| Form type | Document | Filing | Description | Filing date | Reporting date | File number(s) |
|---|---|---|---|---|---|---|
| DEFM14A | Open Document | Open Filing | DEFM14A | 31 Dec 2025 | 000-16244 | |
| 4 | Open Document | Open Filing | 12 Dec 2025 | 10 Dec 2025 | ||
| 144 | Open Document | Open Filing | 10 Dec 2025 | 000-16244 | ||
| 4 | Open Document | Open Filing | 05 Dec 2025 | 05 Dec 2025 | ||
| 144 | Open Document | Open Filing | 05 Dec 2025 | 000-16244 | ||
| 4 | Open Document | Open Filing | 02 Dec 2025 | 02 Dec 2025 | ||
| 144 | Open Document | Open Filing | 02 Dec 2025 | 000-16244 | ||
| SCHEDULE 13G/A | Open Document | Open Filing | 14 Nov 2025 | 005-44703 | ||
| SCHEDULE 13G/A | Open Document | Open Filing | 12 Nov 2025 | 005-44703 | ||
| 10-Q | Open Document | Data | Open Filing | 10-Q | 05 Nov 2025 | 30 Sep 2025 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 05 Nov 2025 | 05 Nov 2025 | 000-16244 |
| SCHEDULE 13G | Open Document | Open Filing | 05 Nov 2025 | 005-44703 | ||
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 07 Oct 2025 | 07 Oct 2025 | 000-16244 |
| 4 | Open Document | Open Filing | 03 Oct 2025 | 02 Oct 2025 | ||
| 4 | Open Document | Open Filing | 03 Oct 2025 | 01 Oct 2025 | ||
| 144 | Open Document | Open Filing | 02 Oct 2025 | 000-16244 | ||
| 425 | Open Document | Open Filing | 425 | 01 Oct 2025 | 000-16244 | |
| 144 | Open Document | Open Filing | 01 Oct 2025 | 000-16244 | ||
| 425 | Open Document | Open Filing | 425 | 01 Oct 2025 | 000-16244 | |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 01 Oct 2025 | 30 Sep 2025 | 000-16244 |
| 4 | Open Document | Open Filing | 24 Sep 2025 | 23 Sep 2025 | ||
| 144 | Open Document | Open Filing | 23 Sep 2025 | 000-16244 | ||
| 4 | Open Document | Open Filing | 16 Sep 2025 | 15 Sep 2025 | ||
| 144 | Open Document | Open Filing | 15 Sep 2025 | 000-16244 | ||
| 4/A | Open Document | Open Filing | 10 Sep 2025 | 10 Sep 2025 | ||
| 4 | Open Document | Open Filing | 09 Sep 2025 | 09 Sep 2025 | ||
| 144 | Open Document | Open Filing | 09 Sep 2025 | 000-16244 | ||
| SCHEDULE 13G/A | Open Document | Open Filing | 13 Aug 2025 | 005-44703 | ||
| 10-Q | Open Document | Data | Open Filing | 10-Q | 06 Aug 2025 | 30 Jun 2025 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 06 Aug 2025 | 06 Aug 2025 | 000-16244 |
| 4 | Open Document | Open Filing | 02 Jul 2025 | 30 Jun 2025 | ||
| 4 | Open Document | Open Filing | 02 Jul 2025 | 30 Jun 2025 | ||
| 4 | Open Document | Open Filing | 02 Jul 2025 | 30 Jun 2025 | ||
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 17 Jun 2025 | 16 Jun 2025 | 000-16244 |
| 4 | Open Document | Open Filing | 09 Jun 2025 | 05 Jun 2025 | ||
| 144 | Open Document | Open Filing | 05 Jun 2025 | 000-16244 | ||
| SD | Open Document | Open Filing | FORM SD | 29 May 2025 | 000-16244 | |
| S-3ASR | Open Document | Data | Open Filing | S-3ASR | 22 May 2025 | 333-287523 | |
| S-8 | Open Document | Data | Open Filing | FORM S-8 | 22 May 2025 | 333-287518 | |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 15 May 2025 | 15 May 2025 | 000-16244 |
| SCHEDULE 13G | Open Document | Open Filing | 14 May 2025 | 005-44703 | ||
| SCHEDULE 13G | Open Document | Open Filing | 13 May 2025 | 005-44703 | ||
| 4 | Open Document | Open Filing | 12 May 2025 | 12 May 2025 | ||
| 144 | Open Document | Open Filing | 12 May 2025 | 000-16244 | ||
| 4 | Open Document | Open Filing | 09 May 2025 | 09 May 2025 | ||
| 4 | Open Document | Open Filing | 09 May 2025 | 09 May 2025 | ||
| 4 | Open Document | Open Filing | 09 May 2025 | 09 May 2025 | ||
| 4 | Open Document | Open Filing | 09 May 2025 | 09 May 2025 | ||
| 4 | Open Document | Open Filing | 09 May 2025 | 09 May 2025 | ||
| 4 | Open Document | Open Filing | 09 May 2025 | 09 May 2025 | ||
| 4 | Open Document | Open Filing | 09 May 2025 | 09 May 2025 | ||
| 4 | Open Document | Open Filing | 09 May 2025 | 09 May 2025 | ||
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 08 May 2025 | 08 May 2025 | 000-16244 |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 07 May 2025 | 31 Mar 2025 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 07 May 2025 | 07 May 2025 | 000-16244 |
| 4 | Open Document | Open Filing | 11 Apr 2025 | 10 Apr 2025 | ||
| 144 | Open Document | Open Filing | 10 Apr 2025 | 000-16244 | ||
| 4 | Open Document | Open Filing | 26 Mar 2025 | 24 Mar 2025 | ||
| 4 | Open Document | Open Filing | 26 Mar 2025 | 24 Mar 2025 | ||
| 4 | Open Document | Open Filing | 26 Mar 2025 | 24 Mar 2025 | ||
| 4 | Open Document | Open Filing | 26 Mar 2025 | 24 Mar 2025 | ||
| 4 | Open Document | Open Filing | 26 Mar 2025 | 24 Mar 2025 | ||
| ARS | Open Document | Open Filing | ARS | 20 Mar 2025 | 31 Dec 2024 | 000-16244 |
| DEFA14A | Open Document | Open Filing | DEFA14A | 20 Mar 2025 | 000-16244 | |
| DEF 14A | Open Document | Data | Open Filing | FORM DEF14A | 20 Mar 2025 | 08 May 2025 | 000-16244 |
| 4 | Open Document | Open Filing | 18 Mar 2025 | 14 Mar 2025 | ||
| 4 | Open Document | Open Filing | 18 Mar 2025 | 14 Mar 2025 | ||
| 4 | Open Document | Open Filing | 18 Mar 2025 | 14 Mar 2025 | ||
| 4 | Open Document | Open Filing | 18 Mar 2025 | 14 Mar 2025 | ||
| 4 | Open Document | Open Filing | 18 Mar 2025 | 14 Mar 2025 | ||
| 4 | Open Document | Open Filing | 14 Mar 2025 | 13 Mar 2025 | ||
| 4 | Open Document | Open Filing | 14 Mar 2025 | 13 Mar 2025 | ||
| 4 | Open Document | Open Filing | 14 Mar 2025 | 13 Mar 2025 | ||
| 4 | Open Document | Open Filing | 14 Mar 2025 | 13 Mar 2025 | ||
| 4 | Open Document | Open Filing | 14 Mar 2025 | 13 Mar 2025 | ||
| 4 | Open Document | Open Filing | 10 Mar 2025 | 10 Mar 2025 | ||
| 144 | Open Document | Open Filing | 10 Mar 2025 | 000-16244 | ||
| 10-K | Open Document | Data | Open Filing | 10-K | 14 Feb 2025 | 31 Dec 2024 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 12 Feb 2025 | 12 Feb 2025 | 000-16244 |
| 4 | Open Document | Open Filing | 11 Feb 2025 | 10 Feb 2025 | ||
| 144 | Open Document | Open Filing | 10 Feb 2025 | 000-16244 | ||
| 4 | Open Document | Open Filing | 13 Jan 2025 | 10 Jan 2025 | ||
| 144 | Open Document | Open Filing | 10 Jan 2025 | 000-16244 | ||
| 4 | Open Document | Open Filing | 07 Jan 2025 | 31 Dec 2024 | ||
| 4 | Open Document | Open Filing | 10 Dec 2024 | 10 Dec 2024 | ||
| 144 | Open Document | Open Filing | 10 Dec 2024 | 000-16244 | ||
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 04 Dec 2024 | 04 Dec 2024 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 12 Nov 2024 | 005-44703 | ||
| 4 | Open Document | Open Filing | 12 Nov 2024 | 11 Nov 2024 | ||
| 144 | Open Document | Open Filing | 12 Nov 2024 | 000-16244 | ||
| 10-Q | Open Document | Data | Open Filing | 10-Q | 06 Nov 2024 | 30 Sep 2024 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 06 Nov 2024 | 06 Nov 2024 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 04 Nov 2024 | 005-44703 | ||
| 4 | Open Document | Open Filing | 11 Oct 2024 | 10 Oct 2024 | ||
| SC 13G/A | Open Document | Open Filing | SEC SCHEDULE 13G | 07 Oct 2024 | 005-44703 | |
| 4 | Open Document | Open Filing | 11 Sep 2024 | 10 Sep 2024 | ||
| 144 | Open Document | Open Filing | 10 Sep 2024 | 000-16244 | ||
| 4 | Open Document | Open Filing | 14 Aug 2024 | 12 Aug 2024 | ||
| S-8 | Open Document | Data | Open Filing | FORM S-8 | 09 Aug 2024 | 333-281439 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 06 Aug 2024 | 30 Jun 2024 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 06 Aug 2024 | 06 Aug 2024 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 02 Aug 2024 | 02 Aug 2024 | 000-16244 |
| 4 | Open Document | Open Filing | 12 Jul 2024 | 28 Jun 2024 | ||
| 4 | Open Document | Open Filing | 12 Jul 2024 | 28 Jun 2024 | ||
| 4 | Open Document | Open Filing | 12 Jul 2024 | 28 Jun 2024 | ||
| 4 | Open Document | Open Filing | 12 Jul 2024 | 10 Jul 2024 | ||
| 4 | Open Document | Open Filing | 11 Jun 2024 | 10 Jun 2024 | ||
| 144 | Open Document | Open Filing | 10 Jun 2024 | 000-16244 | ||
| SD | Open Document | Open Filing | SD | 30 May 2024 | 000-16244 | |
| 4 | Open Document | Open Filing | 24 May 2024 | 23 May 2024 | ||
| 144 | Open Document | Open Filing | 23 May 2024 | 000-16244 | ||
| 4 | Open Document | Open Filing | 14 May 2024 | 13 May 2024 | ||
| 4 | Open Document | Open Filing | 13 May 2024 | 09 May 2024 | ||
| 144 | Open Document | Open Filing | 13 May 2024 | 000-16244 | ||
| 4 | Open Document | Open Filing | 10 May 2024 | 09 May 2024 | ||
| 4 | Open Document | Open Filing | 10 May 2024 | 10 May 2024 | ||
| 4 | Open Document | Open Filing | 10 May 2024 | 10 May 2024 | ||
| 4 | Open Document | Open Filing | 10 May 2024 | 10 May 2024 | ||
| 4 | Open Document | Open Filing | 10 May 2024 | 10 May 2024 | ||
| 4 | Open Document | Open Filing | 10 May 2024 | 10 May 2024 | ||
| 4 | Open Document | Open Filing | 10 May 2024 | 10 May 2024 | ||
| 4 | Open Document | Open Filing | 10 May 2024 | 10 May 2024 | ||
