Company Names, identifiers, and filing context for this profile. 1 identity field
Company location
Beverly, MA
SEC filing record 1 source field available
Fiscal year end
31 December
AXCELIS TECHNOLOGIES INC has filed 1,611 SEC EDGAR filings since 05 May 2000

SEC filing history

Showing 401-425 of 1,000 matching filings.

Per page
25
Current page
17
4

FORM 4 SUBMISSION

Filing date
18 May 2022
Reporting date
15 May 2022
SEC evidence
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4

FORM 4 SUBMISSION

Filing date
18 May 2022
Reporting date
15 May 2022
SEC evidence
Open document Open filing
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4

FORM 4 SUBMISSION

Filing date
18 May 2022
Reporting date
15 May 2022
SEC evidence
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4

FORM 4 SUBMISSION

Filing date
16 May 2022
Reporting date
16 May 2022
SEC evidence
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4

FORM 4 SUBMISSION

Filing date
16 May 2022
Reporting date
16 May 2022
SEC evidence
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4

FORM 4 SUBMISSION

Filing date
16 May 2022
Reporting date
16 May 2022
SEC evidence
Open document Open filing
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4

FORM 4 SUBMISSION

Filing date
16 May 2022
Reporting date
16 May 2022
SEC evidence
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4

FORM 4 SUBMISSION

Filing date
16 May 2022
Reporting date
16 May 2022
SEC evidence
Open document Open filing
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4

FORM 4 SUBMISSION

Filing date
16 May 2022
Reporting date
16 May 2022
SEC evidence
Open document Open filing
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4

FORM 4 SUBMISSION

Filing date
16 May 2022
Reporting date
16 May 2022
SEC evidence
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4

FORM 4 SUBMISSION

Filing date
16 May 2022
Reporting date
16 May 2022
SEC evidence
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DEF 14A File 000-30941

DEF 14A

Filing date
30 Mar 2022
Reporting date
10 May 2022
SEC evidence
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4

FORM 4 SUBMISSION

Filing date
17 Mar 2022
Reporting date
17 Mar 2022
SEC evidence
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4

FORM 4 SUBMISSION

Filing date
16 Mar 2022
Reporting date
16 Mar 2022
SEC evidence
Open document Open filing
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4

FORM 4 SUBMISSION

Filing date
15 Mar 2022
Reporting date
15 Mar 2022
SEC evidence
Open document Open filing
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4

FORM 4 SUBMISSION

Filing date
15 Mar 2022
Reporting date
15 Mar 2022
SEC evidence
Open document Open filing
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4

FORM 4 SUBMISSION

Filing date
03 Mar 2022
Reporting date
02 Mar 2022
SEC evidence
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4

FORM 4 SUBMISSION

Filing date
02 Mar 2022
Reporting date
28 Feb 2022
SEC evidence
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4

FORM 4 SUBMISSION

Filing date
02 Mar 2022
Reporting date
28 Feb 2022
SEC evidence
Open document Open filing
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4

FORM 4 SUBMISSION

Filing date
02 Mar 2022
Reporting date
28 Feb 2022
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
02 Mar 2022
Reporting date
28 Feb 2022
SEC evidence
Open document Open filing
Next action
Verify source filing
4

FORM 4 SUBMISSION

Filing date
02 Mar 2022
Reporting date
28 Feb 2022
SEC evidence
Open document Open filing
Next action
Verify source filing
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