| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| Blumenstock Gerald M | EVP, Research, Dev. & Eng. | C/O AXCELIS TECHNOLOGIES, INC., 108 CHERRY HILL DRIVE, BEVERLY | /s/ Eileen J. Evans, Attorney-in-Fact | 12 Dec 2025 | 0001979418 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ACLS | Common Stock | Sale | $271,422 | -3,034 | -14% | $89.46 | 18,661 | 11 Dec 2025 | Direct | F1, F2 |
| Id | Content |
|---|---|
| F1 | The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $89.39 to $89.46, inclusive. The reporting person undertakes to provide to the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price. |
| F2 | Of the shares held after this sale on December 11, 2025, 18,661 shares were issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture. |