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 10 May 2024 | 09 May 2024 | 000-16244 |
| 144 | Open Document | Open Filing | 09 May 2024 | 000-16244 | ||
| 10-Q | Open Document | Data | Open Filing | 10-Q | 07 May 2024 | 31 Mar 2024 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 07 May 2024 | 07 May 2024 | 000-16244 |
| 4 | Open Document | Open Filing | 22 Mar 2024 | 21 Mar 2024 | ||
| 144 | Open Document | Open Filing | 21 Mar 2024 | 000-16244 | ||
| ARS | Open Document | Open Filing | ARS | 21 Mar 2024 | 31 Dec 2023 | 000-16244 |
| DEFA14A | Open Document | Open Filing | DEFA14A | 21 Mar 2024 | 000-16244 | |
| DEF 14A | Open Document | Data | Open Filing | DEF 14A | 21 Mar 2024 | 09 May 2024 | 000-16244 |
| 4 | Open Document | Open Filing | 20 Mar 2024 | 18 Mar 2024 | ||
| 4 | Open Document | Open Filing | 20 Mar 2024 | 18 Mar 2024 | ||
| 4 | Open Document | Open Filing | 20 Mar 2024 | 18 Mar 2024 | ||
| 4 | Open Document | Open Filing | 20 Mar 2024 | 18 Mar 2024 | ||
| 4 | Open Document | Open Filing | 20 Mar 2024 | 18 Mar 2024 | ||
| 4 | Open Document | Open Filing | 18 Mar 2024 | 14 Mar 2024 | ||
| 4 | Open Document | Open Filing | 18 Mar 2024 | 14 Mar 2024 | ||
| 4 | Open Document | Open Filing | 18 Mar 2024 | 14 Mar 2024 | ||
| 4 | Open Document | Open Filing | 18 Mar 2024 | 14 Mar 2024 | ||
| 4 | Open Document | Open Filing | 18 Mar 2024 | 14 Mar 2024 | ||
| 4 | Open Document | Open Filing | 14 Mar 2024 | 13 Mar 2024 | ||
| 4 | Open Document | Open Filing | 14 Mar 2024 | 12 Mar 2024 | ||
| 4 | Open Document | Open Filing | 14 Mar 2024 | 12 Mar 2024 | ||
| 4 | Open Document | Open Filing | 14 Mar 2024 | 12 Mar 2024 | ||
| 4 | Open Document | Open Filing | 14 Mar 2024 | 12 Mar 2024 | ||
| 144 | Open Document | Open Filing | 14 Mar 2024 | 000-16244 | ||
| 144 | Open Document | Open Filing | 13 Mar 2024 | 000-16244 | ||
| 4 | Open Document | Open Filing | 08 Mar 2024 | 06 Mar 2024 | ||
| 144 | Open Document | Open Filing | 06 Mar 2024 | 000-16244 | ||
| 10-K | Open Document | Data | Open Filing | 10-K | 16 Feb 2024 | 31 Dec 2023 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 14 Feb 2024 | 14 Feb 2024 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | SCHEDULE 13G/A | 13 Feb 2024 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | 12 Feb 2024 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | 09 Feb 2024 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | SEC SCHEDULE 13G | 09 Feb 2024 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | 22 Jan 2024 | 005-44703 | ||
| 4 | Open Document | Open Filing | 19 Jan 2024 | 17 Jan 2024 | ||
| 144 | Open Document | Open Filing | 17 Jan 2024 | 000-16244 | ||
| 4 | Open Document | Open Filing | 04 Jan 2024 | 02 Jan 2024 | ||
| 4 | Open Document | Open Filing | 04 Jan 2024 | 29 Dec 2023 | ||
| 4 | Open Document | Open Filing | 19 Dec 2023 | 15 Dec 2023 | ||
| 4 | Open Document | Open Filing | 04 Dec 2023 | 27 Nov 2023 | ||
| 4 | Open Document | Open Filing | 04 Dec 2023 | 27 Nov 2023 | ||
| 4 | Open Document | Open Filing | 01 Dec 2023 | 30 Nov 2023 | ||
| 144 | Open Document | Open Filing | 30 Nov 2023 | 000-16244 | ||
| 144 | Open Document | Open Filing | 27 Nov 2023 | 000-16244 | ||
| 144 | Open Document | Open Filing | 27 Nov 2023 | 000-16244 | ||
| 4 | Open Document | Open Filing | 13 Nov 2023 | 08 Nov 2023 | ||
| 144 | Open Document | Open Filing | 08 Nov 2023 | 000-16244 | ||
| 10-Q | Open Document | Data | Open Filing | 10-Q | 06 Nov 2023 | 30 Sep 2023 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 06 Nov 2023 | 06 Nov 2023 | 000-16244 |
| 4 | Open Document | Open Filing | 31 Aug 2023 | 29 Aug 2023 | ||
| 144 | Open Document | Open Filing | 29 Aug 2023 | 000-16244 | ||
| 4 | Open Document | Open Filing | 25 Aug 2023 | 24 Aug 2023 | ||
| 4 | Open Document | Open Filing | 15 Aug 2023 | 11 Aug 2023 | ||
| 4 | Open Document | Open Filing | 15 Aug 2023 | 11 Aug 2023 | ||
| 4 | Open Document | Open Filing | 15 Aug 2023 | 11 Aug 2023 | ||
| 144 | Open Document | Open Filing | 11 Aug 2023 | 000-16244 | ||
| 144 | Open Document | Open Filing | 11 Aug 2023 | 000-16244 | ||
| 10-Q | Open Document | Data | Open Filing | 10-Q | 07 Aug 2023 | 30 Jun 2023 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 07 Aug 2023 | 07 Aug 2023 | 000-16244 |
| 4 | Open Document | Open Filing | 12 Jul 2023 | 30 Jun 2023 | ||
| 4 | Open Document | Open Filing | 12 Jul 2023 | 30 Jun 2023 | ||
| 4 | Open Document | Open Filing | 12 Jul 2023 | 30 Jun 2023 | ||
| 4 | Open Document | Open Filing | 05 Jul 2023 | 03 Jul 2023 | ||
| 144 | Open Document | Open Filing | 09 Jun 2023 | 000-16244 | ||
| 4 | Open Document | Open Filing | 02 Jun 2023 | 31 May 2023 | ||
| SD | Open Document | Open Filing | SD | 30 May 2023 | 000-16244 | |
| 144 | Open Document | Open Filing | 24 May 2023 | 000-16244 | ||
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 22 May 2023 | 19 May 2023 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 17 May 2023 | 17 May 2023 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 16 May 2023 | 16 May 2023 | 000-16244 |
| 4 | Open Document | Open Filing | 15 May 2023 | 12 May 2023 | ||
| 4 | Open Document | Open Filing | 15 May 2023 | 12 May 2023 | ||
| 4 | Open Document | Open Filing | 15 May 2023 | 12 May 2023 | ||
| 4 | Open Document | Open Filing | 15 May 2023 | 12 May 2023 | ||
| 4 | Open Document | Open Filing | 15 May 2023 | 12 May 2023 | ||
| 4 | Open Document | Open Filing | 15 May 2023 | 12 May 2023 | ||
| 4 | Open Document | Open Filing | 15 May 2023 | 12 May 2023 | ||
| 4 | Open Document | Open Filing | 15 May 2023 | 12 May 2023 | ||
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 12 May 2023 | 11 May 2023 | 000-16244 |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 08 May 2023 | 31 Mar 2023 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 08 May 2023 | 08 May 2023 | 000-16244 |
| 4 | Open Document | Open Filing | 02 May 2023 | 01 May 2023 | ||
| 4 | Open Document | Open Filing | 27 Mar 2023 | 23 Mar 2023 | ||
| 4 | Open Document | Open Filing | 27 Mar 2023 | 23 Mar 2023 | ||
| 4 | Open Document | Open Filing | 27 Mar 2023 | 23 Mar 2023 | ||
| 4 | Open Document | Open Filing | 27 Mar 2023 | 23 Mar 2023 | ||
| DEFA14A | Open Document | Open Filing | DEFA14A | 23 Mar 2023 | 000-16244 | |
| DEF 14A | Open Document | Data | Open Filing | DEF 14A | 23 Mar 2023 | 000-16244 | |
| 4 | Open Document | Open Filing | 21 Mar 2023 | 17 Mar 2023 | ||
| 4 | Open Document | Open Filing | 21 Mar 2023 | 17 Mar 2023 | ||
| 4 | Open Document | Open Filing | 21 Mar 2023 | 17 Mar 2023 | ||
| 4 | Open Document | Open Filing | 21 Mar 2023 | 17 Mar 2023 | ||
| 4 | Open Document | Open Filing | 21 Mar 2023 | 17 Mar 2023 | ||
| 4 | Open Document | Open Filing | 15 Mar 2023 | 13 Mar 2023 | ||
| 4 | Open Document | Open Filing | 15 Mar 2023 | 13 Mar 2023 | ||
| 4 | Open Document | Open Filing | 15 Mar 2023 | 13 Mar 2023 | ||
| 4 | Open Document | Open Filing | 15 Mar 2023 | 13 Mar 2023 | ||
| 4 | Open Document | Open Filing | 15 Mar 2023 | 13 Mar 2023 | ||
| 4 | Open Document | Open Filing | 23 Feb 2023 | 21 Feb 2023 | ||
| 10-K | Open Document | Data | Open Filing | 10-K | 22 Feb 2023 | 31 Dec 2022 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 15 Feb 2023 | 15 Feb 2023 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 13 Feb 2023 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | NONE | 10 Feb 2023 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | SEC SCHEDULE 13G | 10 Feb 2023 | 005-44703 | |
| 8-K/A | Open Document | Data | Open Filing | FORM 8-K/A | 09 Feb 2023 | 21 Nov 2022 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | SCHEDULE 13G/A | 09 Feb 2023 | 005-44703 | |
| SC 13G | Open Document | Open Filing | 08 Feb 2023 | 005-44703 | ||
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 01 Feb 2023 | 01 Feb 2023 | 000-16244 |
| SC 13G | Open Document | Open Filing | 24 Jan 2023 | 005-44703 | ||
| 4 | Open Document | Open Filing | 10 Jan 2023 | 06 Jan 2023 | ||
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 10 Jan 2023 | 09 Jan 2023 | 000-16244 |
| 4 | Open Document | Open Filing | 25 Nov 2022 | 23 Nov 2022 | ||
| 3 | Open Document | Open Filing | 23 Nov 2022 | 21 Nov 2022 | ||
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 21 Nov 2022 | 21 Nov 2022 | 000-16244 |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 07 Nov 2022 | 30 Sep 2022 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 07 Nov 2022 | 07 Nov 2022 | 000-16244 |
| 4 | Open Document | Open Filing | 05 Oct 2022 | 03 Oct 2022 | ||
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 30 Sep 2022 | 30 Sep 2022 | 000-16244 |
| 4 | Open Document | Open Filing | 16 Sep 2022 | 14 Sep 2022 | ||
| 4 | Open Document | Open Filing | 16 Sep 2022 | 14 Sep 2022 | ||
| 4 | Open Document | Open Filing | 16 Sep 2022 | 14 Sep 2022 | ||
