| Form type | Sec Links | Description | Filing date | Reporting date |
|---|---|---|---|---|
| SC 13D/A | Report | SCHEDULE 13D/A | Sep 6, 2024 | |
| SC 13D/A | Report | SC 13D/A | Jun 20, 2024 | |
| SC 13D/A | Report | SC 13D/A | Jun 4, 2024 | |
| SC 13D/A | Report | SC 13D/A | Feb 16, 2024 | |
| SC 13D/A | Report | SC 13D/A | Jan 16, 2024 | |
| SC 13G | Report | SC 13G | Dec 18, 2023 | |
| SC 13D/A | Report | SC 13D/A | Dec 14, 2023 | |
| SC 13D/A | Report | SC 13D/A | Nov 3, 2023 | |
| SC 13G/A | Report | SC 13G/A | Feb 13, 2023 | |
| SC 13D/A | Report | SC 13D/A | Jul 18, 2022 | |
| SC 13D | Report | SCHEDULE 13D | Jul 1, 2022 | |
| SC 13D/A | Report | SC 13D/A | Jun 3, 2022 | |
| SC 13D/A | Report | SC 13D/A | Apr 5, 2022 | |
| SC 13G/A | Report | SC 13G/A | Feb 14, 2022 | |
| SC 13D/A | Report | SCHEDULE 13D/A | Feb 7, 2022 | |
| SC 13D/A | Report | SC 13D/A | Dec 21, 2021 | |
| SC 13D/A | Report | SC 13D/A | Nov 30, 2021 | |
| SC 13D/A | Report | SC 13D/A | Nov 1, 2021 | |
| SC 13D | Report | SC 13D | Sep 29, 2021 | |
| SC 13G/A | Report | SC 13G/A | Aug 27, 2021 | |
| SC 13G/A | Report | SC 13G/A | Feb 16, 2021 | |
| SC 13G | Report | SC 13G | Feb 16, 2021 | |
| SC 13G/A | Report | SC 13G/A | Feb 16, 2021 | |
| SC 13G/A | Report | SC 13G/A | Feb 16, 2021 | |
| SC 13G/A | Report | SC 13G/A | Nov 9, 2020 | |
| SC 13G/A | Report | SC 13G/A | Sep 17, 2020 | |
| SC 13D/A | Report | SC 13D/A | May 27, 2020 | |
| SC 13G/A | Report | SC 13G/A | Feb 14, 2020 | |
| SC 13G/A | Report | SC 13G/A | Feb 14, 2020 | |
| SC 13G/A | Report | SC 13G/A | Feb 14, 2020 | |
| SC 13G | Report | SC 13G | Feb 14, 2020 | |
| SC 13D/A | Report | SC 13D/A | Jun 14, 2019 | |
| SC 13G | Report | SC 13G | Apr 18, 2019 | |
| SC 13D/A | Report | SC 13D/A | Mar 6, 2019 | |
| SC 13D/A | Report | SC 13D/A | Feb 15, 2019 | |
| SC 13G/A | Report | SC 13G/A | Feb 14, 2019 | |
| SC 13G | Report | SC 13G | Jan 18, 2019 | |
| SC 13D/A | Report | SCHEDULE 13D/A | Dec 7, 2018 | |
| SC 13D/A | Report | SC 13D/A | Nov 30, 2018 | |
| SC 13D/A | Report | SC 13D/A | Sep 25, 2018 | |
| SC 13D/A | Report | SC 13D/A | Aug 14, 2018 | |
| SC 13D/A | Report | SC 13D/A | Aug 7, 2018 | |
| SC 13G | Report | SCHEDULE 13G | Jun 15, 2018 | |
| SC 13D | Report | SC 13D | Jun 11, 2018 | |
| SC 13D/A | Report | Nov 3, 2017 | ||
| SC 13D/A | Report | SC 13D/A | May 14, 2015 | |
| SC 13G/A | Report | FEBRUARY 17, 2015 | Feb 17, 2015 | |
| SC 13D/A | Report | AMENDMENT TO SCHEDULE 13D | Apr 16, 2014 | |
| SC 13G/A | Report | FEBRUARY 14, 2014 | Feb 14, 2014 | |
| SC 13D/A | Report | SCHEDULE 13D/A | Nov 18, 2013 | |
| SC 13D/A | Report | P13-1480SC13DA ZYGO CORPORATION | Jul 15, 2013 | |
| SC 13G/A | Report | FEBRUARY 14, 2013 | Feb 14, 2013 | |
| SC 13G/A | Report | FEBRUARY 14, 2013 | Feb 14, 2013 | |
| SC 13G/A | Report | FEBRUARY 14, 2013 | Feb 14, 2013 | |
| SC 13G | Report | AUGUST 14, 2012 | Aug 14, 2012 | |
| SC 13G | Report | SC 13G | May 16, 2012 | |
| SC 13G | Report | SCHEDULE 13G | Nov 14, 2011 | |
| SC 13G/A | Report | JUNE 22, 2011 | Jun 22, 2011 | |
| SC 13D/A | Report | May 31, 2011 | ||
| SC 13G/A | Report | FEBRUARY 14, 2011 | Feb 14, 2011 | |
| SC 13G/A | Report | FEBRUARY 14, 2011 | Feb 14, 2011 | |
| SC 13D/A | Report | Oct 14, 2010 | ||
| SC 13D/A | Report | Oct 6, 2010 | ||
| SC 13D/A | Report | Sep 28, 2010 | ||
| SC 13D/A | Report | Sep 20, 2010 | ||
| SC 13D/A | Report | Sep 10, 2010 | ||
| SC 13D/A | Report | Sep 1, 2010 | ||
| SC 13D/A | Report | AUGUST 27, 2010 | Aug 27, 2010 | |
| SC 13D/A | Report | Aug 10, 2010 | ||
| SC 13D/A | Report | Jul 8, 2010 | ||
| SC 13D/A | Report | Jun 29, 2010 | ||
| SC 13D/A | Report | APRIL 9, 2010 | Apr 9, 2010 | |
| SC 13G/A | Report | APRIL 1, 2010 | Apr 1, 2010 | |
| SC 13D | Report | MARCH 8, 2010 | Mar 8, 2010 | |
| SC 13G | Report | FEBRUARY 16, 2010 | Feb 16, 2010 | |
| SC 13G/A | Report | FEBRUARY 16, 2010 | Feb 16, 2010 | |
| SC 13G/A | Report | FEBRUARY 16, 2010 | Feb 16, 2010 | |
| SC 13G/A | Report | FEBRUARY 16, 2010 | Feb 16, 2010 | |
| SC 13G/A | Report | FEBRUARY 16, 2010 | Feb 16, 2010 | |
| SC 13G/A | Report | FEBRUARY 16, 2010 | Feb 16, 2010 | |
| SC 13D/A | Report | FEBRUARY 1, 2010 | Feb 1, 2010 | |
| SC 13G | Report | JANUARY 19, 2010 | Jan 20, 2010 | |
| SC 13D/A | Report | JANUARY 5, 2009 | Jan 5, 2010 |