SEC EDGAR filings, ownership reports, and insider transactions for AXCELIS TECHNOLOGIES INC.
Recent SEC filings for AXCELIS TECHNOLOGIES INC including 4, EFFECT, 424B3 and more.
| Form type | Document | Filing | Description | Filing date | Reporting date | File number(s) |
|---|---|---|---|---|---|---|
| 4 | Open 4 document | View SEC filing for 4 | 16 Jan 2026 | 15 Jan 2026 | ||
| EFFECT | Open EFFECT document | View SEC filing for EFFECT | 31 Dec 2025 | 333-292008 | ||
| 424B3 | Open 424B3 document | View SEC filing for 424B3 | 424B3 | 31 Dec 2025 | 333-292008 | |
| S-4/A | Open S-4/A document | View SEC filing for S-4/A | S-4/A | 29 Dec 2025 | 333-292008 | |
| 3 | Open 3 document | View SEC filing for 3 | 22 Dec 2025 | 19 Dec 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 18 Dec 2025 | 17 Dec 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 18 Dec 2025 | 16 Dec 2025 | ||
| 144 | Open 144 document | View SEC filing for 144 | 17 Dec 2025 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | 12 Dec 2025 | 11 Dec 2025 | ||
| 144 | Open 144 document | View SEC filing for 144 | 11 Dec 2025 | 000-30941 | ||
| S-4 | Open S-4 document | Open XBRL data | View SEC filing for S-4 | S-4 | 08 Dec 2025 | 333-292008 | |
| SCHEDULE 13G/A | Open SCHEDULE 13G/A document | View SEC filing for SCHEDULE 13G/A | 14 Nov 2025 | 005-60443 | ||
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 Nov 2025 | 30 Sep 2025 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 04 Nov 2025 | 04 Nov 2025 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 17 Oct 2025 | 16 Oct 2025 | ||
| 425 | Open 425 document | View SEC filing for 425 | 425 | 01 Oct 2025 | 000-30941 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 01 Oct 2025 | 01 Oct 2025 | 000-30941 |
| 425 | Open 425 document | View SEC filing for 425 | 425 | 01 Oct 2025 | 000-30941 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 01 Oct 2025 | 01 Oct 2025 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 17 Sep 2025 | 15 Sep 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 Sep 2025 | 15 Sep 2025 | ||
| SCHEDULE 13G | Open SCHEDULE 13G document | View SEC filing for SCHEDULE 13G | 14 Aug 2025 | 005-60443 | ||
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 Aug 2025 | 30 Jun 2025 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 05 Aug 2025 | 05 Aug 2025 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 17 Jun 2025 | 16 Jun 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 Jun 2025 | 16 Jun 2025 | ||
| S-8 | Open S-8 document | Open XBRL data | View SEC filing for S-8 | FORM S-8 | 29 May 2025 | 333-287655 | |
| 4 | Open 4 document | View SEC filing for 4 | 21 May 2025 | 20 May 2025 | ||
| 144 | Open 144 document | View SEC filing for 144 | 20 May 2025 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | 20 May 2025 | 16 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 20 May 2025 | 16 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 19 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 19 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 19 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 19 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 19 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2025 | 15 May 2025 | ||
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 08 May 2025 | 07 May 2025 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 May 2025 | 31 Mar 2025 | 000-30941 |
| SD | Open SD document | View SEC filing for SD | FORM SD | 06 May 2025 | 000-30941 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 06 May 2025 | 06 May 2025 | 000-30941 |
| SCHEDULE 13G/A | Open SCHEDULE 13G/A document | View SEC filing for SCHEDULE 13G/A | 29 Apr 2025 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | 22 Apr 2025 | 21 Apr 2025 | ||
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 21 Apr 2025 | 21 Apr 2025 | 000-30941 |
| ARS | Open ARS document | View SEC filing for ARS | ARS | 31 Mar 2025 | 31 Dec 2024 | 000-30941 |
| DEF 14A | Open DEF 14A document | Open XBRL data | View SEC filing for DEF 14A | DEF 14A | 31 Mar 2025 | 07 May 2025 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 12 Mar 2025 | 12 Mar 2025 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 04 Mar 2025 | 28 Feb 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 04 Mar 2025 | 28 Feb 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 04 Mar 2025 | 28 Feb 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 04 Mar 2025 | 28 Feb 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 04 Mar 2025 | 28 Feb 2025 | ||
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 28 Feb 2025 | 31 Dec 2024 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 10 Feb 2025 | 10 Feb 2025 | 000-30941 |
| SCHEDULE 13G/A | Open SCHEDULE 13G/A document | View SEC filing for SCHEDULE 13G/A | 30 Jan 2025 | 005-60443 | ||
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 10 Jan 2025 | 10 Jan 2025 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 07 Jan 2025 | 03 Jan 2025 | ||
| 4 | Open 4 document | View SEC filing for 4 | 16 Dec 2024 | 16 Dec 2024 | ||
| 3 | Open 3 document | View SEC filing for 3 | 12 Dec 2024 | 12 Dec 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 19 Nov 2024 | 16 Sep 2024 | ||
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 08 Nov 2024 | 005-60443 | ||
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 07 Nov 2024 | 30 Sep 2024 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 06 Nov 2024 | 06 Nov 2024 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 18 Oct 2024 | 005-60443 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 17 Oct 2024 | 16 Oct 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 Oct 2024 | 16 Oct 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 Sep 2024 | 16 Sep 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 Sep 2024 | 16 Sep 2024 | ||
| 144 | Open 144 document | View SEC filing for 144 | 29 Aug 2024 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | 06 Aug 2024 | 06 Aug 2024 | ||
| 144 | Open 144 document | View SEC filing for 144 | 06 Aug 2024 | 000-30941 | ||
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 01 Aug 2024 | 30 Jun 2024 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8K | 31 Jul 2024 | 31 Jul 2024 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 09 Jul 2024 | 09 Jul 2024 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 24 Jun 2024 | 20 Jun 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 18 Jun 2024 | 17 Jun 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 18 Jun 2024 | 17 Jun 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 05 Jun 2024 | 05 Jun 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 05 Jun 2024 | 05 Jun 2024 | ||
| 144 | Open 144 document | View SEC filing for 144 | 30 May 2024 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | 20 May 2024 | 20 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 20 May 2024 | 17 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 20 May 2024 | 17 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 20 May 2024 | 17 May 2024 | ||
| 144 | Open 144 document | View SEC filing for 144 | 20 May 2024 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 17 May 2024 | 15 May 2024 | ||
| SD | Open SD document | View SEC filing for SD | FORM SD | 17 May 2024 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | 16 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 May 2024 | 15 May 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 13 May 2024 | 09 May 2024 | ||
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 09 May 2024 | 09 May 2024 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 02 May 2024 | 31 Mar 2024 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 01 May 2024 | 01 May 2024 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 19 Apr 2024 | 18 Apr 2024 | ||
| ARS | Open ARS document | View SEC filing for ARS | ARS | 29 Mar 2024 | 31 Dec 2023 | 000-30941 |
| DEF 14A | Open DEF 14A document | Open XBRL data | View SEC filing for DEF 14A | FORM DEF 14A | 29 Mar 2024 | 09 May 2024 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 15 Mar 2024 | 15 Mar 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 15 Mar 2024 | 15 Mar 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 11 Mar 2024 | 11 Mar 2024 | ||
| PRE 14A | Open PRE 14A document | Open XBRL data | View SEC filing for PRE 14A | PRE 14A | 08 Mar 2024 | 09 May 2024 | 000-30941 |
| 144 | Open 144 document | View SEC filing for 144 | 07 Mar 2024 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 01 Mar 2024 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | 01 Mar 2024 | 28 Feb 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 01 Mar 2024 | 28 Feb 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 01 Mar 2024 | 28 Feb 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 01 Mar 2024 | 28 Feb 2024 | ||