| 10-Q | Open Document | Data | Open Filing | 10-Q | 08 Aug 2022 | 30 Jun 2022 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 08 Aug 2022 | 08 Aug 2022 | 000-16244 |
| 4 | Open Document | Open Filing | 08 Jul 2022 | 30 Jun 2022 | ||
| 4 | Open Document | Open Filing | 08 Jul 2022 | 30 Jun 2022 | ||
| 4 | Open Document | Open Filing | 07 Jul 2022 | 05 Jul 2022 | ||
| SD | Open Document | Open Filing | SD | 27 May 2022 | 000-16244 | |
| S-8 | Open Document | Open Filing | FORM S-8 | 20 May 2022 | 333-265117 | |
| 4 | Open Document | Open Filing | 17 May 2022 | 13 May 2022 | ||
| 4 | Open Document | Open Filing | 17 May 2022 | 13 May 2022 | ||
| 4 | Open Document | Open Filing | 17 May 2022 | 13 May 2022 | ||
| 4 | Open Document | Open Filing | 17 May 2022 | 13 May 2022 | ||
| 4 | Open Document | Open Filing | 17 May 2022 | 13 May 2022 | ||
| 4 | Open Document | Open Filing | 17 May 2022 | 13 May 2022 | ||
| 4 | Open Document | Open Filing | 17 May 2022 | 13 May 2022 | ||
| 4 | Open Document | Open Filing | 17 May 2022 | 13 May 2022 | ||
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 12 May 2022 | 12 May 2022 | 000-16244 |
| 4 | Open Document | Open Filing | 11 May 2022 | 11 May 2022 | ||
| 4 | Open Document | Open Filing | 11 May 2022 | 11 May 2022 | ||
| 10-Q | Open Document | Data | Open Filing | 10-Q | 09 May 2022 | 31 Mar 2022 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 09 May 2022 | 09 May 2022 | 000-16244 |
| 4 | Open Document | Open Filing | 04 May 2022 | 02 May 2022 | ||
| DEFA14A | Open Document | Open Filing | DEFA14A | 24 Mar 2022 | 000-16244 | |
| DEF 14A | Open Document | Open Filing | DEF 14A | 24 Mar 2022 | 12 May 2022 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 23 Mar 2022 | 21 Mar 2022 | |
| 4 | Open Document | Open Filing | FORM 4 - | 23 Mar 2022 | 21 Mar 2022 | |
| 4 | Open Document | Open Filing | FORM 4 - | 23 Mar 2022 | 21 Mar 2022 | |
| 4 | Open Document | Open Filing | FORM 4 - | 23 Mar 2022 | 21 Mar 2022 | |
| 4 | Open Document | Open Filing | FORM 4 - | 21 Mar 2022 | 17 Mar 2022 | |
| 4 | Open Document | Open Filing | FORM 4 - | 21 Mar 2022 | 17 Mar 2022 | |
| 4 | Open Document | Open Filing | FORM 4 - | 21 Mar 2022 | 17 Mar 2022 | |
| 4 | Open Document | Open Filing | FORM 4 - | 21 Mar 2022 | 17 Mar 2022 | |
| 4 | Open Document | Open Filing | FORM 4 - | 21 Mar 2022 | 17 Mar 2022 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Mar 2022 | 14 Mar 2022 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Mar 2022 | 14 Mar 2022 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Mar 2022 | 14 Mar 2022 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Mar 2022 | 14 Mar 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Mar 2022 | 14 Mar 2022 | |
| 10-K | Open Document | Data | Open Filing | 10-K | 18 Feb 2022 | 31 Dec 2021 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 16 Feb 2022 | 16 Feb 2022 | 000-16244 |
| SC 13G | Open Document | Open Filing | NONE | 14 Feb 2022 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | SEC SCHEDULE 13G | 10 Feb 2022 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | SCHEDULE 13G/A | 10 Feb 2022 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | VEECO INSTRUMENTS | 07 Feb 2022 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | 27 Jan 2022 | 005-44703 | ||
| SC 13G | Open Document | Open Filing | 25 Jan 2022 | 005-44703 | ||
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 11 Jan 2022 | 11 Jan 2022 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 05 Jan 2022 | 31 Dec 2021 | |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 20 Dec 2021 | 16 Dec 2021 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 06 Dec 2021 | 03 Dec 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 10 Nov 2021 | 08 Nov 2021 | |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 08 Nov 2021 | 05 Nov 2021 | 000-16244 |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 02 Nov 2021 | 30 Sep 2021 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 02 Nov 2021 | 02 Nov 2021 | 000-16244 |
| 8-K/A | Open Document | Data | Open Filing | FORM 8-K/A | 29 Oct 2021 | 13 Aug 2021 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 08 Oct 2021 | 06 Oct 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 04 Oct 2021 | 01 Oct 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Sep 2021 | 14 Sep 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Sep 2021 | 14 Sep 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Sep 2021 | 14 Sep 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Sep 2021 | 14 Sep 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 03 Sep 2021 | 01 Sep 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 03 Sep 2021 | 01 Sep 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Aug 2021 | 16 Aug 2021 | |
| 3 | Open Document | Open Filing | FORM 3 - | 17 Aug 2021 | 16 Aug 2021 | |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 16 Aug 2021 | 13 Aug 2021 | 000-16244 |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 03 Aug 2021 | 30 Jun 2021 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 03 Aug 2021 | 03 Aug 2021 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 07 Jul 2021 | 30 Jun 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 07 Jul 2021 | 30 Jun 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 07 Jul 2021 | 30 Jun 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 07 Jul 2021 | 02 Jul 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Jun 2021 | 16 Jun 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Jun 2021 | 16 Jun 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Jun 2021 | 16 Jun 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Jun 2021 | 16 Jun 2021 | |
| SD | Open Document | Open Filing | FORM SD | 28 May 2021 | 000-16244 | |
| S-8 | Open Document | Open Filing | FORM S-8 | 11 May 2021 | 333-256004 | |
| 4 | Open Document | Open Filing | FORM 4 - | 10 May 2021 | 06 May 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 10 May 2021 | 07 May 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 10 May 2021 | 07 May 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 10 May 2021 | 07 May 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 10 May 2021 | 07 May 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 10 May 2021 | 07 May 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 10 May 2021 | 07 May 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 10 May 2021 | 07 May 2021 | |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 07 May 2021 | 06 May 2021 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 06 May 2021 | 04 May 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 06 May 2021 | 04 May 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 06 May 2021 | 04 May 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 06 May 2021 | 04 May 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 05 May 2021 | 03 May 2021 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 04 May 2021 | 31 Mar 2021 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 04 May 2021 | 04 May 2021 | 000-16244 |
| DEFA14A | Open Document | Open Filing | DEFA14A | 28 Apr 2021 | 000-16244 | |
| 4 | Open Document | Open Filing | FORM 4 - | 19 Mar 2021 | 17 Mar 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 19 Mar 2021 | 17 Mar 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 19 Mar 2021 | 17 Mar 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 19 Mar 2021 | 17 Mar 2021 | |
| DEFA14A | Open Document | Open Filing | DEFA14A | 17 Mar 2021 | 000-16244 | |
| DEF 14A | Open Document | Open Filing | DEF 14A | 17 Mar 2021 | 06 May 2021 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Mar 2021 | 12 Mar 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Mar 2021 | 12 Mar 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Mar 2021 | 12 Mar 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Mar 2021 | 12 Mar 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Mar 2021 | 12 Mar 2021 | |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 24 Feb 2021 | 18 Feb 2021 | 000-16244 |
| 10-K | Open Document | Data | Open Filing | 10-K | 22 Feb 2021 | 31 Dec 2020 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | SEC SCHEDULE 13G | 16 Feb 2021 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | SEC SCHEDULE 13G | 12 Feb 2021 | 005-44703 | |
| 8-K | Open Document | Data | Open Filing | 8-K | 11 Feb 2021 | 11 Feb 2021 | 000-16244 |
| SC 13G | Open Document | Open Filing | 10 Feb 2021 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | SCHEDULE 13G/A | 10 Feb 2021 | 005-44703 | |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 27 Jan 2021 | 27 Jan 2021 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 26 Jan 2021 | 005-44703 | ||
