Srinivas Vedula - Feb 10, 2022 Form 4 Insider Report for ONTO INNOVATION INC. (ONTO)

Role: Senior Vice President, Custome
Signature: By: /s/ Steven R. Roth For: Srinivas Vedula
Stock symbol: ONTO
Transactions as of: Feb 10, 2022
Transactions value $: $0
Form type: 4
Date filed: 2/14/2022, 03:37 PM
Previous filing: Nov 23, 2021
Next filing: Apr 12, 2022

Transactions Table

Type	Sym	Class	Transaction	Value $	Shares	Change %	* Price $	Shares After	Date	Ownership	Footnotes
transaction	ONTO	Common Stock	Award	$0	+1.63K	+10.22%	$0.00	17.6K	Feb 10, 2022	Direct	F1, F2

Derivative Securities (e.g., puts, calls, warrants, options, convertible securities)

Type	Sym	Class	Transaction	Value $	Shares	Change %	* Price $	Shares After	Date	Underlying Class	Amount	Exercise Price	Ownership	Footnotes
transaction	ONTO	Performance Stock Unit	Award	$0	+817		$0.00	817	Feb 10, 2022	Common Stock	817		Direct	F3
transaction	ONTO	Performance Stock Unit	Award	$0	+816		$0.00	816	Feb 10, 2022	Common Stock	816		Direct	F3

* An asterisk sign (*) next to the price indicates that the price is likely invalid.

Explanation of Responses:

Id	Content
F1	Shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.
F2	Includes 129 shares purchased on December 31, 2021 pursuant to the Issuer's Employee Stock Purchase Plan.
F3	Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.