| 4 | Open 4 document | View SEC filing for 4 | 01 Mar 2024 | 28 Feb 2024 | ||
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 29 Feb 2024 | 28 Feb 2024 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 29 Feb 2024 | 29 Feb 2024 | ||
| 3 | Open 3 document | View SEC filing for 3 | 28 Feb 2024 | 28 Feb 2024 | ||
| 3 | Open 3 document | View SEC filing for 3 | 28 Feb 2024 | 28 Feb 2024 | ||
| 10-K/A | Open 10-K/A document | Open XBRL data | View SEC filing for 10-K/A | 10-K/A | 28 Feb 2024 | 31 Dec 2023 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | 26 Feb 2024 | 23 Feb 2024 | ||
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 23 Feb 2024 | 31 Dec 2023 | 000-30941 |
| 144 | Open 144 document | View SEC filing for 144 | 23 Feb 2024 | 000-30941 | ||
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 13 Feb 2024 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 09 Feb 2024 | 005-60443 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | 07 Feb 2024 | 07 Feb 2024 | 000-30941 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 19 Jan 2024 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Jan 2024 | 06 Dec 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Dec 2023 | 14 Dec 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Dec 2023 | 14 Dec 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Nov 2023 | 10 Nov 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 06 Nov 2023 | 000-30941 | ||
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 02 Nov 2023 | 30 Sep 2023 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 01 Nov 2023 | 01 Nov 2023 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Oct 2023 | 16 Oct 2023 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 29 Sep 2023 | 29 Sep 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 Sep 2023 | 15 Sep 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Sep 2023 | 15 Sep 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 14 Sep 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Sep 2023 | 14 Sep 2023 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 08 Sep 2023 | 12 Jun 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 07 Sep 2023 | 07 Sep 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 07 Sep 2023 | 07 Sep 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 07 Sep 2023 | 07 Sep 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 07 Sep 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 07 Sep 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 07 Sep 2023 | 000-30941 | ||
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 05 Sep 2023 | 05 Sep 2023 | 000-30941 |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 01 Sep 2023 | 01 Sep 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 07 Aug 2023 | 07 Aug 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 07 Aug 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 07 Aug 2023 | 000-30941 | ||
| S-3ASR | Open S-3ASR document | View SEC filing for S-3ASR | S-3ASR | 03 Aug 2023 | 333-273639 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 03 Aug 2023 | 30 Jun 2023 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 02 Aug 2023 | 02 Aug 2023 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jun 2023 | 15 Jun 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Jun 2023 | 15 Jun 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Jun 2023 | 12 Jun 2023 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 12 Jun 2023 | 12 Jun 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Jun 2023 | 12 Jun 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Jun 2023 | 12 Jun 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 12 Jun 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 12 Jun 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Jun 2023 | 09 Jun 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 09 Jun 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Jun 2023 | 08 Jun 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 08 Jun 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 07 Jun 2023 | 07 Jun 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 07 Jun 2023 | 07 Jun 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 07 Jun 2023 | 07 Jun 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 07 Jun 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 07 Jun 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 06 Jun 2023 | 06 Jun 2023 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 06 Jun 2023 | 25 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 30 May 2023 | 26 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 26 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 May 2023 | 25 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 25 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 25 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 25 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 25 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 May 2023 | 25 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 May 2023 | 25 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 May 2023 | 25 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 May 2023 | 25 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 22 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2023 | 19 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2023 | 17 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 19 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 18 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 18 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 18 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 18 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2023 | 16 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2023 | 16 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2023 | 16 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2023 | 16 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2023 | 18 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2023 | 16 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2023 | 16 May 2023 | |
| SD | Open SD document | View SEC filing for SD | FORM SD | 18 May 2023 | 000-30941 | |
| 144 | Open 144 document | View SEC filing for 144 | 17 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 16 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 16 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 16 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 16 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 16 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 16 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2023 | 15 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2023 | 15 May 2023 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 12 May 2023 | 11 May 2023 | 000-30941 |
| 144 | Open 144 document | View SEC filing for 144 | 11 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 11 May 2023 | 11 May 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 11 May 2023 | 11 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 11 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 May 2023 | 10 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 10 May 2023 | 000-30941 | ||
| 144 | Open 144 document | View SEC filing for 144 | 09 May 2023 | 000-30941 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 May 2023 | 09 May 2023 | |
| 144 | Open 144 document | View SEC filing for 144 | 09 May 2023 | 000-30941 | ||
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 May 2023 | 31 Mar 2023 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 03 May 2023 | 03 May 2023 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 18 Apr 2023 | 24 Feb 2023 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 10 Apr 2023 | 005-60443 | |
| ARS | Open ARS document | View SEC filing for ARS | ARS | 31 Mar 2023 | 31 Dec 2022 | 000-30941 |
| DEF 14A | Open DEF 14A document | Open XBRL data | View SEC filing for DEF 14A | FORM DEF 14A | 31 Mar 2023 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2023 | 28 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2023 | 28 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2023 | 28 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2023 | 28 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2023 | 28 Feb 2023 | |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 24 Feb 2023 | 31 Dec 2022 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Feb 2023 | 14 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2023 | 13 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2023 | 13 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2023 | 13 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2023 | 13 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2023 | 13 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2023 | 13 Feb 2023 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2023 | 13 Feb 2023 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 10 Feb 2023 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 09 Feb 2023 | 005-60443 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 08 Feb 2023 | 08 Feb 2023 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 26 Jan 2023 | 005-60443 | ||
