Company Names, identifiers, and filing context for this profile. 1 identity field
Company location
Beverly, MA
SEC filing record 1 source field available
Fiscal year end
31 December
AXCELIS TECHNOLOGIES INC has filed 1,611 SEC EDGAR filings since 05 May 2000

SEC filing history

Showing 501-525 of 1,000 matching filings.

Per page
25
Current page
21
4/A

FORM 4/A SUBMISSION

Filing date
18 Nov 2020
Reporting date
17 Nov 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
17 Nov 2020
Reporting date
17 Nov 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
17 Nov 2020
Reporting date
16 Nov 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
8-K File 000-30941

FORM 8-K

Filing date
04 Aug 2020
Reporting date
31 Jul 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
29 May 2020
Reporting date
28 May 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
S-3ASR File 333-238772

S-3ASR

Filing date
29 May 2020
Reporting date
Not listed
SEC evidence
Open document Open filing
Next action
Verify source filing
S-8 File 333-238770

S-8

Filing date
29 May 2020
Reporting date
Not listed
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
28 May 2020
Reporting date
27 May 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
4/A

FORM 4/A SUBMISSION

Filing date
28 May 2020
Reporting date
15 May 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
26 May 2020
Reporting date
26 May 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
26 May 2020
Reporting date
26 May 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
22 May 2020
Reporting date
22 May 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
SD File 000-30941

SD

Filing date
22 May 2020
Reporting date
Not listed
SEC evidence
Open document Open filing
Next action
Verify source filing
8-K/A File 000-30941

8-K/A

Filing date
21 May 2020
Reporting date
19 May 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
8-K File 000-30941

FORM 8-K

Filing date
21 May 2020
Reporting date
19 May 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
19 May 2020
Reporting date
15 May 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
19 May 2020
Reporting date
15 May 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
19 May 2020
Reporting date
15 May 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
19 May 2020
Reporting date
15 May 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
19 May 2020
Reporting date
15 May 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
19 May 2020
Reporting date
15 May 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
19 May 2020
Reporting date
15 May 2020
SEC evidence
Open document Open filing
Next action
Verify source filing
We use cookies and similar technologies to provide certain features, enhance the user experience and, if you allow them, measure engagement and deliver advertising. Analytics and marketing storage stay off until you grant consent. By clicking on "Agree and continue", you declare your consent to the use of the selected optional cookies. Manage preferences to update or revoke optional consent for future visits. For more information, see our Privacy Policy .