Company Names, identifiers, and filing context for this profile. 1 identity field
Company location
Tempe, AZ
SEC filing record 1 source field available
Fiscal year end
30 September
AMTECH SYSTEMS INC has filed 967 SEC EDGAR filings since 15 May 1995

SEC filing history

Showing 1-25 of 672 matching filings.

Per page
25
Current page
1
424B5 File 333-294296

424B5

Filing date
03 Jun 2026
Reporting date
Not listed
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SCHEDULE 13D/A File 005-39482

SCHEDULE 13D/A filing

Filing date
02 Jun 2026
Reporting date
Not listed
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S-3MEF File 333-296410

S-3MEF

Filing date
01 Jun 2026
Reporting date
Not listed
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424B5 File 333-294296

424B5

Filing date
01 Jun 2026
Reporting date
Not listed
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4

OWNERSHIP DOCUMENT

Filing date
01 Jun 2026
Reporting date
28 May 2026
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4

4

Filing date
29 May 2026
Reporting date
19 May 2026
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4

4

Filing date
29 May 2026
Reporting date
14 May 2026
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3

3

Filing date
29 May 2026
Reporting date
19 May 2026
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3

3

Filing date
29 May 2026
Reporting date
14 May 2026
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SD File 000-11412

SD

Filing date
26 May 2026
Reporting date
Not listed
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3

3

Filing date
14 May 2026
Reporting date
16 Dec 2025
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EFFECT File 333-294296

EFFECT filing

Filing date
23 Mar 2026
Reporting date
Not listed
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CORRESP

CORRESP filing

Filing date
18 Mar 2026
Reporting date
Not listed
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UPLOAD File 333-294296

UPLOAD filing

Filing date
16 Mar 2026
Reporting date
Not listed
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4

4

Filing date
06 Mar 2026
Reporting date
04 Mar 2026
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4

4

Filing date
06 Mar 2026
Reporting date
04 Mar 2026
SEC evidence
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4

OWNERSHIP DOCUMENT

Filing date
06 Mar 2026
Reporting date
04 Mar 2026
SEC evidence
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4

4

Filing date
06 Mar 2026
Reporting date
04 Mar 2026
SEC evidence
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