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 20 Jan 2023 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Dec 2022 | 14 Dec 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Dec 2022 | 14 Dec 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Dec 2022 | 08 Dec 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Dec 2022 | 08 Dec 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 05 Dec 2022 | 01 Dec 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 30 Nov 2022 | 30 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 28 Nov 2022 | 28 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 28 Nov 2022 | 23 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 23 Nov 2022 | 23 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 21 Nov 2022 | 18 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 Nov 2022 | 18 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Nov 2022 | 15 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Nov 2022 | 15 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Nov 2022 | 10 Nov 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Nov 2022 | 10 Nov 2022 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 03 Nov 2022 | 30 Sep 2022 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 02 Nov 2022 | 02 Nov 2022 | 000-30941 |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | AXCELIS TECHNOLOGIES, INC. | 27 Oct 2022 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | PRIMECAP MANAGEMENT CO/CA/ | 07 Oct 2022 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Sep 2022 | 15 Sep 2022 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 06 Sep 2022 | 06 Sep 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 Aug 2022 | 25 Aug 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Aug 2022 | 15 Aug 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Aug 2022 | 12 Aug 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Aug 2022 | 12 Aug 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Aug 2022 | 12 Aug 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Aug 2022 | 11 Aug 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Aug 2022 | 08 Aug 2022 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 04 Aug 2022 | 30 Jun 2022 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 03 Aug 2022 | 03 Aug 2022 | 000-30941 |
| SD | Open SD document | View SEC filing for SD | SD | 20 May 2022 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2022 | 15 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2022 | 15 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2022 | 15 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2022 | 15 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2022 | 15 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2022 | 15 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 May 2022 | 16 May 2022 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 11 May 2022 | 10 May 2022 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 May 2022 | 31 Mar 2022 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 04 May 2022 | 04 May 2022 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 30 Mar 2022 | 10 May 2022 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Mar 2022 | 17 Mar 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Mar 2022 | 16 Mar 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Mar 2022 | 15 Mar 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Mar 2022 | 15 Mar 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 03 Mar 2022 | 02 Mar 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2022 | 28 Feb 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2022 | 28 Feb 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2022 | 28 Feb 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2022 | 28 Feb 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2022 | 28 Feb 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2022 | 28 Feb 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 28 Feb 2022 | 25 Feb 2022 | |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 25 Feb 2022 | 31 Dec 2021 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 24 Feb 2022 | 23 Feb 2022 | 000-30941 |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 23 Feb 2022 | 23 Feb 2022 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 23 Feb 2022 | 23 Feb 2022 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Feb 2022 | 10 Feb 2022 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | PRIMECAP MANAGEMENT CO/CA/ | 10 Feb 2022 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 09 Feb 2022 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 09 Feb 2022 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SEC SCHEDULE 13G | 08 Feb 2022 | 005-60443 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 07 Feb 2022 | 07 Feb 2022 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 28 Jan 2022 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Dec 2021 | 08 Dec 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 22 Nov 2021 | 22 Nov 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Nov 2021 | 11 Nov 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Nov 2021 | 08 Nov 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Nov 2021 | 08 Nov 2021 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 Nov 2021 | 30 Sep 2021 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 03 Nov 2021 | 03 Nov 2021 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Sep 2021 | 15 Sep 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 31 Aug 2021 | 31 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 30 Aug 2021 | 30 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 30 Aug 2021 | 30 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 27 Aug 2021 | 27 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 27 Aug 2021 | 26 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 27 Aug 2021 | 26 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 Aug 2021 | 25 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Aug 2021 | 13 Aug 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Aug 2021 | 09 Aug 2021 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 Aug 2021 | 30 Jun 2021 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 04 Aug 2021 | 04 Aug 2021 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 24 May 2021 | 24 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 21 May 2021 | 21 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2021 | 15 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2021 | 15 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2021 | 15 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2021 | 15 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2021 | 15 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2021 | 15 May 2021 | |
| SD | Open SD document | View SEC filing for SD | SD | 18 May 2021 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2021 | 17 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2021 | 17 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2021 | 17 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2021 | 17 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2021 | 17 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2021 | 17 May 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2021 | 17 May 2021 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 13 May 2021 | 12 May 2021 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 May 2021 | 31 Mar 2021 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 04 May 2021 | 04 May 2021 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 25 Mar 2021 | 12 May 2021 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Mar 2021 | 11 Mar 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Mar 2021 | 11 Mar 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 03 Mar 2021 | 28 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2021 | 28 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2021 | 28 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2021 | 28 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2021 | 28 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2021 | 28 Feb 2021 | |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 26 Feb 2021 | 31 Dec 2020 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 25 Feb 2021 | 25 