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 22 Jan 2021 | 22 Jan 2021 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 06 Jan 2021 | 05 Jan 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 06 Jan 2021 | 04 Jan 2021 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Dec 2020 | 14 Dec 2020 | |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 17 Nov 2020 | 11 Nov 2020 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 29 Oct 2020 | 27 Oct 2020 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 27 Oct 2020 | 30 Sep 2020 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 27 Oct 2020 | 27 Oct 2020 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 02 Oct 2020 | 01 Oct 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Sep 2020 | 14 Sep 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Sep 2020 | 14 Sep 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Sep 2020 | 14 Sep 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Sep 2020 | 14 Sep 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 03 Sep 2020 | 01 Sep 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 03 Sep 2020 | 01 Sep 2020 | |
| S-3ASR | Open Document | Open Filing | S-3ASR | 07 Aug 2020 | 333-242450 | |
| 4 | Open Document | Open Filing | FORM 4 - | 05 Aug 2020 | 03 Aug 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 05 Aug 2020 | 03 Aug 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 05 Aug 2020 | 03 Aug 2020 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 03 Aug 2020 | 30 Jun 2020 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 03 Aug 2020 | 03 Aug 2020 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | SEC SCHEDULE 13G | 10 Jul 2020 | 005-44703 | |
| 4 | Open Document | Open Filing | FORM 4 - | 02 Jul 2020 | 30 Jun 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 02 Jul 2020 | 30 Jun 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Jun 2020 | 15 Jun 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Jun 2020 | 15 Jun 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Jun 2020 | 15 Jun 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Jun 2020 | 15 Jun 2020 | |
| SD | Open Document | Open Filing | SD | 29 May 2020 | 000-16244 | |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 18 May 2020 | 13 May 2020 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 14 May 2020 | 13 May 2020 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 13 May 2020 | 13 May 2020 | 000-16244 |
| 3 | Open Document | Open Filing | FORM 3 - | 12 May 2020 | 06 May 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 11 May 2020 | 07 May 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 11 May 2020 | 07 May 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2020 | 08 May 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2020 | 08 May 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2020 | 08 May 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2020 | 08 May 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2020 | 08 May 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2020 | 08 May 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2020 | 08 May 2020 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 07 May 2020 | 31 Mar 2020 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 07 May 2020 | 07 May 2020 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 01 May 2020 | 01 May 2020 | |
| DEFA14A | Open Document | Open Filing | DEFA14A | 17 Apr 2020 | 000-16244 | |
| 3 | Open Document | Open Filing | FORM 3 - | 14 Apr 2020 | 13 Apr 2020 | |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 31 Mar 2020 | 31 Mar 2020 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 19 Mar 2020 | 17 Mar 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 19 Mar 2020 | 17 Mar 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 19 Mar 2020 | 17 Mar 2020 | |
| DEFA14A | Open Document | Open Filing | DEFA14A | 18 Mar 2020 | 000-16244 | |
| DEFA14A | Open Document | Open Filing | DEFA14A | 18 Mar 2020 | 000-16244 | |
| DEF 14A | Open Document | Open Filing | DEF 14A | 18 Mar 2020 | 07 May 2020 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 18 Mar 2020 | 17 Mar 2020 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Mar 2020 | 16 Mar 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Mar 2020 | 16 Mar 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Mar 2020 | 16 Mar 2020 | |
| 3 | Open Document | Open Filing | FORM 3 - | 12 Mar 2020 | 02 Mar 2020 | |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 04 Mar 2020 | 02 Mar 2020 | 000-16244 |
| 10-K | Open Document | Data | Open Filing | 10-K | 21 Feb 2020 | 31 Dec 2019 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 13 Feb 2020 | 13 Feb 2020 | 000-16244 |
| SC 13G | Open Document | Open Filing | SEC SCHEDULE 13G | 13 Feb 2020 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | SCHEDULE 13G/A | 12 Feb 2020 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | SCHEDULE 13G/A | 12 Feb 2020 | 005-44703 | |
| 4 | Open Document | Open Filing | FORM 4 - | 07 Feb 2020 | 06 Feb 2020 | |
| 8-K/A | Open Document | Data | Open Filing | FORM 8-K/A | 07 Feb 2020 | 12 Nov 2019 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 07 Feb 2020 | 06 Feb 2020 | |
| 4 | Open Document | Open Filing | FORM 4 - | 07 Feb 2020 | 06 Feb 2020 | |
| SC 13G/A | Open Document | Open Filing | 04 Feb 2020 | 005-44703 | ||
| 4 | Open Document | Open Filing | FORM 4 - | 03 Jan 2020 | 02 Jan 2020 | |
| 8-K | Open Document | Data | Open Filing | FORM 8-K | 02 Jan 2020 | 02 Jan 2020 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Dec 2019 | 16 Dec 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Dec 2019 | 16 Dec 2019 | |
| 8-K | Open Document | Data | Open Filing | 8-K | 11 Dec 2019 | 11 Dec 2019 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Nov 2019 | 12 Nov 2019 | |
| 3 | Open Document | Open Filing | FORM 3 - | 14 Nov 2019 | 12 Nov 2019 | |
| 8-K | Open Document | Data | Open Filing | 8-K | 14 Nov 2019 | 12 Nov 2019 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 08 Nov 2019 | 06 Nov 2019 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 04 Nov 2019 | 30 Sep 2019 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 04 Nov 2019 | 04 Nov 2019 | 000-16244 |
| 4 | Open Document | Open Filing | 4 | 03 Oct 2019 | 01 Oct 2019 | |
| 4 | Open Document | Open Filing | 4 | 03 Oct 2019 | 01 Oct 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Sep 2019 | 16 Sep 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Sep 2019 | 16 Sep 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Sep 2019 | 16 Sep 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Sep 2019 | 16 Sep 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 07 Aug 2019 | 28 Jun 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 07 Aug 2019 | 05 Aug 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 07 Aug 2019 | 05 Aug 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 07 Aug 2019 | 28 Jun 2019 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 05 Aug 2019 | 30 Jun 2019 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 05 Aug 2019 | 05 Aug 2019 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Jun 2019 | 14 Jun 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Jun 2019 | 14 Jun 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Jun 2019 | 14 Jun 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Jun 2019 | 14 Jun 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Jun 2019 | 12 Jun 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Jun 2019 | 12 Jun 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Jun 2019 | 12 Jun 2019 | |
| SD | Open Document | Open Filing | SD | 24 May 2019 | 000-16244 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2019 | 06 May 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2019 | 06 May 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2019 | 06 May 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2019 | 06 May 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2019 | 06 May 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2019 | 06 May 2019 | |
| S-8 | Open Document | Open Filing | S-8 | 07 May 2019 | 333-231266 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 07 May 2019 | 31 Mar 2019 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 06 May 2019 | 03 May 2019 | 000-16244 |
| 10-K/A | Open Document | Data | Open Filing | 01 May 2019 | 31 Dec 2018 | 000-16244 | |
| DEFA14A | Open Document | Open Filing | DEFA14A | 19 Mar 2019 | 000-16244 | |
| DEFA14A | Open Document | Open Filing | DEFA14A | 19 Mar 2019 | 000-16244 | |
| DEF 14A | Open Document | Open Filing | DEF 14A | 19 Mar 2019 | 03 May 2019 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Mar 2019 | 14 Mar 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Mar 2019 | 14 Mar 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Mar 2019 | 14 Mar 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Mar 2019 | 14 Mar 2019 | |
