Yoon Ah Oh - 01 Mar 2026 Form 4 Insider Report for ONTO INNOVATION INC. (ONTO)

Role: SVP, Gen Counsel & Corp Sec
Signature: By: Eric French For: Yoon Ah Oh
Issuer symbol: ONTO
Transactions as of: 01 Mar 2026
Net transactions value: -$123,921
Form type: 4
Filing time: 03 Mar 2026, 16:11:51 UTC
Previous filing: 18 Feb 2026
Next filing: 04 Mar 2026
SEC: View on sec.gov

Reporting Owners (1)

Name	Relationship	Address	Signature	Signature date	CIK
OH Yoon Ah	SVP, Gen Counsel & Corp Sec	C/O ONTO INNOVATION INC., 16 JONSPIN ROAD, WILMINGTON	By: Eric French For: Yoon Ah Oh	03 Mar 2026	0001889970

Transactions Table

Type	Sym	Class	Transaction	Value $	Shares	Change %	* Price $	Shares After	Date	Ownership	Footnotes
transaction	ONTO	Common Stock	Options Exercise	$0	+724	+3.7%	$0.000000	20,223	01 Mar 2026	Direct	F1
transaction	ONTO	Common Stock	Tax liability	$66,278	-307	-1.5%	$215.89	19,916	01 Mar 2026	Direct	F2
transaction	ONTO	Common Stock	Tax liability	$57,643	-267	-1.3%	$215.89	19,649	01 Mar 2026	Direct	F2

Derivative Securities (e.g., puts, calls, warrants, options, convertible securities)

Type	Sym	Class	Transaction	Value $	Shares	Change %	* Price $	Shares After	Date	Underlying Class	Amount	Exercise Price	Ownership	Footnotes
transaction	ONTO	Performance Stock Unit	Options Exercise	$0	-941	-100%	$0.000000	0	01 Mar 2026	Common Stock	941		Direct	F1

* An asterisk sign (*) next to the price indicates that the price is likely invalid.

Explanation of Responses:

Id	Content
F1	This transaction represents the settlement of performance stock units ("PSUs") granted on March 1, 2024 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of March 1, 2026 as a result of the satisfaction of the performance criteria at 77% of the target.
F2	Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person.