| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| Woodland Daniel D. | SVP & President, MS Division | C/O ENTEGRIS, INC., 129 CONCORD ROAD, BILLERICA | /s/ Joseph Colella, Attorney-In-Fact for Daniel D. Woodland | 20 Aug 2025 | 0001630039 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ENTG | Common Stock | Tax liability | $168,430 | -2,184 | -5.7% | $77.12 | 36,089 | 15 Aug 2025 | Direct | F1, F2, F3 |
| Id | Content |
|---|---|
| F1 | This Form 4 is being filed late due to an inadvertent administrative oversight. |
| F2 | Shares withheld following settlement of restricted stock units to satisfy tax withholding obligations. |
| F3 | These shares include 121.61 shares acquired under the Entegris, Inc. Employee Stock Purchase Plan on June 30, 2025. |