Brian K. Roberts - 02 Mar 2026 Form 4 Insider Report for ONTO INNOVATION INC. (ONTO)

Reporting relationship: Chief Financial Officer
Issuer ticker: ONTO
Reported as of: 02 Mar 2026
Net transaction value: $0
SEC form: 4
Accepted by SEC: 04 Mar 2026, 16:47:22 UTC
Prior SEC filing: 03 Sep 2025
Source filing: View source filing
Reporting owner signature: By: Eric French For: Brian Roberts

Key filing fact

Brian K. Roberts filed Form 4 for ONTO INNOVATION INC. (ONTO) on 04 Mar 2026.

Key facts

This page summarizes Brian K. Roberts's Form 4 filing for ONTO INNOVATION INC. (ONTO).
3 reported transactions and 2 derivative rows are listed below.
Accepted by SEC: 04 Mar 2026, 16:47.

Change

Previous filing in this sequence was filed on 03 Sep 2025.
Current net transaction value: $0.

Research use

This tells you what this filing adds before you inspect full transaction and derivative tables.
You can trace every row back to the original SEC filing document.

Evidence

Filed on Form 4

Ownership activity is grounded in SEC Form 4 disclosures.

View source filing

Reporting Owners (1)

CIK 0001259094 Primary reporting owner

ROBERTS BRIAN K

Relationship: Chief Financial Officer
Address: C/O ONTO INNOVATION INC., 16 JONSPIN ROAD, WILMINGTON
Signature: By: Eric French For: Brian Roberts
Signature date: 04 Mar 2026

Reported non-derivative transactions

Shares, units, or other non-derivative securities reported in this filing.

ONTO transaction

Common Stock

Award

Transaction value
Shares: +3,096
Change %: +15%
Price: $0.000000^*
Shares after: 24,271
Date: 02 Mar 2026
Ownership: Direct
Footnotes: F1

Reported derivative securities

Options, warrants, convertible securities, or similar derivative positions disclosed in the filing.

ONTO transaction Derivative

Performance Stock Unit

Award

Transaction value
Shares: +1,548
Change %
Price: $0.000000^*
Shares after: 1,548
Date: 02 Mar 2026
Ownership: Direct
Underlying class: Common Stock
Underlying amount: 1,548
Exercise price
Footnotes: F2

ONTO transaction Derivative

Performance Stock Unit

Award

Transaction value
Shares: +1,548
Change %
Price: $0.000000^*
Shares after: 1,548
Date: 02 Mar 2026
Ownership: Direct
Underlying class: Common Stock
Underlying amount: 1,548
Exercise price
Footnotes: F2

^* marks a reported price that did not pass the local price check.

Additional SEC filing notes

Filing notes and footnotes

Explanation of responses 2 footnotes

Footnote F1

The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

Footnote F2

The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.