Robert John Mahoney - 19 Dec 2025 Form 3 Insider Report for AXCELIS TECHNOLOGIES INC (ACLS)

Role
EVP Global Operations
Signature
/s/ Eileen J. Evans, Attorney-in-Fact
Issuer symbol
ACLS
Transactions as of
19 Dec 2025
Net transactions value
$0
Form type
3
Filing time
22 Dec 2025, 17:09:43 UTC
Next filing
16 Jan 2026
SEC
View on sec.gov

Reporting Owners (1)

Name Relationship Address Signature Signature date CIK
Mahoney Robert John EVP Global Operations 108 CHERRY HILL DRIVE, BEVERLY /s/ Eileen J. Evans, Attorney-in-Fact 22 Dec 2025 0002101601

Transactions Table

Type Sym Class Transaction Value $ Shares Change % * Price $ Shares After Date Ownership Footnotes
holding ACLS Common Stock 13,472 19 Dec 2025 Direct F1
* An asterisk sign (*) next to the price indicates that the price is likely invalid.

Explanation of Responses:

Id Content
F1 Of the shares held as of December 19, 2025, 9,877 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.