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 Feb 2021 | 19 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 Feb 2021 | 17 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Feb 2021 | 17 Feb 2021 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Feb 2021 | 16 Feb 2021 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 12 Feb 2021 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SEC SCHEDULE 13G | 12 Feb 2021 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 12 Feb 2021 | 005-60443 | |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 10 Feb 2021 | 10 Feb 2021 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 10 Feb 2021 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SEC SCHEDULE 13G | 04 Feb 2021 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 26 Jan 2021 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Dec 2020 | 01 Dec 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 24 Nov 2020 | 24 Nov 2020 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 18 Nov 2020 | 17 Nov 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Nov 2020 | 17 Nov 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Nov 2020 | 16 Nov 2020 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 Nov 2020 | 30 Sep 2020 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | FORM 8-K | 05 Nov 2020 | 05 Nov 2020 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 Aug 2020 | 30 Jun 2020 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | FORM 8-K | 04 Aug 2020 | 31 Jul 2020 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 29 May 2020 | 28 May 2020 | |
| S-3ASR | Open S-3ASR document | View SEC filing for S-3ASR | S-3ASR | 29 May 2020 | 333-238772 | |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 29 May 2020 | 333-238770 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 28 May 2020 | 27 May 2020 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 28 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 26 May 2020 | 26 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 26 May 2020 | 26 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 22 May 2020 | 22 May 2020 | |
| SD | Open SD document | View SEC filing for SD | SD | 22 May 2020 | 000-30941 | |
| 8-K/A | Open 8-K/A document | View SEC filing for 8-K/A | 8-K/A | 21 May 2020 | 19 May 2020 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | FORM 8-K | 21 May 2020 | 19 May 2020 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2020 | 15 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 11 May 2020 | 11 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 May 2020 | 08 May 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 May 2020 | 08 May 2020 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 May 2020 | 31 Mar 2020 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | FROM 8-K | 05 May 2020 | 05 May 2020 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 30 Mar 2020 | 19 May 2020 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 04 Mar 2020 | 04 Mar 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 03 Mar 2020 | 28 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2020 | 28 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2020 | 28 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2020 | 28 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2020 | 28 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2020 | 28 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2020 | 28 Feb 2020 | |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 02 Mar 2020 | 31 Dec 2019 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 20 Feb 2020 | 19 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2020 | 12 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Feb 2020 | 13 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Feb 2020 | 11 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Feb 2020 | 11 Feb 2020 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Feb 2020 | 11 Feb 2020 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 12 Feb 2020 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 12 Feb 2020 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 12 Feb 2020 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Feb 2020 | 10 Feb 2020 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 07 Feb 2020 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | FORM 8-K | 05 Feb 2020 | 05 Feb 2020 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 04 Feb 2020 | 005-60443 | ||
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SEC SCHEDULE 13G | 27 Jan 2020 | 005-60443 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 13 Dec 2019 | 10 Dec 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Dec 2019 | 13 Dec 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Dec 2019 | 12 Dec 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 11 Dec 2019 | 11 Dec 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Dec 2019 | 10 Dec 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Dec 2019 | 09 Dec 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 05 Dec 2019 | 05 Dec 2019 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | FORM 8-K | 03 Dec 2019 | 03 Dec 2019 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 22 Nov 2019 | 19 Nov 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 20 Nov 2019 | 18 Nov 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 20 Nov 2019 | 20 Nov 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 19 Nov 2019 | 19 Nov 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 Nov 2019 | 15 Nov 2019 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 07 Nov 2019 | 30 Sep 2019 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 31 Oct 2019 | 31 Oct 2019 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 24 Sep 2019 | 24 Sep 2019 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 21 Aug 2019 | 21 Aug 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Aug 2019 | 15 Aug 2019 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 15 Aug 2019 | 14 Aug 2019 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 15 Aug 2019 | 14 Aug 2019 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 07 Aug 2019 | 30 Jun 2019 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 Aug 2019 | 06 Aug 2019 | 000-30941 |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 23 May 2019 | 15 May 2019 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 23 May 2019 | 15 May 2019 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 23 May 2019 | 15 May 2019 | |
| SD | Open SD document | View SEC filing for SD | SD | 22 May 2019 | 000-30941 | |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 21 May 2019 | 333-231634 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2019 | 17 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2019 | 15 May 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2019 | 15 May 2019 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 15 May 2019 | 14 May 2019 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 08 May 2019 | 31 Mar 2019 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 07 May 2019 | 07 May 2019 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 27 Mar 2019 | 14 May 2019 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Mar 2019 | 13 Mar 2019 | |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 11 Mar 2019 | 31 Dec 2018 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2019 | 28 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2019 | 28 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2019 | 28 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2019 | 28 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2019 | 28 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2019 | 28 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Mar 2019 | 28 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 20 Feb 2019 | 20 Feb 2019 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Feb 2019 | 15 Feb 2019 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 12 Feb 2019 | 01 Jun 2018 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SEC SCHEDULE 13G | 12 Feb 2019 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 11 Feb 2019 | 005-60443 | ||
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 08 Feb 2019 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 08 Feb 2019 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 08 Feb 2019 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 Feb 2019 | 06 Feb 2019 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 24 Jan 2019 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 21 Nov 2018 | 21 Nov 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Nov 2018 | 15 Nov 2018 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 02 Nov 2018 | 30 Sep 2018 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 01 Nov 2018 | 01 Nov 2018 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 03 Aug 2018 | 30 Jun 2018 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Aug 2018 | 02 Aug 2018 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SEC SCHEDULE 13G | 10 Jul 2018 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 01 Jun 2018 | 01 Jun 2018 | |
