Deferred Tax Assets, Net of Valuation Allowance of AMTECH SYSTEMS INC from 30 Sep 2021 to 30 Sep 2025

Taxonomy & unit: us-gaap: USD
Description: Amount after allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards.
Summary: AMTECH SYSTEMS INC quarterly Deferred Tax Assets, Net of Valuation Allowance in USD history and change rate from 30 Sep 2021 to 30 Sep 2025.
AMTECH SYSTEMS INC Deferred Tax Assets, Net of Valuation Allowance for the quarter ending 30 Sep 2025 was $7,078,000, a 3.4% decline year-over-year.
Source SEC data: View on sec.gov

Deferred Tax Assets, Net of Valuation Allowance, Quarterly (USD)

Deferred Tax Assets, Net of Valuation Allowance, YoY Quarterly Change (%)

AMTECH SYSTEMS INC Quarterly Deferred Tax Assets, Net of Valuation Allowance (USD)

Period	Value	YoY Chg	Change %	Date	Report	Filed	Fiscal Year	Fiscal Period
Q3 2025	$7,078,000	-$247,000	-3.4%	30 Sep 2025	10-K	10 Dec 2025	2025	FY
Q3 2024	$7,325,000	+$1,196,000	+20%	30 Sep 2024	10-K	10 Dec 2025	2025	FY
Q3 2023	$6,129,000	+$2,159,000	+54%	30 Sep 2023	10-K	12 Dec 2024	2024	FY
Q3 2022	$3,970,000	+$309,000	+8.4%	30 Sep 2022	10-K	14 Dec 2023	2023	FY
Q3 2021	$3,661,000			30 Sep 2021	10-K	30 Nov 2022	2022	FY

* An asterisk sign (*) next to the value indicates that the value is likely invalid.