Shirley Chen - 02 Mar 2026 Form 4 Insider Report for ONTO INNOVATION INC. (ONTO)

Role: SVP Customer Success
Signature: By: Eric French For: Shirley Chen
Issuer symbol: ONTO
Transactions as of: 02 Mar 2026
Net transactions value: $0
Form type: 4
Filing time: 04 Mar 2026, 16:43:53 UTC
Previous filing: 03 Sep 2025
SEC: View on sec.gov

Reporting Owners (1)

Name	Relationship	Address	Signature	Signature date	CIK
Chen Shirley	SVP Customer Success	C/O ONTO INNOVATION INC., 16 JONSPIN ROAD, WILMINGTON	By: Eric French For: Shirley Chen	04 Mar 2026	0002074793

Transactions Table

Type	Sym	Class	Transaction	Value $	Shares	Change %	* Price $	Shares After	Date	Ownership	Footnotes
transaction	ONTO	Common Stock	Award		+2,523	+19%	$0.000000^*	15,517	02 Mar 2026	Direct	F1

Derivative Securities (e.g., puts, calls, warrants, options, convertible securities)

Type	Sym	Class	Transaction	Value $	Shares	Change %	* Price $	Shares After	Date	Underlying Class	Amount	Exercise Price	Ownership	Footnotes
transaction	ONTO	Performance Stock Unit	Award		+1,261		$0.000000^*	1,261	02 Mar 2026	Common Stock	1,261		Direct	F2
transaction	ONTO	Performance Stock Unit	Award		+1,261		$0.000000^*	1,261	02 Mar 2026	Common Stock	1,261		Direct	F2

* An asterisk sign (*) next to the price indicates that the price is likely invalid.

Explanation of Responses:

Id	Content
F1	The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.
F2	The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Content

The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.

The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.