Robert John Mahoney - 15 Jan 2026 Form 4 Insider Report for AXCELIS TECHNOLOGIES INC (ACLS)

Role
EVP Global Operations
Signature
/s/ Eileen J. Evans, Attorney-in-Fact
Issuer symbol
ACLS
Transactions as of
15 Jan 2026
Net transactions value
$0
Form type
4
Filing time
16 Jan 2026, 17:05:05 UTC
Previous filing
22 Dec 2025
Next filing
03 Mar 2026
SEC
View on sec.gov

Reporting Owners (1)

Name Relationship Address Signature Signature date CIK
Mahoney Robert John EVP Global Operations 108 CHERRY HILL DRIVE, BEVERLY /s/ Eileen J. Evans, Attorney-in-Fact 16 Jan 2026 0002101601

Transactions Table

Type Sym Class Transaction Value $ Shares Change % * Price $ Shares After Date Ownership Footnotes
transaction ACLS Common Stock Award $0 +1,734 +13% $0.000000 15,206 15 Jan 2026 Direct F1, F2
* An asterisk sign (*) next to the price indicates that the price is likely invalid.

Explanation of Responses:

Id Content
F1 These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on January 15, 2026. Assuming continuation of employment, these restricted stock units will vest as to 25% of the shares granted on each of January 15, 2027, January 15, 2028, January 15, 2029, and January 15, 2030.
F2 Of the shares held after this grant on January 15, 2026, 11,611 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.