| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| OH Yoon Ah | SVP, Gen Counsel & Corp Sec | C/O ONTO INNOVATION INC., 16 JONSPIN ROAD, WILMINGTON | Yoon Ah Oh | 18 Feb 2026 | 0001889970 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ONTO | Common Stock | Options Exercise | $0 | +3,084 | +17% | $0.000000 | 21,094 | 14 Feb 2026 | Direct | F1 |
| transaction | ONTO | Common Stock | Tax liability | $237,650 | -1,094 | -5.2% | $217.23 | 20,000 | 14 Feb 2026 | Direct | F2 |
| transaction | ONTO | Common Stock | Tax liability | $108,832 | -501 | -2.5% | $217.23 | 19,499 | 14 Feb 2026 | Direct | F2 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Underlying Class | Amount | Exercise Price | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ONTO | Performance Stock Unit | Options Exercise | $0 | -1,977 | -100% | $0.000000 | 0 | 14 Feb 2026 | Common Stock | 1,977 | Direct | F1 |
| Id | Content |
|---|---|
| F1 | This transaction represents the settlement of performance stock units ("PSUs") granted on February 14, 2023 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of February 14, 2026 as a result of the satisfaction of the performance criteria at 156% of the target. |
| F2 | Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person. |