| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| Rice Susan G. | SVP, Global Human Resources | C/O ENTEGRIS, INC., 129 CONCORD ROAD, BILLERICA | /s/ Joseph Colella, Attorney-In-Fact for Susan G. Rice | 23 Feb 2026 | 0001716139 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ENTG | Common Stock | Award | $0 | +5,018 | +7.4% | $0.000000 | 72,624 | 19 Feb 2026 | Direct | F1, F2 |
| transaction | ENTG | Common Stock | Tax liability | $195,423 | -1,473 | -2% | $132.67 | 71,151 | 19 Feb 2026 | Direct | F3 |
| transaction | ENTG | Common Stock | Tax liability | $149,784 | -1,129 | -1.6% | $132.67 | 70,022 | 19 Feb 2026 | Direct | F4 |
| Id | Content |
|---|---|
| F1 | Awarded in connection with the settlement of performance share units for the 2023-2025 performance cycle. |
| F2 | Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee. |
| F3 | Shares automatically withheld upon settlement of performance share units to satisfy tax withholding obligations. |
| F4 | Shares automatically withheld upon settlement of restricted stock units to satisfy tax withholding obligations. |