
|
000-30941 |
| SC 13D/A |
Open Document
|
Open Filing |
AMENDMENT NO. 4 TO THE SCHEDULE 13D |
May 20, 2015 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2015 |
May 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2015 |
May 15, 2015 |
|
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 18, 2015 |
May 15, 2015 |
|
| SC 13D/A |
Open Document
|
Open Filing |
AMENDMENT NO. 3 TO THE SCHEDULE 13D |
May 15, 2015 |
|
005-60443 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
May 15, 2015 |
May 14, 2015 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
May 14, 2015 |
May 13, 2015 |
000-30941 |
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
May 13, 2015 |
May 13, 2015 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
May 13, 2015 |
May 13, 2015 |
|
| 3 |
Open Document
|
Open Filing |
FORM 3 SUBMISSION |
May 13, 2015 |
May 13, 2015 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
May 6, 2015 |
Mar 31, 2015 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
May 5, 2015 |
May 5, 2015 |
000-30941 |
| ARS |
Open Document
|
Open Filing |
AUTO-GENERATED PAPER DOCUMENT |
Mar 25, 2015 |
Dec 31, 2014 |
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
Mar 25, 2015 |
May 13, 2015 |
000-30941 |
| 10-K/A |
Open Document
| Data
|
Open Filing |
10-K/A |
Mar 12, 2015 |
Dec 31, 2014 |
000-30941 |
| 10-K |
Open Document
|
Open Filing |
10-K |
Mar 11, 2015 |
Dec 31, 2014 |
000-30941 |
| SC 13D/A |
Open Document
|
Open Filing |
AMENDMENT NO. 2 TO THE SCHEDULE 13D |
Mar 6, 2015 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Mar 6, 2015 |
Mar 5, 2015 |
000-30941 |
| DEFA14A |
Open Document
|
Open Filing |
8-K |
Mar 6, 2015 |
|
000-30941 |
| DFAN14A |
Open Document
|
Open Filing |
|
Mar 3, 2015 |
|
000-30941 |
| PRE 14A |
Open Document
|
Open Filing |
PRE 14A |
Mar 3, 2015 |
May 13, 2015 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FORM 4 SUBMISSION |
Feb 20, 2015 |
Feb 19, 2015 |
|
| 4 |
Open Document
|
Open Filing |
BINTZ OPTION EXERCISE FEB 2015 |
Feb 19, 2015 |
Feb 17, 2015 |
|
| 4 |
Open Document
|
Open Filing |
LAWSON FEB 2015 OPTION EXERCISE |
Feb 19, 2015 |
Feb 17, 2015 |
|
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
Feb 13, 2015 |
|
005-60443 |
| DEFA14A |
Open Document
|
Open Filing |
DEFA14A |
Feb 13, 2015 |
|
000-30941 |
| SC 13D/A |
Open Document
|
Open Filing |
AMENDMENT NO. 1 TO THE SCHEDULE 13D |
Feb 9, 2015 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Feb 5, 2015 |
Jan 30, 2015 |
000-30941 |
| SC 13G |
Open Document
|
Open Filing |
DECEMBER 31, 2014 13-G FILING |
Feb 3, 2015 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
|
Jan 30, 2015 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Jan 12, 2015 |
Jan 7, 2015 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
LAWSON NOVEMBER 2014 SALE |
Nov 19, 2014 |
Nov 18, 2014 |
|
| 4 |
Open Document
|
Open Filing |
LUNDBERG RSU GRANT NOV 2014 |
Nov 17, 2014 |
Nov 17, 2014 |
|
| 4 |
Open Document
|
Open Filing |
GEORGE RSU GRANT NOV 2014 |
Nov 17, 2014 |
Nov 17, 2014 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
Nov 14, 2014 |
Nov 13, 2014 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
FALLON NOV 2014 SALE |
Nov 12, 2014 |
Nov 10, 2014 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Nov 6, 2014 |
Sep 30, 2014 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Nov 5, 2014 |
Nov 5, 2014 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Oct 7, 2014 |
Oct 3, 2014 |
000-30941 |
| SC 13D |
Open Document
|
Open Filing |
|
Sep 16, 2014 |
|
005-60443 |
| SC 13G/A |
Open Document
|
Open Filing |
SC 13G/A |
Sep 4, 2014 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Aug 26, 2014 |
Aug 22, 2014 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Aug 21, 2014 |
Aug 20, 2014 |