| SD | Open SD document | View SEC filing for SD | SD | 24 May 2018 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 18 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2018 | 16 May 2018 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 18 May 2018 | 16 May 2018 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2018 | 16 May 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2018 | 16 May 2018 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 16 May 2018 | 16 May 2018 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 04 May 2018 | 31 Mar 2018 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 May 2018 | 02 May 2018 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 27 Mar 2018 | 16 May 2018 | 000-30941 |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 14 Mar 2018 | 31 Dec 2017 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Mar 2018 | 14 Mar 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 14 Mar 2018 | 14 Mar 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2018 | 28 Feb 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2018 | 28 Feb 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2018 | 28 Feb 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2018 | 28 Feb 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2018 | 28 Feb 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2018 | 28 Feb 2018 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 02 Mar 2018 | 28 Feb 2018 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 2017 13-G FILING | 13 Feb 2018 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 12 Feb 2018 | 005-60443 | ||
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHEDULE 13G/A | 09 Feb 2018 | 005-60443 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 08 Feb 2018 | 005-60443 | ||
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 Feb 2018 | 06 Feb 2018 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 23 Jan 2018 | 005-60443 | ||
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | SEC SCHEDULE 13G | 10 Jan 2018 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 04 Jan 2018 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Nov 2017 | 15 Nov 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Nov 2017 | 15 Nov 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Nov 2017 | 14 Nov 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Nov 2017 | 13 Nov 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Nov 2017 | 08 Nov 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Nov 2017 | 07 Nov 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Nov 2017 | 07 Nov 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Nov 2017 | 07 Nov 2017 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 09 Nov 2017 | 005-60443 | ||
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 03 Nov 2017 | 30 Sep 2017 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Nov 2017 | 02 Nov 2017 | 000-30941 |
| UPLOAD | Open UPLOAD document | View SEC filing for UPLOAD | 19 Sep 2017 | |||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Sep 2017 | 12 Sep 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Sep 2017 | 12 Sep 2017 | |
| CORRESP | Open CORRESP document | View SEC filing for CORRESP | 08 Sep 2017 | |||
| UPLOAD | Open UPLOAD document | View SEC filing for UPLOAD | 06 Sep 2017 | |||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 24 Aug 2017 | 22 Aug 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Aug 2017 | 15 Aug 2017 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 04 Aug 2017 | 30 Jun 2017 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | 8-K | 03 Aug 2017 | 03 Aug 2017 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Jun 2017 | 07 Jun 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Jun 2017 | 06 Jun 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Jun 2017 | 06 Jun 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 31 May 2017 | 31 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 26 May 2017 | 25 May 2017 | |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 25 May 2017 | 333-218225 | |
| SD | Open SD document | View SEC filing for SD | SD | 24 May 2017 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2017 | 18 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 16 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 17 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 16 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 16 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 16 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 16 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 16 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 17 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 17 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 16 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 17 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 17 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 17 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2017 | 17 May 2017 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 17 May 2017 | 16 May 2017 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2017 | 12 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 11 May 2017 | 09 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 11 May 2017 | 09 May 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 11 May 2017 | 10 May 2017 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 May 2017 | 31 Mar 2017 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 May 2017 | 04 May 2017 | 000-30941 |
| EFFECT | Open EFFECT document | View SEC filing for EFFECT | 14 Apr 2017 | 333-217192 | ||
| CORRESP | Open CORRESP document | View SEC filing for CORRESP | 12 Apr 2017 | |||
| UPLOAD | Open UPLOAD document | View SEC filing for UPLOAD | 12 Apr 2017 | |||
| S-3 | Open S-3 document | View SEC filing for S-3 | S-3 | 07 Apr 2017 | 333-217192 | |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 29 Mar 2017 | 16 May 2017 | 000-30941 |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 14 Mar 2017 | 31 Dec 2016 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 21 Feb 2017 | 15 Feb 2017 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Feb 2017 | 15 Feb 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Feb 2017 | 15 Feb 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Feb 2017 | 15 Feb 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Feb 2017 | 15 Feb 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Feb 2017 | 15 Feb 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 Feb 2017 | 13 Feb 2017 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES, INC. | 13 Feb 2017 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 Feb 2017 | 07 Feb 2017 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 13-G FILING | 09 Feb 2017 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 09 Feb 2017 | 005-60443 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | SCHEDULE 13G | 09 Feb 2017 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Feb 2017 | 06 Feb 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Feb 2017 | 06 Feb 2017 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Feb 2017 | 06 Feb 2017 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 01 Feb 2017 | 01 Feb 2017 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 25 Jan 2017 | 21 Jan 2017 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 19 Jan 2017 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 13 Dec 2016 | 12 Dec 2016 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 13G / A FILING | 23 Nov 2016 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Nov 2016 | 15 Nov 2016 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 15 Nov 2016 | 10 Nov 2016 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 03 Nov 2016 | 30 Sep 2016 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Nov 2016 | 02 Nov 2016 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 13-G/A FILING | 30 Sep 2016 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Aug 2016 | 08 Aug 2016 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 08 Aug 2016 | 30 Jun 2016 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 08 Aug 2016 | 05 Aug 2016 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Aug 2016 | 02 Aug 2016 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 05 Jul 2016 | 30 Jun 2016 | 000-30941 |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 27 May 2016 | 333-211673 | |
