James G. Coogan - 02 Mar 2026 Form 4 Insider Report for AXCELIS TECHNOLOGIES INC (ACLS)

Reporting relationship: EVP AND CFO
Issuer ticker: ACLS
Reported as of: 02 Mar 2026
Net transaction value: -$155,844
SEC form: 4
Accepted by SEC: 03 Mar 2026, 17:05:10 UTC
Prior SEC filing: 17 Oct 2025
Next SEC filing: 05 May 2026
Source filing: View source filing
Reporting owner signature: /s/ Eileen J. Evans, Attorney-in-Fact

Key filing fact

James G. Coogan filed Form 4 for AXCELIS TECHNOLOGIES INC (ACLS) on 03 Mar 2026.

Key facts

This page summarizes James G. Coogan's Form 4 filing for AXCELIS TECHNOLOGIES INC (ACLS).
1 reported transaction and 0 derivative rows are listed below.
Accepted by SEC: 03 Mar 2026, 17:05.

Change

Previous filing in this sequence was filed on 17 Oct 2025.
Current net transaction value: -$155,844.

Research use

This tells you what this filing adds before you inspect full transaction and derivative tables.
You can trace every row back to the original SEC filing document.

Evidence

Filed on Form 4

Ownership activity is grounded in SEC Form 4 disclosures.

View source filing

Reporting Owners (1)

CIK 0001797868 Primary reporting owner

COOGAN JAMES GORDON

Relationship: EVP AND CFO
Address: C/O AXCELIS TECHNOLOGIES, INC., 108 CHERRY HILL DRIVE, BEVERLY
Signature: /s/ Eileen J. Evans, Attorney-in-Fact
Signature date: 03 Mar 2026

Reported non-derivative transactions

Shares, units, or other non-derivative securities reported in this filing.

ACLS transaction

Common Stock

Tax liability

Transaction value: $155,844
Shares: -1,800
Change %: -4.6%
Price: $86.58
Shares after: 37,144
Date: 02 Mar 2026
Ownership: Direct
Footnotes: F1, F2, F3

^* marks a reported price that did not pass the local price check.

Additional SEC filing notes

Filing notes and footnotes

Explanation of responses 3 footnotes

Footnote F1

This forfeiture of shares for tax withholding purposes relates to the vesting on February 28, 2026 of performance-based restricted stock units ("2024 PRSUs") granted to the executive in May 2024. Of the 2024 PRSUs granted, 150% were determined to be earned by the executive pursuant to a resolution of the Axcelis Technologies, Inc. Compensation Committee on February 13, 2025, with half of the earned shares vesting on February 28, 2025 and the remaining half of the earned shares vesting on February 28, 2026. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested 2024 PRSUs.

Footnote F2

Represents the closing price of the Company's common stock on March 2, 2026, the date of the tax withholding.

Footnote F3

Of the shares held after the vesting of the remaining 2024 PRSUs, 31,096 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture.