| Form type | Sec Links | Description | Filing date | Reporting date |
|---|---|---|---|---|
| SC 13G | Report | Feb 14, 2024 | ||
| SC 13G/A | Report | SCHEDULE 13G/A | Feb 13, 2024 | |
| SC 13G/A | Report | SEC SCHEDULE 13G | Feb 9, 2024 | |
| SC 13G/A | Report | SCHEDULE 13G | Jan 25, 2024 | |
| SC 13G | Report | SEC SCHEDULE 13G | Feb 10, 2023 | |
| SC 13G/A | Report | SCHEDULE 13G/A | Feb 9, 2023 | |
| SC 13G/A | Report | SCHEDULE 13G/A | Jan 27, 2023 | |
| SC 13G/A | Report | Jan 23, 2023 | ||
| SC 13G/A | Report | SCHEDULE 13G/A | Mar 18, 2022 | |
| SC 13G/A | Report | SCHEDULE 13G/A | Feb 10, 2022 | |
| SC 13G/A | Report | SEC SCHEDULE 13G | Feb 8, 2022 | |
| SC 13G/A | Report | Jan 28, 2022 | ||
| SC 13G/A | Report | SEC SCHEDULE 13G | Feb 12, 2021 | |
| SC 13G/A | Report | SCHEDULE 13G/A | Feb 10, 2021 | |
| SC 13G | Report | Jan 25, 2021 | ||
| SC 13G/A | Report | Feb 14, 2020 | ||
| SC 13G | Report | SCHEDULE 13G | Feb 13, 2020 | |
| SC 13G/A | Report | SCHEDULE 13G/A | Feb 12, 2020 | |
| SC 13G | Report | SCHEDULE 13G | Feb 11, 2020 | |
| SC 13G/A | Report | Feb 4, 2020 | ||
| SC 13G/A | Report | SC 13G/A | Mar 4, 2019 | |
| SC 13G | Report | Feb 14, 2019 | ||
| SC 13G/A | Report | Feb 11, 2019 | ||
| SC 13G/A | Report | SCHEDULE 13G/A | Feb 8, 2019 | |
| SC 13G | Report | SCHEDULE 13G | Feb 6, 2019 | |
| SC 13G/A | Report | Jan 31, 2019 | ||
| SC 13G/A | Report | Feb 9, 2018 | ||
| SC 13G | Report | Feb 9, 2018 | ||
| SC 13G/A | Report | SCHEDULE 13G/A | Feb 9, 2018 | |
| SC 13G/A | Report | Jan 23, 2018 | ||
| SC 13G/A | Report | Feb 14, 2017 | ||
| SC 13G | Report | SCHEDULE 13G | Feb 9, 2017 | |
| SC 13G/A | Report | Feb 1, 2017 | ||
| SC 13G/A | Report | Jan 9, 2017 | ||
| SC 13G/A | Report | Feb 16, 2016 | ||
| SC 13G/A | Report | Jan 28, 2016 | ||
| SC 13G/A | Report | Jan 27, 2016 | ||
| SC 13G/A | Report | Jan 7, 2016 | ||
| SC 13G/A | Report | ULTRACLEAN 13G/A | Aug 6, 2015 | |
| SC 13G/A | Report | Apr 20, 2015 | ||
| SC 13G/A | Report | HARVEY_UCH13GAM2DEC2014.HTM | Feb 13, 2015 | |
| SC 13G/A | Report | ULTRA CLEAN 13G/A | Feb 4, 2015 | |
| SC 13G/A | Report | ULTRA CLEAN 13G/A | Feb 4, 2015 | |
| SC 13G/A | Report | Jan 30, 2015 | ||
| SC 13G/A | Report | Jan 29, 2015 | ||
| SC 13G/A | Report | Jan 21, 2015 |