| SD | Open SD document | View SEC filing for SD | SD | 27 May 2016 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 May 2016 | 16 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 09 May 2016 | 09 May 2016 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 06 May 2016 | 06 May 2016 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 05 May 2016 | 04 May 2016 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 May 2016 | 31 Mar 2016 | 000-30941 |
| 8-K | Open 8-K document | Open XBRL data | View SEC filing for 8-K | 8-K | 02 May 2016 | 02 May 2016 | 000-30941 |
| DEFA14A | Open DEFA14A document | View SEC filing for DEFA14A | DEFA14A | 12 Apr 2016 | 000-30941 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 11 Apr 2016 | 11 Apr 2016 | 000-30941 |
| DEFA14A | Open DEFA14A document | View SEC filing for DEFA14A | DEFA14A | 11 Apr 2016 | 000-30941 | |
| DEFA14A | Open DEFA14A document | View SEC filing for DEFA14A | DEFA14A | 04 Apr 2016 | 000-30941 | |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 14 Mar 2016 | 04 Apr 2016 | 000-30941 |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 04 Mar 2016 | 31 Dec 2015 | 000-30941 |
| PRE 14A | Open PRE 14A document | View SEC filing for PRE 14A | PRE 14A | 29 Feb 2016 | 04 Apr 2016 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SENVEST MANAGEMENT, LLC | 12 Feb 2016 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 12 Feb 2016 | 005-60443 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 2015 13-G FILING | 10 Feb 2016 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Feb 2016 | 02 Feb 2016 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 25 Jan 2016 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Nov 2015 | 16 Nov 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Nov 2015 | 10 Nov 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Nov 2015 | 09 Nov 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 10 Nov 2015 | 09 Nov 2015 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 Nov 2015 | 30 Sep 2015 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 Nov 2015 | 04 Nov 2015 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 17 Aug 2015 | 17 Aug 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Aug 2015 | 10 Aug 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 12 Aug 2015 | 10 Aug 2015 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 Aug 2015 | 30 Jun 2015 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 Aug 2015 | 04 Aug 2015 | 000-30941 |
| 4/A | Open 4/A document | View SEC filing for 4/A | FORM 4/A SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 16 Jul 2015 | 15 Jul 2015 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | AXCELIS TECHNOLOGIES, INC. | 30 Jun 2015 | 005-60443 | |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 29 May 2015 | 333-204544 | |
| SD | Open SD document | View SEC filing for SD | SD | 22 May 2015 | 000-30941 | |
| SC 13D/A | Open SC 13D/A document | View SEC filing for SC 13D/A | AMENDMENT NO. 4 TO THE SCHEDULE 13D | 20 May 2015 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2015 | 15 May 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2015 | 15 May 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 18 May 2015 | 15 May 2015 | |
| SC 13D/A | Open SC 13D/A document | View SEC filing for SC 13D/A | AMENDMENT NO. 3 TO THE SCHEDULE 13D | 15 May 2015 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 15 May 2015 | 14 May 2015 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 14 May 2015 | 13 May 2015 | 000-30941 |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 13 May 2015 | 13 May 2015 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 13 May 2015 | 13 May 2015 | |
| 3 | Open 3 document | View SEC filing for 3 | FORM 3 SUBMISSION | 13 May 2015 | 13 May 2015 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 May 2015 | 31 Mar 2015 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 05 May 2015 | 05 May 2015 | 000-30941 |
| ARS | Open ARS document | View SEC filing for ARS | AUTO-GENERATED PAPER DOCUMENT | 25 Mar 2015 | 31 Dec 2014 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 25 Mar 2015 | 13 May 2015 | 000-30941 |
| 10-K/A | Open 10-K/A document | Open XBRL data | View SEC filing for 10-K/A | 10-K/A | 12 Mar 2015 | 31 Dec 2014 | 000-30941 |
| 10-K | Open 10-K document | View SEC filing for 10-K | 10-K | 11 Mar 2015 | 31 Dec 2014 | 000-30941 |
| SC 13D/A | Open SC 13D/A document | View SEC filing for SC 13D/A | AMENDMENT NO. 2 TO THE SCHEDULE 13D | 06 Mar 2015 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 Mar 2015 | 05 Mar 2015 | 000-30941 |
| DEFA14A | Open DEFA14A document | View SEC filing for DEFA14A | 8-K | 06 Mar 2015 | 000-30941 | |
| DFAN14A | Open DFAN14A document | View SEC filing for DFAN14A | 03 Mar 2015 | 000-30941 | ||
| PRE 14A | Open PRE 14A document | View SEC filing for PRE 14A | PRE 14A | 03 Mar 2015 | 13 May 2015 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FORM 4 SUBMISSION | 20 Feb 2015 | 19 Feb 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ OPTION EXERCISE FEB 2015 | 19 Feb 2015 | 17 Feb 2015 | |
| 4 | Open 4 document | View SEC filing for 4 | LAWSON FEB 2015 OPTION EXERCISE | 19 Feb 2015 | 17 Feb 2015 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 13 Feb 2015 | 005-60443 | |
| DEFA14A | Open DEFA14A document | View SEC filing for DEFA14A | DEFA14A | 13 Feb 2015 | 000-30941 | |
| SC 13D/A | Open SC 13D/A document | View SEC filing for SC 13D/A | AMENDMENT NO. 1 TO THE SCHEDULE 13D | 09 Feb 2015 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 05 Feb 2015 | 30 Jan 2015 | 000-30941 |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | DECEMBER 31, 2014 13-G FILING | 03 Feb 2015 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 30 Jan 2015 | 005-60443 | ||
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 12 Jan 2015 | 07 Jan 2015 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | LAWSON NOVEMBER 2014 SALE | 19 Nov 2014 | 18 Nov 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | LUNDBERG RSU GRANT NOV 2014 | 17 Nov 2014 | 17 Nov 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | GEORGE RSU GRANT NOV 2014 | 17 Nov 2014 | 17 Nov 2014 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 14 Nov 2014 | 13 Nov 2014 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FALLON NOV 2014 SALE | 12 Nov 2014 | 10 Nov 2014 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 Nov 2014 | 30 Sep 2014 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 05 Nov 2014 | 05 Nov 2014 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 07 Oct 2014 | 03 Oct 2014 | 000-30941 |
| SC 13D | Open SC 13D document | View SEC filing for SC 13D | 16 Sep 2014 | 005-60443 | ||
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SC 13G/A | 04 Sep 2014 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 26 Aug 2014 | 22 Aug 2014 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 21 Aug 2014 | 20 Aug 2014 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 08 Aug 2014 | 30 Jun 2014 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 Aug 2014 | 01 Aug 2014 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | ALDEBORGH 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | LAWSON 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | THOMPSON 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | NETTLES 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | KEITHLEY 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | JENNINGS 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | HARDIS 2014 OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER 2014OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | GEORGE 2014 STOCK OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | LUNDBERG 2014 STOCK OPTION GRANT | 17 Jul 2014 | 15 Jul 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | GEORGE MKT PURCHASE (2) MAY 2014 | 02 Jun 2014 | 29 May 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | A GEORGE MARKET PURCHASE MAY 2014 | 29 May 2014 | 28 May 2014 | |
| SD | Open SD document | View SEC filing for SD | SD | 28 May 2014 | 000-30941 | |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER MARKET PURCHASE MAY 2014 | 27 May 2014 | 22 May 2014 | |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 22 May 2014 | 333-196157 | |
| 4 | Open 4 document | View SEC filing for 4 | 20 May 2014 | 19 May 2014 | ||
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 19 May 2014 | 13 May 2014 | 000-30941 |
| 3 | Open 3 document | View SEC filing for 3 | 14 May 2014 | 13 May 2014 | ||
| 3 | Open 3 document | View SEC filing for 3 | 14 May 2014 | 13 May 2014 | ||
| 4/A | Open 4/A document | View SEC filing for 4/A | LAWSON STOCK PURCHASE MAY 2014 AMEND | 12 May 2014 | 09 May 2014 | |
