Research and Development Expense in USD of AXCELIS TECHNOLOGIES INC from Q2 2010 to Q3 2025

Taxonomy & unit
us-gaap: USD
Description
The aggregate costs incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process whether intended for sale or the entity's use, during the reporting period charged to research and development projects, including the costs of developing computer software up to the point in time of achieving technological feasibility, and costs allocated in accounting for a business combination to in-process projects deemed to have no alternative future use.
Summary
AXCELIS TECHNOLOGIES INC quarterly/annual Research and Development Expense history and change rate from Q2 2010 to Q3 2025.
  • AXCELIS TECHNOLOGIES INC Research and Development Expense for the quarter ending 30 Sep 2025 was $24.6M, a 6.65% decline year-over-year.
  • AXCELIS TECHNOLOGIES INC Research and Development Expense for the twelve months ending 30 Sep 2025 was $106M, a 3.63% increase year-over-year.
  • AXCELIS TECHNOLOGIES INC annual Research and Development Expense for 2024 was $105M, a 8.86% increase from 2023.
  • AXCELIS TECHNOLOGIES INC annual Research and Development Expense for 2023 was $96.9M, a 23.7% increase from 2022.
  • AXCELIS TECHNOLOGIES INC annual Research and Development Expense for 2022 was $78.4M, a 19.8% increase from 2021.
Research and Development Expense, Trailing 12 Months (USD)
Research and Development Expense, Quarterly (USD)
Research and Development Expense, YoY Quarterly Change (%)
Research and Development Expense, Annual (USD)
Research and Development Expense, YoY Annual Change (%)

AXCELIS TECHNOLOGIES INC Quarterly Research and Development Expense (USD)