| SC 13G/A | Open Document | Open Filing | 11 Mar 2019 | 005-44703 | ||
| 10-K | Open Document | Data | Open Filing | 10-K | 25 Feb 2019 | 31 Dec 2018 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 22 Feb 2019 | 21 Feb 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 22 Feb 2019 | 21 Feb 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 22 Feb 2019 | 21 Feb 2019 | |
| SC 13G | Open Document | Open Filing | 15 Feb 2019 | 005-44703 | ||
| 8-K | Open Document | Open Filing | 8-K | 11 Feb 2019 | 11 Feb 2019 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 11 Feb 2019 | 11 Feb 2019 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | SC 13G/A | 11 Feb 2019 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | 11 Feb 2019 | 005-44703 | ||
| 4 | Open Document | Open Filing | FORM 4 - | 08 Feb 2019 | 06 Feb 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 Feb 2019 | 06 Feb 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 Feb 2019 | 06 Feb 2019 | |
| SC 13G/A | Open Document | Open Filing | SCHEDULE 13G/A | 08 Feb 2019 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | 31 Jan 2019 | 005-44703 | ||
| 8-K | Open Document | Open Filing | 8-K | 14 Jan 2019 | 14 Jan 2019 | 000-16244 |
| SC 13G | Open Document | Open Filing | 14 Jan 2019 | 005-44703 | ||
| 4 | Open Document | Open Filing | FORM 4 - | 08 Jan 2019 | 04 Jan 2019 | |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Dec 2018 | 14 Dec 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Dec 2018 | 14 Dec 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Dec 2018 | 14 Dec 2018 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 01 Nov 2018 | 30 Sep 2018 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 01 Nov 2018 | 01 Nov 2018 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 01 Nov 2018 | 01 Nov 2018 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 03 Oct 2018 | 01 Oct 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 03 Oct 2018 | 01 Oct 2018 | |
| 8-K | Open Document | Open Filing | 8-K | 04 Sep 2018 | 29 Aug 2018 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 23 Aug 2018 | 23 Aug 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 10 Aug 2018 | 10 Aug 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 Aug 2018 | 09 Aug 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 Aug 2018 | 07 Aug 2018 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 02 Aug 2018 | 30 Jun 2018 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 02 Aug 2018 | 02 Aug 2018 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 02 Jul 2018 | 02 Jul 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 02 Jul 2018 | 02 Jul 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Jun 2018 | 14 Jun 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Jun 2018 | 14 Jun 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Jun 2018 | 14 Jun 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Jun 2018 | 14 Jun 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Jun 2018 | 12 Jun 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Jun 2018 | 12 Jun 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Jun 2018 | 12 Jun 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Jun 2018 | 12 Jun 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 06 Jun 2018 | 04 Jun 2018 | |
| SD | Open Document | Open Filing | SD | 29 May 2018 | 000-16244 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 07 May 2018 | 31 Mar 2018 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 07 May 2018 | 03 May 2018 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 04 May 2018 | 04 May 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 04 May 2018 | 04 May 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 04 May 2018 | 04 May 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 04 May 2018 | 04 May 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 04 May 2018 | 04 May 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 04 May 2018 | 04 May 2018 | |
| DEFA14A | Open Document | Open Filing | DEFA14A | 19 Mar 2018 | 000-16244 | |
| DEF 14A | Open Document | Open Filing | DEF 14A | 19 Mar 2018 | 03 May 2018 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Mar 2018 | 14 Mar 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Mar 2018 | 14 Mar 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Mar 2018 | 14 Mar 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Mar 2018 | 14 Mar 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 23 Feb 2018 | 21 Feb 2018 | |
| 4 | Open Document | Open Filing | FORM 4 - | 23 Feb 2018 | 21 Feb 2008 | |
| 4 | Open Document | Open Filing | FORM 4 - | 23 Feb 2018 | 21 Feb 2018 | |
| 10-K | Open Document | Data | Open Filing | 10-K | 21 Feb 2018 | 31 Dec 2017 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 12 Feb 2018 | 12 Feb 2018 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 09 Feb 2018 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | SCHEDULE 13G/A | 09 Feb 2018 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | 08 Feb 2018 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | SC 13G/A | 07 Feb 2018 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | 08 Jan 2018 | 005-44703 | ||
| 5 | Open Document | Open Filing | FORM 5 - | 05 Jan 2018 | 31 Dec 2017 | |
| 5 | Open Document | Open Filing | FORM 5 - | 05 Jan 2018 | 31 Dec 2017 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 18 Dec 2017 | 13 Dec 2017 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 18 Dec 2017 | 18 Dec 2017 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 18 Dec 2017 | 13 Dec 2017 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 18 Dec 2017 | 13 Dec 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Dec 2017 | 14 Dec 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Dec 2017 | 13 Dec 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Dec 2017 | 13 Dec 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Dec 2017 | 13 Dec 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Dec 2017 | 13 Dec 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Dec 2017 | 13 Dec 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Dec 2017 | 13 Dec 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Dec 2017 | 13 Dec 2017 | |
| 8-K | Open Document | Open Filing | 8-K | 11 Dec 2017 | 11 Dec 2017 | 000-16244 |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 03 Nov 2017 | 30 Sep 2017 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 02 Nov 2017 | 02 Nov 2017 | 000-16244 |
| 8-K/A | Open Document | Open Filing | 8-K/A | 15 Sep 2017 | 04 May 2017 | 000-16244 |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 03 Aug 2017 | 30 Jun 2017 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 03 Aug 2017 | 03 Aug 2017 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 12 Jul 2017 | 10 Jul 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 12 Jul 2017 | 10 Jul 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 12 Jul 2017 | 10 Jul 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 12 Jul 2017 | 10 Jul 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 20 Jun 2017 | 16 Jun 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 20 Jun 2017 | 16 Jun 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 20 Jun 2017 | 16 Jun 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 20 Jun 2017 | 16 Jun 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Jun 2017 | 14 Jun 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Jun 2017 | 14 Jun 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Jun 2017 | 14 Jun 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Jun 2017 | 14 Jun 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Jun 2017 | 12 Jun 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Jun 2017 | 12 Jun 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Jun 2017 | 12 Jun 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Jun 2017 | 12 Jun 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 06 Jun 2017 | 02 Jun 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 01 Jun 2017 | 30 May 2017 | |
| S-8 | Open Document | Open Filing | S-8 | 26 May 2017 | 333-218256 | |
| 8-K | Open Document | Open Filing | 8-K | 26 May 2017 | 26 May 2017 | 000-16244 |
| SD | Open Document | Open Filing | SD | 24 May 2017 | 000-16244 | |
| 4 | Open Document | Open Filing | FORM 4 - | 23 May 2017 | 19 May 2017 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 19 May 2017 | 05 May 2017 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 19 May 2017 | 05 May 2017 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 19 May 2017 | 05 May 2017 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 19 May 2017 | 05 May 2017 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 19 May 2017 | 05 May 2017 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 19 May 2017 | 05 May 2017 | |
