| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| COOGAN JAMES GORDON | EVP AND CFO | C/O AXCELIS TECHNOLOGIES, INC., 108 CHERRY HILL DRIVE, BEVERLY | /s/ Eileen J. Evans, Attorney-in-Fact | 17 Oct 2025 | 0001797868 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ACLS | Common Stock | Tax liability | $59,621 | -713 | -1.8% | $83.62 | 38,944 | 16 Oct 2025 | Direct | F1, F2, F3 |
| Id | Content |
|---|---|
| F1 | This forfeiture of shares for tax withholding purposes relates to the vesting on October 16, 2025 of service vesting restricted stock units granted to the executive in October 2023. The shares issued to the executive on the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units. |
| F2 | Represents the closing price of the common stock on the date of the tax withholding. |
| F3 | Of the shares held after this vesting event on October 16, 2025, 34,657 were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture. |