Period TTM Value Value YoY Chg Change % Start Date End Date Report Filed
Q3 2025 $106M $24.6M -$1.76M -6.65% 01 Jul 2025 30 Sep 2025 10-Q 06 Nov 2025
Q2 2025 $108M $27.1M +$1.28M +4.96% 01 Apr 2025 30 Jun 2025 10-Q 05 Aug 2025
Q1 2025 $107M $27.1M +$1.47M +5.71% 01 Jan 2025 31 Mar 2025 10-Q 06 May 2025
Q4 2024 $105M $27.7M +$2.74M +11% 01 Oct 2024 31 Dec 2024 10-K 28 Feb 2025
Q3 2024 $103M $26.4M +$2.3M +9.56% 01 Jul 2024 30 Sep 2024 10-Q 06 Nov 2025
Q2 2024 $100M $25.8M +$1.66M +6.86% 01 Apr 2024 30 Jun 2024 10-Q 05 Aug 2025
Q1 2024 $98.8M $25.7M +$1.89M +7.95% 01 Jan 2024 31 Mar 2024 10-Q 06 May 2025
Q4 2023 $96.9M $24.9M +$2.82M +12.8% 01 Oct 2023 31 Dec 2023 10-K 28 Feb 2025
Q3 2023 $94.1M $24.1M +$3.53M +17.2% 01 Jul 2023 30 Sep 2023 10-Q 07 Nov 2024
Q2 2023 $90.6M $24.1M +$5.4M +28.8% 01 Apr 2023 30 Jun 2023 10-Q 01 Aug 2024
Q1 2023 $85.2M $23.8M +$6.8M +40.1% 01 Jan 2023 31 Mar 2023 10-Q 02 May 2024
Q4 2022 $78.4M $22.1M +$5.67M +34.6% 01 Oct 2022 31 Dec 2022 10-K 28 Feb 2025
Q3 2022 $72.7M $20.6M +$3.86M +23.1% 01 Jul 2022 30 Sep 2022 10-Q 02 Nov 2023
Q2 2022 $68.8M $18.7M +$2.11M +12.7% 01 Apr 2022 30 Jun 2022 10-Q 03 Aug 2023
Q1 2022 $66.7M $17M +$1.29M +8.21% 01 Jan 2022 31 Mar 2022 10-Q 05 May 2023
Q4 2021 $65.4M $16.4M +$96K +0.59% 01 Oct 2021 31 Dec 2021 10-K/A 28 Feb 2024
Q3 2021 $65.3M $16.7M +$1.84M +12.4% 01 Jul 2021 30 Sep 2021 10-Q 03 Nov 2022
Q2 2021 $63.5M $16.6M +$583K +3.64% 01 Apr 2021 30 Jun 2021 10-Q 04 Aug 2022
Q1 2021 $62.9M $15.7M +$1.08M +7.39% 01 Jan 2021 31 Mar 2021 10-Q 05 May 2022
Q4 2020 $61.8M $16.3M +$2.72M +20% 01 Oct 2020 31 Dec 2020 10-K 24 Feb 2023
Q3 2020 $59.1M $14.9M +$1.94M +15% 01 Jul 2020 30 Sep 2020 10-Q 05 Nov 2021
Q2 2020 $57.2M $16M +$2.32M +16.9% 01 Apr 2020 30 Jun 2020 10-Q 06 Aug 2021
Q1 2020 $54.9M $14.6M +$921K +6.73% 01 Jan 2020 31 Mar 2020 10-Q 06 May 2021
Q4 2019 $53.9M $13.6M -$649K -4.56% 01 Oct 2019 31 Dec 2019 10-K 25 Feb 2022
Q3 2019 $54.6M $12.9M +$85K +0.66% 01 Jul 2019 30 Sep 2019 10-Q 06 Nov 2020
Q2 2019 $54.5M $13.7M +$1.17M +9.3% 01 Apr 2019 30 Jun 2019 10-Q 05 Aug 2020
Q1 2019 $53.3M $13.7M +$1.45M +11.9% 01 Jan 2019 31 Mar 2019 10-Q 06 May 2020
Q4 2018 $51.9M $14.2M +$3.33M +30.5% 01 Oct 2018 31 Dec 2018 10-K 26 Feb 2021
Q3 2018 $48.5M $12.8M +$1.84M +16.7% 01 Jul 2018 30 Sep 2018 10-Q 07 Nov 2019
Q2 2018 $46.7M $12.6M +$1.3M +11.5% 01 Apr 2018 30 Jun 2018 10-Q 07 Aug 2019
Q1 2018 $45.4M $12.2M +$2.34M +23.6% 01 Jan 2018 31 Mar 2018 10-Q 08 May 2019
Q4 2017 $43.1M $10.9M +$2.12M +24.1% 01 Oct 2017 31 Dec 2017 10-K 02 Mar 2020
Q3 2017 $40.9M $11M +$2.51M +29.6% 01 Jul 2017 30 Sep 2017 10-Q 02 Nov 2018
Q2 2017 $38.4M $11.3M +$2.78M +32.8% 01 Apr 2017 30 Jun 2017 10-Q 03 Aug 2018
Q1 2017 $35.7M $9.9M +$1.26M +14.6% 01 Jan 2017 31 Mar 2017 10-Q 04 May 2018
Q4 2016 $34.4M $8.8M +$888K +11.2% 01 Oct 2016 31 Dec 2016 10-K 11 Mar 2019
Q3 2016 $33.5M $8.49M -$88K -1.03% 01 Jul 2016 30 Sep 2016 10-Q 03 Nov 2017
Q2 2016 $33.6M $8.48M +$579K +7.33% 01 Apr 2016 30 Jun 2016 10-Q 04 Aug 2017
Q1 2016 $33M $8.64M +$437K +5.33% 01 Jan 2016 31 Mar 2016 10-Q 05 May 2017
Q4 2015 $32.6M $7.91M +$426K +5.69% 01 Oct 2015 31 Dec 2015 10-K 14 Mar 2018
Q3 2015 $32.2M $8.58M +$631K +7.94% 01 Jul 2015 30 Sep 2015 10-Q 03 Nov 2016
Q2 2015 $31.5M $7.9M -$946K -10.7% 01 Apr 2015 30 Jun 2015 10-Q 08 Aug 2016
Q1 2015 $32.5M $8.2M -$1.06M -11.4% 01 Jan 2015 31 Mar 2015 10-Q 05 May 2016
Q4 2014 $33.5M $7.48M -$1.42M -15.9% 01 Oct 2014 31 Dec 2014 10-K 14 Mar 2017
Q3 2014 $35M $7.95M -$198K -2.43% 01 Jul 2014 30 Sep 2014 10-Q 05 Nov 2015
Q2 2014 $35.1M $8.85M +$342K +4.02% 01 Apr 2014 30 Jun 2014 10-Q 05 Aug 2015
Q1 2014 $34.8M $9.26M +$51K +0.55% 01 Jan 2014 31 Mar 2014 10-Q 06 May 2015
Q4 2013 $34.8M $8.9M +$496K +5.9% 01 Oct 2013 31 Dec 2013 10-K 04 Mar 2016
Q3 2013 $34.3M $8.15M -$1.7M -17.3% 01 Jul 2013 30 Sep 2013 10-Q 06 Nov 2014
Q2 2013 $36M $8.5M -$1.98M -18.8% 01 Apr 2013 30 Jun 2013 10-Q 08 Aug 2014
Q1 2013 $37.9M $9.21M -$2.46M -21.1% 01 Jan 2013 31 Mar 2013 10-Q 08 May 2014
Q4 2012 $40.4M $8.4M -$3.74M -30.8% 01 Oct 2012 31 Dec 2012 10-K/A 12 Mar 2015
Q3 2012 $44.1M $9.85M -$1.54M -13.5% 01 Jul 2012 30 Sep 2012 10-Q 08 Nov 2013
Q2 2012 $45.7M $10.5M -$1.35M -11.4% 01 Apr 2012 30 Jun 2012 10-Q 02 Aug 2013
Q1 2012 $47M $11.7M -$149K -1.26% 01 Jan 2012 31 Mar 2012 10-Q 06 May 2013
Q4 2011 $47.2M $12.1M 01 Oct 2011 31 Dec 2011 10-K 03 Mar 2014
Q3 2011 $11.4M +$1.52M +15.4% 01 Jul 2011 30 Sep 2011 10-Q 05 Nov 2012
Q2 2011 $11.8M +$2.35M +24.8% 01 Apr 2011 30 Jun 2011 10-Q 07 Aug 2012
Q1 2011 $11.8M 01 Jan 2011 31 Mar 2011 10-Q 04 May 2012
Q3 2010 $9.87M 01 Jul 2010 30 Sep 2010 10-Q 04 Nov 2011
Q2 2010 $9.48M 01 Apr 2010 30 Jun 2010 10-Q 05 Aug 2011