| 8-K | Open Document | Open Filing | 8-K | 16 May 2017 | 15 May 2017 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 16 May 2017 | 12 May 2017 | |
| 425 | Open Document | Open Filing | 8-K | 16 May 2017 | 000-16244 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 May 2017 | 05 May 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 May 2017 | 05 May 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 May 2017 | 05 May 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 May 2017 | 05 May 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 May 2017 | 05 May 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 May 2017 | 05 May 2017 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 May 2017 | 08 May 2017 | |
| 8-K | Open Document | Open Filing | 8-K | 05 May 2017 | 04 May 2017 | 000-16244 |
| 425 | Open Document | Open Filing | 8-K | 05 May 2017 | 000-16244 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 05 May 2017 | 31 Mar 2017 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 04 May 2017 | 04 May 2017 | 000-16244 |
| 425 | Open Document | Open Filing | 8-K | 04 May 2017 | 000-16244 | |
| EFFECT | Open Document | Open Filing | 24 Apr 2017 | 333-216661 | ||
| 424B3 | Open Document | Open Filing | 424B3 | 24 Apr 2017 | 333-216661 | |
| CORRESP | Open Document | Open Filing | 24 Apr 2017 | |||
| S-4/A | Open Document | Open Filing | S-4/A | 21 Apr 2017 | 333-216661 | |
| 8-K | Open Document | Open Filing | 8-K | 19 Apr 2017 | 18 Apr 2017 | 000-16244 |
| 425 | Open Document | Open Filing | 8-K | 19 Apr 2017 | 000-16244 | |
| DEFA14A | Open Document | Open Filing | DEFA14A | 17 Mar 2017 | 000-16244 | |
| DEF 14A | Open Document | Open Filing | DEF 14A | 17 Mar 2017 | 04 May 2017 | 000-16244 |
| S-4 | Open Document | Open Filing | S-4 | 13 Mar 2017 | 333-216661 | |
| SC 13D | Open Document | Open Filing | SC 13D | 13 Mar 2017 | ||
| 4/A | Open Document | Open Filing | FORM 4/A - | 07 Mar 2017 | 14 Jun 2016 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 07 Mar 2017 | 14 Dec 2016 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 07 Mar 2017 | 14 Jun 2016 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 07 Mar 2017 | 14 Dec 2016 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 07 Mar 2017 | 14 Jun 2016 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 07 Mar 2017 | 14 Jun 2016 | |
| 4/A | Open Document | Open Filing | FORM 4/A - | 07 Mar 2017 | 14 Dec 2016 | |
| 8-K | Open Document | Open Filing | 8-K | 07 Mar 2017 | 07 Mar 2017 | 000-16244 |
| 425 | Open Document | Open Filing | 8-K | 07 Mar 2017 | 000-16244 | |
| SC 13G/A | Open Document | Open Filing | 06 Mar 2017 | 005-44703 | ||
| 10-K | Open Document | Data | Open Filing | 10-K | 22 Feb 2017 | 31 Dec 2016 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 21 Feb 2017 | 21 Feb 2017 | 000-16244 |
| 425 | Open Document | Open Filing | 8-K | 21 Feb 2017 | 000-16244 | |
| 8-K | Open Document | Open Filing | 8-K | 17 Feb 2017 | 16 Feb 2017 | 000-16244 |
| 425 | Open Document | Open Filing | 8-K | 17 Feb 2017 | 000-16244 | |
| 8-K | Open Document | Open Filing | 8-K | 16 Feb 2017 | 16 Feb 2017 | 000-16244 |
| 425 | Open Document | Open Filing | 8-K | 16 Feb 2017 | 000-16244 | |
| SC 13G/A | Open Document | Open Filing | 10 Feb 2017 | 005-44703 | ||
| SC 13G | Open Document | Open Filing | SC 13G | 10 Feb 2017 | 005-44703 | |
| SC 13G | Open Document | Open Filing | SCHEDULE 13G | 09 Feb 2017 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | 07 Feb 2017 | 005-44703 | ||
| 8-K | Open Document | Open Filing | 8-K | 03 Feb 2017 | 02 Feb 2017 | 000-16244 |
| 425 | Open Document | Open Filing | 8-K | 03 Feb 2017 | 000-16244 | |
| 8-K | Open Document | Open Filing | 8-K | 02 Feb 2017 | 02 Feb 2017 | 000-16244 |
| 425 | Open Document | Open Filing | 8-K | 02 Feb 2017 | 000-16244 | |
| 8-K | Open Document | Open Filing | 8-K | 30 Jan 2017 | 30 Jan 2017 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 18 Jan 2017 | 11 Jan 2017 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 17 Jan 2017 | 005-44703 | ||
| 424B5 | Open Document | Open Filing | 424B5 | 12 Jan 2017 | 333-215499 | |
| FWP | Open Document | Open Filing | FWP | 12 Jan 2017 | 333-215499 | |
| 8-K | Open Document | Open Filing | 8-K | 10 Jan 2017 | 10 Jan 2017 | 000-16244 |
| 424B5 | Open Document | Open Filing | 424B5 | 10 Jan 2017 | 333-215499 | |
| S-3ASR | Open Document | Open Filing | S-3ASR | 10 Jan 2017 | 333-215499 | |
| 5 | Open Document | Open Filing | FORM 5 - | 04 Jan 2017 | 31 Dec 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Dec 2016 | 14 Jun 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Dec 2016 | 14 Dec 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Dec 2016 | 14 Dec 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Dec 2016 | 13 Dec 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Dec 2016 | 13 Dec 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Dec 2016 | 13 Dec 2016 | |
| SC 13G/A | Open Document | Open Filing | 09 Dec 2016 | 005-44703 | ||
| 10-Q | Open Document | Data | Open Filing | 10-Q | 01 Nov 2016 | 30 Sep 2016 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 01 Nov 2016 | 01 Nov 2016 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 05 Oct 2016 | 30 Sep 2016 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 09 Sep 2016 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | VECO AS OF 07/31/2016 | 10 Aug 2016 | 005-44703 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 01 Aug 2016 | 30 Jun 2016 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 01 Aug 2016 | 01 Aug 2016 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 22 Jul 2016 | 21 Jul 2016 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 22 Jul 2016 | 21 Jul 2016 | |
| 3 | Open Document | Open Filing | FORM 3 - | 22 Jul 2016 | 21 Jul 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 27 Jun 2016 | 23 Jun 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 20 Jun 2016 | 16 Jun 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Jun 2016 | 14 Jun 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Jun 2016 | 14 Jun 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Jun 2016 | 14 Jun 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Jun 2016 | 14 Jun 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Jun 2016 | 13 Jun 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Jun 2016 | 13 Jun 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Jun 2016 | 13 Jun 2016 | |
| S-8 | Open Document | Open Filing | S-8 | 02 Jun 2016 | 333-211781 | |
| SD | Open Document | Open Filing | SD | 26 May 2016 | 000-16244 | |
| 4 | Open Document | Open Filing | FORM 4 - | 06 May 2016 | 06 May 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 06 May 2016 | 06 May 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 06 May 2016 | 06 May 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 06 May 2016 | 06 May 2016 | |
| 4 | Open Document | Open Filing | FORM 4 - | 06 May 2016 | 06 May 2016 | |
| 8-K | Open Document | Open Filing | 8-K | 06 May 2016 | 05 May 2016 | 000-16244 |
| 3 | Open Document | Open Filing | FORM 3 - | 06 May 2016 | 05 May 2016 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 04 May 2016 | 31 Mar 2016 | 000-16244 |
| 8-K | Open Document | Data | Open Filing | 8-K | 04 May 2016 | 04 May 2016 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 21 Apr 2016 | 19 Apr 2016 | |
| DEFA14A | Open Document | Open Filing | DEFA14A | 22 Mar 2016 | 000-16244 | |
| DEF 14A | Open Document | Open Filing | DEF 14A | 22 Mar 2016 | 05 May 2016 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 15 Mar 2016 | 08 Mar 2016 | 000-16244 |
| 10-K | Open Document | Data | Open Filing | 10-K | 25 Feb 2016 | 31 Dec 2015 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 22 Feb 2016 | 22 Feb 2016 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 16 Feb 2016 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | VECO AS OF 12/31/2015 | 12 Feb 2016 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | 11 Feb 2016 | 005-44703 | ||
| 8-K | Open Document | Open Filing | 8-K | 10 Feb 2016 | 05 Feb 2016 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 02 Feb 2016 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | 27 Jan 2016 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | 26 Jan 2016 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | 08 Jan 2016 | 005-44703 | ||
| 4 | Open Document | Open Filing | FORM 4 - | 06 Jan 2016 | 04 Jan 2016 | |
| 8-K | Open Document | Open Filing | 8-K | 04 Jan 2016 | 04 Jan 2016 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Dec 2015 | 14 Dec 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Dec 2015 | 14 Dec 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Dec 2015 | 14 Dec 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 Dec 2015 | 07 Dec 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 03 Dec 2015 | 01 Dec 2015 | |
