Russell Low - 15 May 2022 Form 4 Insider Report for AXCELIS TECHNOLOGIES INC (ACLS)

Role: EVP, Engineering
Signature: Lynnette C. Fallon, as attorney in fact for Russell J. Low
Issuer symbol: ACLS
Transactions as of: 15 May 2022
Net transactions value: -$266,965
Form type: 4
Filing time: 18 May 2022, 16:59:49 UTC
Previous filing: 02 Mar 2022
Next filing: 10 Nov 2022
SEC: View on sec.gov

Transactions Table

Type	Sym	Class	Transaction	Value $	Shares	Change %	* Price $	Shares After	Date	Ownership	Footnotes
transaction	ACLS	Common Stock	Tax liability	$82,428	-1,462	-2.1%	$56.38	68,435	15 May 2022	Direct	F1, F2, F3
transaction	ACLS	Common Stock	Tax liability	$78,876	-1,399	-2%	$56.38	67,036	15 May 2022	Direct	F1, F2, F4
transaction	ACLS	Common Stock	Tax liability	$50,855	-902	-1.3%	$56.38	66,134	16 May 2022	Direct	F1, F2, F5
transaction	ACLS	Common Stock	Award	$0	+5,882	+8.9%	$0.000000	72,016	16 May 2022	Direct	F6, F7
transaction	ACLS	Common Stock	Award	$0	+5,882	+8.2%	$0.000000	77,898	16 May 2022	Direct	F8, F9
transaction	ACLS	Common Stock	Tax liability	$54,807	-905	-1.2%	$60.56	76,993	17 May 2022	Direct	F1, F2, F10

* An asterisk sign (*) next to the price indicates that the price is likely invalid.

Explanation of Responses:

Id	Content
F1	These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.
F2	Represents the closing price of the common stock on the date of the tax withholding.
F3	Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2022, 29,068 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
F4	Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2022, 25,914 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
F5	Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2022, 23,881 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
F6	These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 16, 2023, May 16, 2024, May 16, 2025 and May 16, 2026.
F7	Of the shares held after this first grant on May 16, 2022, 29,763 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
F8	In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2022 performance goals. Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2023 and February 28, 2024. Unearned restricted stock units will forfeit on February 28, 2023.
F9	Of the shares held after this second grant on May 16, 2022, 35,645 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.
F10	Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2022, 33,605 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.