| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| Titinger Jorge | Director | C/O AXCELIS TECHNOLOGIES, INC., 108 CHERRY HILL DRIVE, BEVERLY | /s/ Eileen J. Evans, Attorney-in-Fact | 18 Dec 2025 | 0001385162 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ACLS | Common Stock | Sale | $172,100 | -2,000 | -21% | $86.05 | 7,477 | 17 Dec 2025 | Direct | F1 |
| Id | Content |
|---|---|
| F1 | Of the shares held after this sale on December 17, 2025, 3,586 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture. |