| 4 | Open 4 document | View SEC filing for 4 | LAWSON STOCK PURCHASE MAY 2014 | 12 May 2014 | 09 May 2014 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 08 May 2014 | 31 Mar 2014 | 000-30941 |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | SC 13G | 07 May 2014 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 May 2014 | 06 May 2014 | 000-30941 |
| ARS | Open ARS document | View SEC filing for ARS | AUTO-GENERATED PAPER DOCUMENT | 09 Apr 2014 | 31 Dec 2013 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 25 Mar 2014 | 13 May 2014 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | KEITHLEY 2013 MARKET PURCHASE | 03 Mar 2014 | 15 Aug 2013 | |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 03 Mar 2014 | 31 Dec 2013 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ SALE FEB 2014 | 18 Feb 2014 | 14 Feb 2014 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 13-G FILING | 07 Feb 2014 | 005-60443 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 Feb 2014 | 04 Feb 2014 | 000-30941 |
| 4/A | Open 4/A document | View SEC filing for 4/A | PUMA RECORD ADJUSTMENT | 29 Jan 2014 | 17 Dec 2013 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | BREWER RECORD ADJUSTMENT | 29 Jan 2014 | 12 Feb 2013 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | BINTZ RECORD ADJUSTMENT | 29 Jan 2014 | 17 Dec 2013 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 28 Jan 2014 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | PUMA SALE TO COVER RSU VEST DEC 2013 | 17 Dec 2013 | 17 Dec 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ RSU SALE TO COVER DEC 2013 | 17 Dec 2013 | 17 Dec 2013 | |
| EFFECT | Open EFFECT document | View SEC filing for EFFECT | 04 Dec 2013 | 333-192533 | ||
| S-3 | Open S-3 document | View SEC filing for S-3 | S-3 | 25 Nov 2013 | 333-192533 | |
| UPLOAD | Open UPLOAD document | View SEC filing for UPLOAD | 25 Nov 2013 | |||
| CORRESP | Open CORRESP document | View SEC filing for CORRESP | 15 Nov 2013 | |||
| 3 | Open 3 document | View SEC filing for 3 | LAWSON FORM 3 | 14 Nov 2013 | 13 Nov 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON NOV 2013 SALE | 12 Nov 2013 | 11 Nov 2013 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 08 Nov 2013 | 30 Sep 2013 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 Nov 2013 | 31 Oct 2013 | 000-30941 |
| UPLOAD | Open UPLOAD document | View SEC filing for UPLOAD | 01 Nov 2013 | |||
| 4 | Open 4 document | View SEC filing for 4 | PUMA SALE TO COVER RSU VEST SEPT 2013 | 17 Sep 2013 | 17 Sep 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ RSU SALE TO COVER SEPT 2013 | 17 Sep 2013 | 17 Sep 2013 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 17 Sep 2013 | 16 Sep 2013 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | THOMPSON AUGUST 2013 MARKET PURCHASE | 13 Aug 2013 | 09 Aug 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | HARDIS 2013 MARKET PURCHASE | 13 Aug 2013 | 09 Aug 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER AUG 2013 MARKET PURCHASE | 12 Aug 2013 | 08 Aug 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | JENNINGS AUG 2013 MARKET PURCHASE | 08 Aug 2013 | 08 Aug 2013 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Aug 2013 | 30 Jul 2013 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 02 Aug 2013 | 30 Jun 2013 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 01 Aug 2013 | 01 Aug 2013 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | HARDIS 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | JENNINGS 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | KEITHLEY 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | NETTLES 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | THOMPSON 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | ALDEBORGH 2013 OPTION GRANT | 16 Jul 2013 | 15 Jul 2013 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 09 Jul 2013 | 05 Jul 2013 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 20 Jun 2013 | 20 Jun 2013 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | PUMA SALE TO COVER RSU VEST JUNE 2013 | 19 Jun 2013 | 18 Jun 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | RSU SALE TO COVER JUNE 2013 | 19 Jun 2013 | 18 Jun 2013 | |
| S-8 POS | Open S-8 POS document | View SEC filing for S-8 POS | S-8 POS | 31 May 2013 | 333-120356 | |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 31 May 2013 | 333-188967 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 16 May 2013 | 14 May 2013 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 06 May 2013 | 31 Mar 2013 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 May 2013 | 06 May 2013 | 000-30941 |
| DEFA14A | Open DEFA14A document | View SEC filing for DEFA14A | DEFA14A | 06 May 2013 | 000-30941 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 May 2013 | 02 May 2013 | 000-30941 |
| ARS | Open ARS document | View SEC filing for ARS | AUTO-GENERATED PAPER DOCUMENT | 04 Apr 2013 | 31 Dec 2012 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 26 Mar 2013 | 14 May 2013 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | RSU SALE TO COVER MARCH 2013 | 19 Mar 2013 | 18 Mar 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA SALE TO COVER RSU VEST MARCH 2013 | 19 Mar 2013 | 18 Mar 2013 | |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 01 Mar 2013 | 31 Dec 2012 | 000-30941 |
| 3 | Open 3 document | View SEC filing for 3 | ALDEBORGH FORM 3 | 13 Feb 2013 | 13 Feb 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER SALE FEB 2013 | 13 Feb 2013 | 12 Feb 2013 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 13-G FILING AS OF DECEMBER 31, 2012 | 13 Feb 2013 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 08 Feb 2013 | 005-60443 | ||
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 Feb 2013 | 04 Feb 2013 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | ZAGER RSU VEST JAN 2013 | 22 Jan 2013 | 18 Jan 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA BASE PAY RSU GRANT 2013 | 16 Jan 2013 | 15 Jan 2013 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ BASE PAY RSU 2013 | 16 Jan 2013 | 15 Jan 2013 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 18 Dec 2012 | 18 Dec 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 Dec 2012 | 03 Dec 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 30 Nov 2012 | 26 Nov 2012 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 Nov 2012 | 30 Sep 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 01 Nov 2012 | 01 Nov 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 13 Sep 2012 | 10 Sep 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 07 Sep 2012 | 04 Sep 2012 | 000-30941 |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 07 Aug 2012 | 30 Jun 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Aug 2012 | 02 Aug 2012 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | HARDIS 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | JENNINGS 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | KEITHLEY 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | NETTLES 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | THOMPSON 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | BRAUN 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | ZAGER 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ 2012 OPTION GRANT | 17 Jul 2012 | 16 Jul 2012 | |
| S-8 | Open S-8 document | View SEC filing for S-8 | S-8 | 30 May 2012 | 333-181750 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | THOMPSON PURCHASE AMEND MAY 2012 | 29 May 2012 | 24 May 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER PURCHASE MAY 2012 | 29 May 2012 | 25 May 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | JENNINGS PURCHASE MAY 2012 | 29 May 2012 | 25 May 2012 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 29 May 2012 | 29 May 2012 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | THOMPSON PURCHASE MAY 2012 | 25 May 2012 | 24 May 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON PURCHASE MAY 24 2012 | 25 May 2012 | 24 May 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ PURCHASE MAY 2012 | 24 May 2012 | 24 May 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | PURCHASE MAY 2012 | 24 May 2012 | 24 May 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | 23 May 2012 | 23 May 2012 | ||
| 4 | Open 4 document | View SEC filing for 4 | PUMA MAY 23 2012 PURCHASE | 23 May 2012 | 23 May 2012 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 04 May 2012 | 31 Mar 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 03 May 2012 | 27 Apr 2012 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 17 Apr 2012 | 17 Apr 2012 | 000-30941 |
| DEFA14A | Open DEFA14A document | View SEC filing for DEFA14A | DEFA14A | 17 Apr 2012 | 000-30941 | |
