Eileen J. Evans - 15 May 2026 Form 4 Insider Report for AXCELIS TECHNOLOGIES INC (ACLS)

Reporting relationship: EVP, General Counsel and Sec'y
Issuer ticker: ACLS
Reported as of: 15 May 2026
Net transaction value: $0
SEC form: 4
Accepted by SEC: 19 May 2026, 17:05:06 UTC
Prior SEC filing: 18 Dec 2025
Next SEC filing: 22 May 2026
Source filing: View source filing
Reporting owner signature: /s/ Eileen J. Evans

Key filing fact

Eileen J. Evans filed Form 4 for AXCELIS TECHNOLOGIES INC (ACLS) on 19 May 2026.

Key facts

This page summarizes Eileen J. Evans's Form 4 filing for AXCELIS TECHNOLOGIES INC (ACLS).
3 reported transactions and 0 derivative rows are listed below.
Accepted by SEC: 19 May 2026, 17:05.

Change

Previous filing in this sequence was filed on 18 Dec 2025.
Current net transaction value: $0.

Research use

This tells you what this filing adds before you inspect full transaction and derivative tables.
You can trace every row back to the original SEC filing document.

Evidence

Filed on Form 4

Ownership activity is grounded in SEC Form 4 disclosures.

View source filing

Reporting Owners (1)

CIK 0001715912 Primary reporting owner

Evans Eileen

Relationship: EVP, General Counsel and Sec'y
Address: 108 CHERRY HILL DRIVE, BEVERLY
Signature: /s/ Eileen J. Evans
Signature date: 19 May 2026

Reported non-derivative transactions

Shares, units, or other non-derivative securities reported in this filing.

ACLS transaction

Common Stock

Award

Transaction value
Shares: +3,893
Change %: +15%
Price: $0.000000^*
Shares after: 29,195
Date: 15 May 2026
Ownership: Direct
Footnotes: F1, F2

ACLS transaction

Common Stock

Award

Transaction value
Shares: +3,893
Change %: +13%
Price: $0.000000^*
Shares after: 33,088
Date: 15 May 2026
Ownership: Direct
Footnotes: F3, F4

ACLS transaction

Common Stock

Tax liability

Transaction value
Shares: -867
Change %: -2.6%
Price: $155.18^*
Shares after: 32,221
Date: 15 May 2026
Ownership: Direct
Footnotes: F5, F6, F7

^* marks a reported price that did not pass the local price check.

Additional SEC filing notes

Filing notes and footnotes

Explanation of responses 7 footnotes

Footnote F1

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to one-third of the shares granted on each of May 15, 2027, May 15, 2028, and May 15, 2029.

Footnote F2

Of the shares held following this grant on May 15, 2026, 27,723 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture. This amount includes restricted stock units earned by the reporting person upon the achievement of 112.5% of the restricted stock units granted in 2025 based upon the achievement of 2025 performance goals.

Footnote F3

These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2026. In this grant, the executive may earn shares of common stock, ranging from zero to 200% of the granted units. The shares are earned based on the achievement of performance goals based on relative total shareholder return over a performance period of January 1, 2026 to December 31, 2028. Assuming continuation of employment, 100% of the earned shares will vest on measurement of performance in 2029. Unearned restricted stock units will forfeit at such time.

Footnote F4

Of the shares held after this grant on May 15, 2026, 31,616 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.

Footnote F5

This forfeiture of shares for tax withholding purposes relates to the vesting on May 15, 2026 of service vesting restricted stock units granted to the executive in May 2025. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units.

Footnote F6

Represents the closing price of the common stock on the date of the tax withholding.

Footnote F7

Of the shares held after this vesting event on May 15, 2026, 29,823 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.