AXCELIS TECHNOLOGIES INC Annual Research and Development Expense (USD)

Period Value YoY Chg Change % Start Date End Date Report Filed
2024 $105M +$8.59M +8.86% 01 Jan 2024 31 Dec 2024 10-K 28 Feb 2025
2023 $96.9M +$18.6M +23.7% 01 Jan 2023 31 Dec 2023 10-K 28 Feb 2025
2022 $78.4M +$12.9M +19.8% 01 Jan 2022 31 Dec 2022 10-K 28 Feb 2025
2021 $65.4M +$3.6M +5.82% 01 Jan 2021 31 Dec 2021 10-K/A 28 Feb 2024
2020 $61.8M +$7.9M +14.7% 01 Jan 2020 31 Dec 2020 10-K 24 Feb 2023
2019 $53.9M +$2.06M +3.96% 01 Jan 2019 31 Dec 2019 10-K 25 Feb 2022
2018 $51.9M +$8.81M +20.4% 01 Jan 2018 31 Dec 2018 10-K 26 Feb 2021
2017 $43.1M +$8.67M +25.2% 01 Jan 2017 31 Dec 2017 10-K 02 Mar 2020
2016 $34.4M +$1.82M +5.57% 01 Jan 2016 31 Dec 2016 10-K 11 Mar 2019
2015 $32.6M -$947K -2.82% 01 Jan 2015 31 Dec 2015 10-K 14 Mar 2018
2014 $33.5M -$1.22M -3.52% 01 Jan 2014 31 Dec 2014 10-K 14 Mar 2017
2013 $34.8M -$5.65M -14% 01 Jan 2013 31 Dec 2013 10-K 04 Mar 2016
2012 $40.4M -$6.78M -14.4% 01 Jan 2012 31 Dec 2012 10-K/A 12 Mar 2015
2011 $47.2M +$7.65M +19.4% 01 Jan 2011 31 Dec 2011 10-K 03 Mar 2014
2010 $39.5M 01 Jan 2010 31 Dec 2010 10-K 01 Mar 2013
* An asterisk sign (*) next to the value indicates that the value is likely invalid.