Unrecognized Tax Benefits of AXCELIS TECHNOLOGIES INC from 31 Dec 2010 to 31 Dec 2025

Taxonomy & unit
us-gaap: USD
Description
Amount of unrecognized tax benefits.
Summary
AXCELIS TECHNOLOGIES INC quarterly Unrecognized Tax Benefits in USD history and change rate from 31 Dec 2010 to 31 Dec 2025.
  • AXCELIS TECHNOLOGIES INC Unrecognized Tax Benefits for the quarter ending 31 Dec 2025 was $12,686,000, a 1.1% increase year-over-year.
Source SEC data
View on sec.gov
Unrecognized Tax Benefits, Quarterly (USD)
Unrecognized Tax Benefits, YoY Quarterly Change (%)

AXCELIS TECHNOLOGIES INC Quarterly Unrecognized Tax Benefits (USD)

Period Value YoY Chg Change % Date Report Filed Fiscal Year Fiscal Period
Q4 2025 $12,686,000 +$143,000 +1.1% 31 Dec 2025 10-K 26 Feb 2026 2025 FY
Q4 2024 $12,543,000 +$617,000 +5.2% 31 Dec 2024 10-K 26 Feb 2026 2025 FY
Q4 2023 $11,926,000 +$1,483,000 +14% 31 Dec 2023 10-K 26 Feb 2026 2025 FY
Q4 2022 $10,443,000 +$482,000 +4.8% 31 Dec 2022 10-K 26 Feb 2026 2025 FY
Q4 2021 $9,961,000 -$83,000 -0.83% 31 Dec 2021 10-K 28 Feb 2025 2024 FY
Q4 2020 $10,044,000 +$245,000 +2.5% 31 Dec 2020 10-K/A 28 Feb 2024 2023 FY
Q4 2019 $9,799,000 +$672,000 +7.4% 31 Dec 2019 10-K 24 Feb 2023 2022 FY
Q4 2018 $9,127,000 +$22,000 +0.24% 31 Dec 2018 10-K 25 Feb 2022 2021 FY
Q4 2017 $9,105,000 +$2,261,000 +33% 31 Dec 2017 10-K 26 Feb 2021 2020 FY
Q4 2016 $6,844,000 -$827,000 -11% 31 Dec 2016 10-K 02 Mar 2020 2019 FY
Q4 2015 $7,671,000 -$289,000 -3.6% 31 Dec 2015 10-K 11 Mar 2019 2018 FY
Q4 2014 $7,960,000 +$315,000 +4.1% 31 Dec 2014 10-K 14 Mar 2018 2017 FY
Q4 2013 $7,645,000 -$74,000 -0.96% 31 Dec 2013 10-K 04 Mar 2016 2015 FY
Q4 2012 $7,719,000 -$370,000 -4.6% 31 Dec 2012 10-K/A 12 Mar 2015 2014 FY
Q2 2012 $800,000 29 Jun 2012 10-K 01 Mar 2013 2012 FY
Q4 2011 $8,089,000 +$1,124,000 +16% 31 Dec 2011 10-K 03 Mar 2014 2013 FY
Q4 2010 $6,965,000 31 Dec 2010 10-K 01 Mar 2013 2012 FY
* An asterisk sign (*) next to the value indicates that the value is likely invalid.