Russell Low - Aug 30, 2021 Form 4 Insider Report for AXCELIS TECHNOLOGIES INC (ACLS)

Role: EVP, Engineering
Signature: Lynnette C. Fallon, as attorney in fact for Russell J. Low, Ph.D.
Stock symbol: ACLS
Transactions as of: Aug 30, 2021
Transactions value $: -$90,682
Form type: 4
Date filed: 8/30/2021, 05:03 PM
Previous filing: May 18, 2021
Next filing: Mar 2, 2022

Transactions Table

Type	Sym	Class	Transaction	Value $	Shares	Change %	* Price $	Shares After	Date	Ownership	Footnotes
transaction	ACLS	Common Stock	Options Exercise	$76.7K	+5.48K	+7.92%	$14.00^*	74.6K	Aug 30, 2021	Direct	F1
transaction	ACLS	Common Stock	Sale	-$167K	-3.31K	-4.43%	$50.63	71.3K	Aug 30, 2021	Direct	F1

Derivative Securities (e.g., puts, calls, warrants, options, convertible securities)

Type	Sym	Class	Transaction	Value $	Shares	Change %	* Price $	Shares After	Date	Underlying Class	Amount	Exercise Price	Ownership	Footnotes
transaction	ACLS	Stock option (right to buy)	Options Exercise	$0	-5.48K	-100%	$0.00^*	0	Aug 30, 2021	Common Stock	5.48K	$14.00	Direct

* An asterisk sign (*) next to the price indicates that the price is likely invalid.

Explanation of Responses:

Id	Content
F1	Of the shares beneficially owned by the executive on August 30, 2021, 40,711 shares were issuable on vesting of restricted stock units which are subject to forfeiture.