| SC 13G | Open Document | Open Filing | VECO AS OF 10/31/2015 | 10 Nov 2015 | 005-44703 | |
| 4 | Open Document | Open Filing | FORM 4 - | 03 Nov 2015 | 30 Oct 2015 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 28 Oct 2015 | 30 Sep 2015 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 28 Oct 2015 | 28 Oct 2015 | 000-16244 |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 03 Aug 2015 | 30 Jun 2015 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 03 Aug 2015 | 03 Aug 2015 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Jul 2015 | 13 Jul 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Jun 2015 | 12 Jun 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Jun 2015 | 12 Jun 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Jun 2015 | 12 Jun 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 16 Jun 2015 | 12 Jun 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 11 Jun 2015 | 09 Jun 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 11 Jun 2015 | 09 Jun 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 11 Jun 2015 | 09 Jun 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 10 Jun 2015 | 08 Jun 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 02 Jun 2015 | 29 May 2015 | |
| SD | Open Document | Open Filing | SD | 01 Jun 2015 | 000-16244 | |
| 8-K | Open Document | Open Filing | 8-K | 18 May 2015 | 13 May 2015 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 15 May 2015 | 14 May 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 May 2015 | 14 May 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 May 2015 | 14 May 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 May 2015 | 14 May 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 May 2015 | 14 May 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 May 2015 | 14 May 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 May 2015 | 14 May 2015 | |
| 3 | Open Document | Open Filing | FORM 3 - | 15 May 2015 | 13 May 2015 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2015 | 07 May 2015 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 06 May 2015 | 31 Mar 2015 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 06 May 2015 | 06 May 2015 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 10 Apr 2015 | 005-44703 | ||
| DEFA14A | Open Document | Open Filing | DEFA14A | 30 Mar 2015 | 000-16244 | |
| DEF 14A | Open Document | Open Filing | DEF 14A | 30 Mar 2015 | 13 May 2015 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 19 Mar 2015 | 16 Mar 2015 | 000-16244 |
| 5 | Open Document | Open Filing | FORM 5 - | 12 Mar 2015 | 31 Dec 2014 | |
| 5 | Open Document | Open Filing | FORM 5 - | 12 Mar 2015 | 31 Dec 2014 | |
| 10-K | Open Document | Data | Open Filing | 10-K | 24 Feb 2015 | 31 Dec 2014 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 17 Feb 2015 | 17 Feb 2015 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | SCHEDULE 13G AMENDMENT FILING | 17 Feb 2015 | 005-44703 | |
| SC 13G | Open Document | Open Filing | 13 Feb 2015 | 005-44703 | ||
| 8-K | Open Document | Open Filing | 8-K | 12 Feb 2015 | 06 Feb 2015 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 11 Feb 2015 | 005-44703 | ||
| SC 13G | Open Document | Open Filing | 10 Feb 2015 | 005-44703 | ||
| SC 13G | Open Document | Open Filing | 10 Feb 2015 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | 02 Feb 2015 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | 30 Jan 2015 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | VEECO INSTRUMENTS INC. | 15 Jan 2015 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | 09 Jan 2015 | 005-44703 | ||
| 4 | Open Document | Open Filing | FORM 4 - | 12 Dec 2014 | 10 Dec 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 12 Dec 2014 | 10 Dec 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 12 Dec 2014 | 12 Dec 2014 | |
| 8-K | Open Document | Open Filing | 8-K | 05 Dec 2014 | 04 Dec 2014 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 02 Dec 2014 | 01 Dec 2014 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 29 Oct 2014 | 30 Sep 2014 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 29 Oct 2014 | 29 Oct 2014 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 08 Sep 2014 | 04 Sep 2014 | |
| 8-K | Open Document | Open Filing | 8-K | 25 Aug 2014 | 19 Aug 2014 | 000-16244 |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 31 Jul 2014 | 30 Jun 2014 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 30 Jul 2014 | 30 Jul 2014 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Jun 2014 | 11 Jun 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Jun 2014 | 11 Jun 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Jun 2014 | 11 Jun 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Jun 2014 | 12 Jun 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 11 Jun 2014 | 09 Jun 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 11 Jun 2014 | 09 Jun 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 11 Jun 2014 | 09 Jun 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 11 Jun 2014 | 09 Jun 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 03 Jun 2014 | 02 Jun 2014 | |
| SD | Open Document | Open Filing | SD | 02 Jun 2014 | 000-16244 | |
| 3 | Open Document | Open Filing | FORM 3 - | 13 May 2014 | 06 May 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 May 2014 | 07 May 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 May 2014 | 07 May 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 May 2014 | 07 May 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 May 2014 | 07 May 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 May 2014 | 07 May 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 May 2014 | 07 May 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 09 May 2014 | 08 May 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 07 May 2014 | 05 May 2014 | |
| 8-K | Open Document | Open Filing | 8-K | 06 May 2014 | 06 May 2014 | 000-16244 |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 05 May 2014 | 31 Mar 2014 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 05 May 2014 | 05 May 2014 | 000-16244 |
| DEFA14A | Open Document | Open Filing | DEFA14A | 24 Apr 2014 | 000-16244 | |
| 4 | Open Document | Open Filing | FORM 4 - | 04 Apr 2014 | 03 Apr 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 04 Apr 2014 | 03 Apr 2014 | |
| S-8 | Open Document | Open Filing | S-8 | 21 Mar 2014 | 333-194737 | |
| DEFA14A | Open Document | Open Filing | DEFA14A | 20 Mar 2014 | 000-16244 | |
| DEF 14A | Open Document | Open Filing | DEF 14A | 20 Mar 2014 | 06 May 2014 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Mar 2014 | 14 Mar 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 18 Mar 2014 | 18 Mar 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 12 Mar 2014 | 10 Mar 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 12 Mar 2014 | 10 Mar 2014 | |
| 10-K | Open Document | Data | Open Filing | 10-K | 28 Feb 2014 | 31 Dec 2013 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 24 Feb 2014 | 20 Feb 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 24 Feb 2014 | 21 Feb 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 24 Feb 2014 | 21 Feb 2014 | |
| 8-K | Open Document | Open Filing | 8-K | 19 Feb 2014 | 19 Feb 2014 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Feb 2014 | 12 Feb 2014 | |
| SC 13G/A | Open Document | Open Filing | NONE | 14 Feb 2014 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | 12 Feb 2014 | 005-44703 | ||
| 4 | Open Document | Open Filing | FORM 4 - | 11 Feb 2014 | 07 Feb 2014 | |
| SC 13G | Open Document | Open Filing | 29 Jan 2014 | 005-44703 | ||
| 8-K | Open Document | Open Filing | 8-K | 27 Jan 2014 | 21 Jan 2014 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 23 Jan 2014 | 21 Jan 2014 | |
| SC 13G/A | Open Document | Open Filing | 16 Jan 2014 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | 16 Jan 2014 | 005-44703 | ||
| UPLOAD | Open Document | Open Filing | 14 Jan 2014 | |||
| CORRESP | Open Document | Open Filing | 13 Jan 2014 | |||
| 4 | Open Document | Open Filing | FORM 4 - | 10 Jan 2014 | 09 Jan 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 10 Jan 2014 | 09 Jan 2014 | |
| 4 | Open Document | Open Filing | FORM 4 - | 10 Jan 2014 | 09 Jan 2014 | |
| SC 13G/A | Open Document | Open Filing | 10 Jan 2014 | 005-44703 | ||
| UPLOAD | Open Document | Open Filing | 31 Dec 2013 | |||
| 4 | Open Document | Open Filing | FORM 4 - | 17 Dec 2013 | 13 Dec 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Dec 2013 | 13 Dec 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Dec 2013 | 13 Dec 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 17 Dec 2013 | 13 Dec 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Dec 2013 | 11 Dec 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Dec 2013 | 11 Dec 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Dec 2013 | 11 Dec 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Dec 2013 | 11 Dec 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Dec 2013 | 11 Dec 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Dec 2013 | 11 Dec 2013 | |
