| Security | Num Shares | Value | Price $ | Transaction Date | Ownership | Underlying Class | Underlying Amount |
|---|---|---|---|---|---|---|---|
| Amtech Systems, Inc. $0.01 par value common stock | 33,069 | $604,501 | $18.28 | 05 Mar 2026 | Direct | ||
| Restricted Stock Units | 2,839 | $39,193 | $4.85 | 05 Mar 2026 | Direct | Amtech Systems, Inc. $0.01 par value common stock |
| Sym | Class | Transaction | % | Value $ | * Price $ | Shares | Shares After | Date | Ownership |
|---|