Russell Low - 15 May 2021 Form 4 Insider Report for AXCELIS TECHNOLOGIES INC (ACLS)

Role: EVP, Engineering
Signature: Lynnette C. Fallon, as attorney in fact for Russell J. Low
Issuer symbol: ACLS
Transactions as of: 15 May 2021
Net transactions value: -$185,916
Form type: 4
Filing time: 18 May 2021, 17:34:07 UTC
Next filing: 30 Aug 2021
SEC: View on sec.gov

Transactions Table

Type	Sym	Class	Transaction	Value $	Shares	Change %	* Price $	Shares After	Date	Ownership	Footnotes
transaction	ACLS	Common Stock	Tax liability	$55,790	-1,462	-2.5%	$38.16	56,251	15 May 2021	Direct	F1, F2, F3
transaction	ACLS	Common Stock	Tax liability	$53,386	-1,399	-2.5%	$38.16	54,852	15 May 2021	Direct	F1, F2, F4
transaction	ACLS	Common Stock	Tax liability	$34,420	-902	-1.6%	$38.16	53,950	16 May 2021	Direct	F1, F2, F5
transaction	ACLS	Common Stock	Tax liability	$42,319	-1,109	-2.1%	$38.16	52,841	17 May 2021	Direct	F1, F2, F6
transaction	ACLS	Common Stock	Award	$0	+8,160	+15%	$0.000000	61,001	17 May 2021	Direct	F7, F8
transaction	ACLS	Common Stock	Award	$0	+8,160	+13%	$0.000000	69,161	17 May 2021	Direct	F9, F10

* An asterisk sign (*) next to the price indicates that the price is likely invalid.

Explanation of Responses:

Id	Content
F1	These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.
F2	Represents the closing price of the common stock on the date of the tax withholding.
F3	Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2021, 32,078 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
F4	Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2021, 28,924 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
F5	Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2021, 26,891 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
F6	Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2021, 24,391 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
F7	These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 17, 2022, May 17, 2023, May 17, 2024 and May 17, 2025.
F8	Of the shares held after this first grant on May 17, 2021, 32,551 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
F9	In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2021 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2022 and February 28, 2023. Unearned restricted stock units will forfeit on February 28, 2022.
F10	Of the shares held after this second grant on May 17, 2021, 40,711 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.