| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| Titinger Jorge | Director | C/O AXCELIS TECHNOLOGIES, INC., 108 CHERRY HILL DRIVE, BEVERLY | /s/ Eileen J. Evans, Attorney-in-Fact | 23 Feb 2026 | 0001385162 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ACLS | Common Stock | Sale | $80,000 | -1,000 | -13% | $80.00 | 6,477 | 20 Feb 2026 | Direct | F1 |
| Id | Content |
|---|---|
| F1 | Of the shares held after this sale on February 20, 2026, 3,586 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture. |