| Name | Relationship | Address | Signature | Signature date | CIK |
|---|---|---|---|---|---|
| Plisinski Michael P | Chief Executive Officer, Director | C/O ONTO INNOVATION INC., 16 JONSPIN ROAD, WILMINGTON | By: Eric French For: Michael Plisinski | 03 Mar 2026 | 0001325550 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ONTO | Common Stock | Options Exercise | $0 | +4,597 | +2.7% | $0.000000 | 172,652 | 01 Mar 2026 | Direct | F1 |
| transaction | ONTO | Common Stock | Tax liability | $479,708 | -2,222 | -1.3% | $215.89 | 170,430 | 01 Mar 2026 | Direct | F2 |
| transaction | ONTO | Common Stock | Tax liability | $415,588 | -1,925 | -1.1% | $215.89 | 168,505 | 01 Mar 2026 | Direct | F2 |
| Type | Sym | Class | Transaction | Value $ | Shares | Change % | * Price $ | Shares After | Date | Underlying Class | Amount | Exercise Price | Ownership | Footnotes |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| transaction | ONTO | Performance Stock Unit | Options Exercise | $0 | -5,971 | -100% | $0.000000 | 0 | 01 Mar 2026 | Common Stock | 5,971 | Direct | F1 |
| Id | Content |
|---|---|
| F1 | This transaction represents the settlement of performance stock units ("PSUs") granted on March 1, 2024 in shares of common stock of Onto Innovation Inc. on their scheduled vesting date of March 1, 2026 as a result of the satisfaction of the performance criteria at 77% of the target. |
| F2 | Represents shares withheld by Issuer to satisfy tax withholding obligations in connection with the vesting of restricted stock unit or performance stock unit grants previously received by the Reporting Person. |