000-30941 |
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
Aug 8, 2014 |
Jun 30, 2014 |
000-30941 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Aug 4, 2014 |
Aug 1, 2014 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
BINTZ 2014 OPTION GRANT |
Jul 17, 2014 |
Jul 15, 2014 |
|
| 4 |
Open Document
|
Open Filing |
BREWER 2014 OPTION GRANT |
Jul 17, 2014 |
Jul 15, 2014 |
|
| 4 |
Open Document
|
Open Filing |
FALLON 2014 OPTION GRANT |
Jul 17, 2014 |
Jul 15, 2014 |
|
| 4 |
Open Document
|
Open Filing |
PUMA 2014 OPTION GRANT |
Jul 17, 2014 |
Jul 15, 2014 |
|
| 4 |
Open Document
|
Open Filing |
ALDEBORGH 2014 OPTION GRANT |
Jul 17, 2014 |
Jul 15, 2014 |
|
| 4 |
Open Document
|
Open Filing |
LAWSON 2014 OPTION GRANT |
Jul 17, 2014 |
Jul 15, 2014 |
|
| 4 |
Open Document
|
Open Filing |
THOMPSON 2014 OPTION GRANT |
Jul 17, 2014 |
Jul 15, 2014 |
|
| 4 |
Open Document
|
Open Filing |
NETTLES 2014 OPTION GRANT |
Jul 17, 2014 |
Jul 15, 2014 |
|
| 4 |
Open Document
|
Open Filing |
KEITHLEY 2014 OPTION GRANT |
Jul 17, 2014 |
Jul 15, 2014 |
|
| 4 |
Open Document
|
Open Filing |
JENNINGS 2014 OPTION GRANT |
Jul 17, 2014 |
Jul 15, 2014 |
|
| 4 |
Open Document
|
Open Filing |
HARDIS 2014 OPTION GRANT |
Jul 17, 2014 |
Jul 15, 2014 |
|
| 4 |
Open Document
|
Open Filing |
FLETCHER 2014OPTION GRANT |
Jul 17, 2014 |
Jul 15, 2014 |
|
| 4 |
Open Document
|
Open Filing |
GEORGE 2014 STOCK OPTION GRANT |
Jul 17, 2014 |
Jul 15, 2014 |
|
| 4 |
Open Document
|
Open Filing |
LUNDBERG 2014 STOCK OPTION GRANT |
Jul 17, 2014 |
Jul 15, 2014 |
|
| 4 |
Open Document
|
Open Filing |
GEORGE MKT PURCHASE (2) MAY 2014 |
Jun 2, 2014 |
May 29, 2014 |
|
| 4 |
Open Document
|
Open Filing |
A GEORGE MARKET PURCHASE MAY 2014 |
May 29, 2014 |
May 28, 2014 |
|
| SD |
Open Document
|
Open Filing |
SD |
May 28, 2014 |
|
000-30941 |
| 4 |
Open Document
|
Open Filing |
FLETCHER MARKET PURCHASE MAY 2014 |
May 27, 2014 |
May 22, 2014 |
|
| S-8 |
Open Document
|
Open Filing |
S-8 |
May 22, 2014 |
|
333-196157 |
| 4 |
Open Document
|
Open Filing |
|
May 20, 2014 |
May 19, 2014 |
|
| 8-K |
Open Document
|
Open Filing |
8-K |
May 19, 2014 |
May 13, 2014 |
000-30941 |
| 3 |
Open Document
|
Open Filing |
|
May 14, 2014 |
May 13, 2014 |
|
| 3 |
Open Document
|
Open Filing |
|
May 14, 2014 |
May 13, 2014 |
|
| 4/A |
Open Document
|
Open Filing |
LAWSON STOCK PURCHASE MAY 2014 AMEND |
May 12, 2014 |
May 9, 2014 |
|
| 4 |
Open Document
|
Open Filing |
LAWSON STOCK PURCHASE MAY 2014 |
May 12, 2014 |
May 9, 2014 |
|
| 10-Q |
Open Document
| Data
|
Open Filing |
10-Q |
May 8, 2014 |
Mar 31, 2014 |
000-30941 |
| SC 13G |
Open Document
|
Open Filing |
SC 13G |
May 7, 2014 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
May 6, 2014 |
May 6, 2014 |
000-30941 |
| ARS |
Open Document
|
Open Filing |
AUTO-GENERATED PAPER DOCUMENT |
Apr 9, 2014 |
Dec 31, 2013 |
000-30941 |
| DEF 14A |
Open Document
|
Open Filing |
DEF 14A |
Mar 25, 2014 |
May 13, 2014 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
KEITHLEY 2013 MARKET PURCHASE |
Mar 3, 2014 |
Aug 15, 2013 |
|
| 10-K |
Open Document
| Data
|
Open Filing |
10-K |
Mar 3, 2014 |
Dec 31, 2013 |
000-30941 |
| 4 |
Open Document
|
Open Filing |
BINTZ SALE FEB 2014 |
Feb 18, 2014 |
Feb 14, 2014 |
|
| SC 13G |
Open Document
|
Open Filing |
13-G FILING |
Feb 7, 2014 |
|
005-60443 |
| 8-K |
Open Document
|
Open Filing |
8-K |
Feb 4, 2014 |
Feb 4, 2014 |
000-30941 |
| 4/A |
Open Document
|
Open Filing |
PUMA RECORD ADJUSTMENT |
Jan 29, 2014 |
Dec 17, 2013 |
|
| 4/A |
Open Document
|
Open Filing |
BREWER RECORD ADJUSTMENT |
Jan 29, 2014 |
Feb 12, 2013 |
|
| 4/A |
Open Document
|
Open Filing |
BINTZ RECORD ADJUSTMENT |
Jan 29, 2014 |
Dec 17, 2013 |
|
| SC 13G/A |
Open Document
|
Open Filing |
|
Jan 28, 2014 |
|
005-60443 |