| 8-K | Open Document | Open Filing | 8-K | 11 Dec 2013 | 09 Dec 2013 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 09 Dec 2013 | 005-44703 | ||
| 4 | Open Document | Open Filing | FORM 4 - | 02 Dec 2013 | 27 Nov 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 22 Nov 2013 | 20 Nov 2013 | |
| SC 13G | Open Document | Open Filing | SCHEDULE 13G HOLDINGS REPORT | 21 Nov 2013 | 005-44703 | |
| 4 | Open Document | Open Filing | FORM 4 - | 20 Nov 2013 | 18 Nov 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Nov 2013 | 13 Nov 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Nov 2013 | 13 Nov 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Nov 2013 | 13 Nov 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Nov 2013 | 13 Nov 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 15 Nov 2013 | 13 Nov 2013 | |
| 8-K | Open Document | Open Filing | 8-K | 12 Nov 2013 | 11 Nov 2013 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 08 Nov 2013 | 08 Nov 2013 | 000-16244 |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 08 Nov 2013 | 30 Sep 2013 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 06 Nov 2013 | 04 Nov 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 06 Nov 2013 | 04 Nov 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 06 Nov 2013 | 04 Nov 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 05 Nov 2013 | 18 Jun 2012 | |
| 8-K | Open Document | Open Filing | 8-K | 04 Nov 2013 | 04 Nov 2013 | 000-16244 |
| DEF 14A | Open Document | Open Filing | DEF 14A | 04 Nov 2013 | 10 Dec 2013 | 000-16244 |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 04 Nov 2013 | 30 Jun 2013 | 000-16244 |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 04 Nov 2013 | 31 Mar 2013 | 000-16244 |
| 10-K | Open Document | Data | Open Filing | 10-K | 04 Nov 2013 | 31 Dec 2012 | 000-16244 |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 04 Nov 2013 | 30 Sep 2012 | 000-16244 |
| 8-K/A | Open Document | Open Filing | 8-K/A | 20 Sep 2013 | 18 Sep 2013 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 19 Sep 2013 | 18 Sep 2013 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 20 Aug 2013 | 14 Aug 2013 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 09 Aug 2013 | 09 Aug 2013 | 000-16244 |
| NT 10-Q | Open Document | Open Filing | NT 10-Q | 09 Aug 2013 | 30 Jun 2013 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 29 Jul 2013 | 29 Jul 2013 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 19 Jul 2013 | 17 Jul 2013 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 18 Jun 2013 | 17 Jun 2013 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Jun 2013 | 12 Jun 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 14 Jun 2013 | 12 Jun 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 12 Jun 2013 | 10 Jun 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 12 Jun 2013 | 10 Jun 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 12 Jun 2013 | 10 Jun 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 12 Jun 2013 | 10 Jun 2013 | |
| 4 | Open Document | Open Filing | FORM 4 - | 12 Jun 2013 | 10 Jun 2013 | |
| 8-K | Open Document | Open Filing | 8-K | 31 May 2013 | 24 May 2013 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 17 May 2013 | 13 May 2013 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 10 May 2013 | 10 May 2013 | 000-16244 |
| NT 10-Q | Open Document | Open Filing | NT 10-Q | 10 May 2013 | 31 Mar 2013 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 09 May 2013 | 07 May 2013 | |
| 8-K | Open Document | Open Filing | 8-K | 22 Apr 2013 | 22 Apr 2013 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 04 Apr 2013 | 005-44703 | ||
| SC 13G | Open Document | Open Filing | 21 Mar 2013 | 005-44703 | ||
| 8-K | Open Document | Open Filing | 8-K | 08 Mar 2013 | 05 Mar 2013 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 01 Mar 2013 | 01 Mar 2013 | 000-16244 |
| NT 10-K | Open Document | Open Filing | NT 10-K | 01 Mar 2013 | 31 Dec 2012 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 14 Feb 2013 | 005-44703 | ||
| SC 13G | Open Document | Open Filing | VEECO | 14 Feb 2013 | 005-44703 | |
| SC 13G | Open Document | Open Filing | 13 Feb 2013 | 005-44703 | ||
| SC 13G/A | Open Document | Open Filing | 11 Feb 2013 | 005-44703 | ||
| 8-K | Open Document | Open Filing | 8-K | 08 Feb 2013 | 08 Feb 2013 | 000-16244 |
| SC 13G | Open Document | Open Filing | 06 Feb 2013 | 005-44703 | ||
| 8-K | Open Document | Open Filing | 8-K | 28 Jan 2013 | 25 Jan 2013 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 24 Jan 2013 | 005-44703 | ||
| 4 | Open Document | Open Filing | FORM 4 - | 23 Jan 2013 | 18 Jan 2013 | |
| SC 13G/A | Open Document | Open Filing | 11 Jan 2013 | 005-44703 | ||
| UPLOAD | Open Document | Open Filing | 27 Dec 2012 | |||
| CORRESP | Open Document | Open Filing | 12 Dec 2012 | |||
| 8-K | Open Document | Open Filing | 8-K | 30 Nov 2012 | 26 Nov 2012 | 000-16244 |
| UPLOAD | Open Document | Open Filing | 29 Nov 2012 | |||
| CORRESP | Open Document | Open Filing | 16 Nov 2012 | |||
| 8-K | Open Document | Open Filing | 8-K | 15 Nov 2012 | 15 Nov 2012 | 000-16244 |
| NT 10-Q | Open Document | Open Filing | NT 10-Q | 15 Nov 2012 | 30 Sep 2012 | 000-16244 |
| UPLOAD | Open Document | Open Filing | 31 Oct 2012 | |||
| 8-K | Open Document | Open Filing | 8-K | 22 Oct 2012 | 22 Oct 2012 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 03 Aug 2012 | 02 Aug 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 03 Aug 2012 | 02 Aug 2012 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 27 Jul 2012 | 30 Jun 2012 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 26 Jul 2012 | 26 Jul 2012 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Jun 2012 | 11 Jun 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Jun 2012 | 11 Jun 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 13 Jun 2012 | 11 Jun 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 30 May 2012 | 25 May 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 30 May 2012 | 25 May 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 30 May 2012 | 25 May 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 30 May 2012 | 25 May 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 30 May 2012 | 25 May 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 22 May 2012 | 18 May 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 22 May 2012 | 18 May 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 22 May 2012 | 18 May 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 22 May 2012 | 18 May 2012 | |
| 10-Q | Open Document | Data | Open Filing | 10-Q | 09 May 2012 | 31 Mar 2012 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2012 | 07 May 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2012 | 07 May 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2012 | 07 May 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2012 | 07 May 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2012 | 07 May 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 08 May 2012 | 07 May 2012 | |
| 8-K | Open Document | Open Filing | 8-K | 07 May 2012 | 04 May 2012 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 30 Apr 2012 | 25 Apr 2012 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 22 Mar 2012 | 16 Mar 2012 | 000-16244 |
| DEFA14A | Open Document | Open Filing | DEFA14A | 20 Mar 2012 | 000-16244 | |
| DEF 14A | Open Document | Open Filing | DEF 14A | 20 Mar 2012 | 04 May 2012 | 000-16244 |
| 4 | Open Document | Open Filing | FORM 4 - | 02 Mar 2012 | 02 Mar 2012 | |
| 4 | Open Document | Open Filing | FORM 4 - | 27 Feb 2012 | 24 Feb 2012 | |
| 3 | Open Document | Open Filing | FORM 3 - | 27 Feb 2012 | 24 Feb 2012 | |
| 8-K | Open Document | Open Filing | 8-K | 27 Feb 2012 | 24 Feb 2012 | 000-16244 |
| 10-K | Open Document | Data | Open Filing | 10-K | 22 Feb 2012 | 31 Dec 2011 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | SC 13G/A | 14 Feb 2012 | 005-44703 | |
| SC 13G/A | Open Document | Open Filing | 14 Feb 2012 | 005-44703 | ||
| 4 | Open Document | Open Filing | FORM 4 - | 10 Feb 2012 | 09 Feb 2012 | |
| SC 13G/A | Open Document | Open Filing | 10 Feb 2012 | 005-44703 | ||
| 8-K | Open Document | Open Filing | 8-K | 06 Feb 2012 | 06 Feb 2012 | 000-16244 |
| 8-K | Open Document | Open Filing | 8-K | 03 Feb 2012 | 30 Jan 2012 | 000-16244 |
| SC 13G/A | Open Document | Open Filing | 24 Jan 2012 | 005-44703 | ||
| 4 | Open Document | Open Filing | FORM 4 - | 20 Jan 2012 | 18 Jan 2012 | |
| SC 13G/A | Open Document | Open Filing | 10 Jan 2012 | 005-44703 | ||
| UPLOAD | Open Document | Open Filing | 10 Jan 2012 | |||
| CORRESP | Open Document | Open Filing | 04 Jan 2012 |