| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| Blumenstock Gerald M | EVP, Research, Dev. & Eng. | C/O AXCELIS TECHNOLOGIES, INC., 108 CHERRY HILL DRIVE, BEVERLY | /s/ Eileen J. Evans, Attorney-in-Fact | 17 Jun 2025 | 0001979418 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ACLS | Common Stock | Tax liability | $34,894 | -506 | -2.3% | $68.96 | 21,695 | 16 Jun 2025 | Direct | F1, F2, F3 |
| Id | Content |
|---|---|
| F1 | This forfeiture of shares for tax withholding purposes relates to the vesting on June 15, 2025 of service vesting restricted stock units granted to the executive in June 2023. The shares issued to the executive following the vesting were reduced by a number of shares having a value equal to the executive's tax withholding obligation with respect to the vested restricted stock units. |
| F2 | Represents the closing price of the common stock on the date of the tax withholding. |
| F3 | Of the shares held after this vesting event on June 15, 2025, 18,661 shares are issuable on vesting of restricted stock units granted to the reporting person under the 2012 Equity Incentive Plan and are subject to forfeiture. |