| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| OH Yoon Ah | SVP, Gen Counsel & Corp Sec | C/O ONTO INNOVATION INC., 16 JONSPIN ROAD, WILMINGTON | By: Mark R. Slicer For: Yoon Ah Oh | 2025-05-16 | 0001889970 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ONTO | Common Stock | Tax liability | -$59.1K | -603 | -3.24% | $98.04 | 18K | May 15, 2025 | Direct | F1 |
| Id | Content |
|---|---|
| F1 | Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person. |