| ARS | Open ARS document | View SEC filing for ARS | AUTO-GENERATED PAPER DOCUMENT | 26 Mar 2012 | 31 Dec 2011 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 23 Mar 2012 | 02 May 2012 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FALLON 2012 RSU GRANT | 16 Mar 2012 | 15 Mar 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER 2012 RSU GRANT | 16 Mar 2012 | 15 Mar 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ 2012 RSU GRANT | 16 Mar 2012 | 15 Mar 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | ZAGER 2012 RSU GRANT | 16 Mar 2012 | 15 Mar 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | MARCH 8 2012 PURCHASE | 08 Mar 2012 | 08 Mar 2012 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 06 Mar 2012 | 05 Mar 2012 | 000-30941 |
| 10-K | Open 10-K document | Open XBRL data | View SEC filing for 10-K | 10-K | 29 Feb 2012 | 31 Dec 2011 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 24 Feb 2012 | 24 Feb 2012 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FLYNN FEB 2011 SALE | 14 Feb 2012 | 10 Feb 2012 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 14 Feb 2012 | 005-60443 | ||
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 13-G FILING AS OF DECEMBER 31, 2011 | 13 Feb 2012 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | 13 Feb 2012 | 005-60443 | ||
| 4 | Open 4 document | View SEC filing for 4 | PURCHASE FEB 2012 | 13 Feb 2012 | 10 Feb 2012 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 08 Feb 2012 | 02 Feb 2012 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES INC 13G-A 3 | 08 Feb 2012 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES INC 13G-A 3 | 08 Feb 2012 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON FEB 7 2012 SALE | 07 Feb 2012 | 07 Feb 2012 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Feb 2012 | 02 Feb 2012 | 000-30941 |
| 4/A | Open 4/A document | View SEC filing for 4/A | AMDMT ZAGER RSU VEST JAN 2012 | 19 Jan 2012 | 18 Jan 2012 | |
| 4 | Open 4 document | View SEC filing for 4 | ZAGER RSU VEST JAN 2012 | 18 Jan 2012 | 17 Jan 2012 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 03 Jan 2012 | 27 Dec 2011 | 000-30941 |
| 15-12G | Open 15-12G document | View SEC filing for 15-12G | 15-12G | 08 Nov 2011 | 000-30941 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 04 Nov 2011 | 30 Sep 2011 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 25 Oct 2011 | 25 Oct 2011 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ FORM 4 RSU VEST SEPT 2011 | 20 Sep 2011 | 17 Sep 2011 | |
| 10-Q | Open 10-Q document | Open XBRL data | View SEC filing for 10-Q | 10-Q | 05 Aug 2011 | 30 Jun 2011 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 04 Aug 2011 | 03 Aug 2011 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | KEITHLEY INITIAL OPTION GRANT | 04 Aug 2011 | 03 Aug 2011 | |
| 3 | Open 3 document | View SEC filing for 3 | KEITHLEY FORM 3 | 04 Aug 2011 | 03 Aug 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ FORM 4 RSU VEST AND STOCK OPTION GRANT JULY 15 2011 | 19 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | FLYNN FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | ZAGER FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | HARDIS FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | JENNINGS FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | NETTLES FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | THOMPSON FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | BRAUN FORM 4 OPTION GRANT JULY 2011 | 18 Jul 2011 | 15 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER FORM 4 RSU VEST JULY 2011 | 05 Jul 2011 | 01 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | FLYNN FORM 4 RSU VEST JULY 2011 | 05 Jul 2011 | 01 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON FORM 4 RSU VEST JULY 2011 | 05 Jul 2011 | 01 Jul 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA RSU VEST FORM 4 JULY 2011 | 05 Jul 2011 | 01 Jul 2011 | |
| 10-Q | Open 10-Q document | View SEC filing for 10-Q | 10-Q | 06 May 2011 | 31 Mar 2011 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 27 Apr 2011 | 25 Apr 2011 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 07 Apr 2011 | 03 Apr 2011 | 000-30941 |
| ARS | Open ARS document | View SEC filing for ARS | AUTO-GENERATED PAPER DOCUMENT | 30 Mar 2011 | 31 Dec 2010 | 000-30941 |
| DEF 14A | Open DEF 14A document | View SEC filing for DEF 14A | DEF 14A | 24 Mar 2011 | 26 Apr 2011 | 000-30941 |
| 10-K | Open 10-K document | View SEC filing for 10-K | 10-K | 14 Mar 2011 | 31 Dec 2010 | 000-30941 |
| 4 | Open 4 document | View SEC filing for 4 | FLETCHER FEB 2011 PURCHASE | 18 Feb 2011 | 17 Feb 2011 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | DOC ONE | 14 Feb 2011 | 005-60443 | |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | SCHNEIDER CAPITAL MANAGEMENT CORPORATION FORM 13G/A | 14 Feb 2011 | 005-60443 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 13G FILING DECEMBER 31, 2010 | 11 Feb 2011 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | FLYNN FEB 2011 FORM 4 | 09 Feb 2011 | 08 Feb 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | WILD PURCHASE FEB 2011 | 09 Feb 2011 | 08 Feb 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | JENNINGS PURCHASE FEB 4 2011 | 07 Feb 2011 | 04 Feb 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | HARDIS PURCHASE FEB 4 2011 | 04 Feb 2011 | 04 Feb 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | ZAGER PURCHASE FEB 4 2011 | 04 Feb 2011 | 04 Feb 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | PUMA FEB 4 PURCHASE | 04 Feb 2011 | 04 Feb 2011 | |
| 4 | Open 4 document | View SEC filing for 4 | BRAUN INITIAL OPTION GRANT | 03 Feb 2011 | 02 Feb 2011 | |
| 3 | Open 3 document | View SEC filing for 3 | BRAUN FORM 3 | 03 Feb 2011 | 02 Feb 2011 | |
| SC 13G | Open SC 13G document | View SEC filing for SC 13G | 02 Feb 2011 | 005-60443 | ||
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 02 Feb 2011 | 02 Feb 2011 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 01 Feb 2011 | 01 Feb 2011 | 000-30941 |
| SC 13G/A | Open SC 13G/A document | View SEC filing for SC 13G/A | AXCELIS TECHNOLOGIES, INC. 13G/A | 31 Jan 2011 | 005-60443 | |
| 4 | Open 4 document | View SEC filing for 4 | ZAGER INITIAL FORM 4 | 18 Jan 2011 | 18 Jan 2011 | |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 18 Jan 2011 | 15 Jan 2011 | 000-30941 |
| 3/A | Open 3/A document | View SEC filing for 3/A | ZAGER FORM 3A WITH POA | 18 Jan 2011 | 15 Jan 2011 | |
| 3 | Open 3 document | View SEC filing for 3 | 18 Jan 2011 | 15 Jan 2011 | ||
| 4 | Open 4 document | View SEC filing for 4 | BINTZ DEC 2010 SALE | 17 Dec 2010 | 16 Dec 2010 | |
| 4 | Open 4 document | View SEC filing for 4 | FLYNN SALE DECEMBER 2010 | 10 Dec 2010 | 09 Dec 2010 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER DEC SALE | 10 Dec 2010 | 09 Dec 2010 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON DEC 7 SALE | 07 Dec 2010 | 07 Dec 2010 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER NOV SALE #2 | 02 Dec 2010 | 02 Dec 2010 | |
| 4 | Open 4 document | View SEC filing for 4 | FLYNN SALE #2 NOVEMBER 2010 | 01 Dec 2010 | 30 Nov 2010 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER NOV SALE | 24 Nov 2010 | 22 Nov 2010 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON NOV 19 SALE | 22 Nov 2010 | 19 Nov 2010 | |
| 4 | Open 4 document | View SEC filing for 4 | BASSETT NOV 2010 RSU VEST | 12 Nov 2010 | 12 Nov 2010 | |
| 4/A | Open 4/A document | View SEC filing for 4/A | FALLON NOVEMBER 2010 RSU VEST (AMENDED) | 12 Nov 2010 | 12 Nov 2010 | |
| 4 | Open 4 document | View SEC filing for 4 | FLYNN NOV 2010 RSU VEST | 12 Nov 2010 | 12 Nov 2010 | |
| 4 | Open 4 document | View SEC filing for 4 | BREWER NOV 2010 RSU VEST | 12 Nov 2010 | 12 Nov 2010 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ NOV 2010 RSU VEST | 12 Nov 2010 | 11 Nov 2010 | |
| 4 | Open 4 document | View SEC filing for 4 | FLYNN SALE NOVEMBER 2010 | 09 Nov 2010 | 08 Nov 2010 | |
| 4 | Open 4 document | View SEC filing for 4 | FALLON NOVEMBER 2010 RSU VEST | 09 Nov 2010 | 12 Nov 2010 | |
| 10-Q | Open 10-Q document | View SEC filing for 10-Q | 10-Q | 05 Nov 2010 | 30 Sep 2010 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 03 Nov 2010 | 03 Nov 2010 | 000-30941 |
| 8-K | Open 8-K document | View SEC filing for 8-K | 8-K | 30 Sep 2010 | 30 Sep 2010 | 000-30941 |
| 4/A | Open 4/A document | View SEC filing for 4/A | FLYNN JULY 2010 RSU VEST CORRECTED | 20 Sep 2010 | 01 Jul 2010 | |
| 4 | Open 4 document | View SEC filing for 4 | BINTZ SEPT 17 2010 RSU VEST | 20 Sep 2010 | 17 Sep 2010 | |
| 4 | Open 4 document | View SEC filing for 4 | THOMPSON SEPT 2010 PURCHASE | 07 Sep 2010 | 07 Sep 2010 |
AXCELIS TECHNOLOGIES INC files with the SEC under CIK 0001113232. This page aggregates EDGAR filings and related ownership activity.
Industry: Special Industry Machinery, Nec.